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    • 3. 发明申请
    • IMPACT TOOL
    • IMPACT工具
    • US20090266570A1
    • 2009-10-29
    • US12493918
    • 2009-06-29
    • Koichi HASHIMOTOHiroyuki TsubakimotoHisashi Oda
    • Koichi HASHIMOTOHiroyuki TsubakimotoHisashi Oda
    • B25D16/00B23B45/16
    • B25D11/064B25D11/062B25D16/00B25D2250/141B25D2250/371Y10T74/18056
    • An impact tool for simultaneously providing a rotational force and an impact force to an object has an output shaft rotated by a motor, hammer for intermittently providing an impact force to the output shaft, hammer holder for movably holding the hammer, and an impact force generator for generating the impact force from an output of the motor. An air chamber is formed between the hammer and the hammer holder such that a volume of the air chamber is variable in response to a position of the hammer relative to the hammer holder. In addition, the hammer receives a bias force generated in a direction toward the output shaft by a biasing device. This bias force effectively increases the impact force in cooperation with an air pressure caused by a volume change of the air chamber.
    • 用于同时向物体提供旋转力和冲击力的冲击工具具有由马达旋转的输出轴,用于间歇地向输出轴提供冲击力的锤,用于可移动地保持锤的锤保持器和冲击力发生器 用于从电动机的输出产生冲击力。 在锤和锤保持器之间形成空气室,使得空气室的体积响应于锤相对于锤保持器的位置是可变的。 此外,锤子通过偏置装置接收在朝向输出轴的方向上产生的偏压力。 与空气室的体积变化引起的空气压力协调,该偏压力有效地增加冲击力。
    • 4. 发明申请
    • ROBOTIC DEVICE, INSPECTION DEVICE, INSPECTION METHOD, AND INSPECTION PROGRAM
    • 机器人装置,检查装置,检查方法和检查方案
    • US20120201448A1
    • 2012-08-09
    • US13364741
    • 2012-02-02
    • Takashi NAMMOTOKoichi HASHIMOTOTomohiro INOUE
    • Takashi NAMMOTOKoichi HASHIMOTOTomohiro INOUE
    • G06K9/68G06K9/00
    • G06T7/0008B25J9/1697G06T7/001G06T2207/30164
    • A robotic device includes an imaging section adapted to take an image of an object having a hole, and generate an image data of the object including an inspection area of an image of the hole, a robot adapted to move the imaging section, an inspection area luminance value detection section adapted to detect a luminance value of the inspection area from the image data, a reference area luminance value detection section adapted to detect a luminance value of a reference area adjacent to the inspection area from the image data, and a determination section adapted to determine a state of the inspection area based on one of a ratio and a difference between the luminance value of the inspection area detected by the inspection area luminance value detection section and the luminance value of the reference area detected by the reference area luminance value detection section.
    • 机器人装置包括成像部件,其适于拍摄具有孔的物体的图像,并且生成包括孔的图像的检查区域的物体的图像数据,适于移动成像部分的机器人,检查区域 亮度值检测部分,适于从图像数据中检测检查区域的亮度值;参考区域亮度值检测部分,用于从图像数据中检测与检查区域相邻的参考区域的亮度值,以及确定部分 适于基于由检查区域亮度检测部检测出的检查区域的亮度值与由基准区域亮度值检测出的基准区域的亮度值之间的比率和差值之一来确定检查区域的状态 检测部分。
    • 6. 发明申请
    • PARTICLE REMOVING MEMBER OF SUBSTRATE PROCESSING EQUIPMENT
    • 基板加工设备的颗粒去除构件
    • US20120131757A1
    • 2012-05-31
    • US13342403
    • 2012-01-03
    • Koichi HASHIMOTOYoshio OTA
    • Koichi HASHIMOTOYoshio OTA
    • A47L25/00H01L23/00C08G73/10
    • B08B7/0028H05K3/26Y10T428/31504
    • The present invention intends to provide a particle removing member of a substrate processing equipment which can be assuredly conveyed into the substrate processing equipment and can conveniently and assuredly remove an adhered foreign matter, and a particle removing method of a substrate processing equipment that uses the particle removing member.A particle removing member of a substrate processing equipment comprising a particle removing layer in which a time necessary for a signal intensity of free induction decay measured by a pulse NMR-Solid Echo method to decay to 37% of an initial value at a measurement temperature of 100 degrees centigrade is 1000 μs or less, in particular, a particle removing sheet comprising the above-constituted particle removing layer on a support, and a conveying member with particle removing function formed by adhering the above-constituted particle removing sheet on the conveying member, and furthermore a method of removing particle of a substrate processing equipment, comprising conveying the above-constituted conveying member with particle removing function into a substrate processing equipment.
    • 本发明旨在提供一种能够确实地输送到基板加工设备中的基板加工设备的颗粒除去部件,并且能够方便且可靠地除去附着的异物,以及使用该粒子的基板加工设备的粒子除去方法 去除构件。 一种基板处理设备的颗粒去除部件,其包括除粒层,其中通过脉冲NMR固体回波法测量的自由感应衰减的信号强度所需的时间在测量温度下衰减到初始值的37% 100摄氏度为1000μs以下,特别是在支撑体上具有上述颗粒除去层的颗粒除去片,以及具有除去上述功能的传送部件,其通过将上述颗粒除去片粘合在传送部件上而形成 以及除去基板加工设备的颗粒的方法,包括将具有颗粒去除功能的上述传送部件输送到基板处理设备中。