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    • 5. 发明授权
    • Sidewall channel stop process
    • 侧壁通道停止过程
    • US4753896A
    • 1988-06-28
    • US933500
    • 1986-11-21
    • Mishel Matloubian
    • Mishel Matloubian
    • H01L27/12H01L21/762H01L21/84H01L21/86H01L29/786H01L21/225H01L21/308
    • H01L21/76264H01L21/76224H01L21/84H01L21/86H01L21/76283H01L21/76289
    • A new way of making sidewall channel stops for silicon on insulator devices (including silicon on oxide, silicon on nitride, and silicon on sapphire devices). While the moat regions 11, 13 (where the active devices will be formed) are covered by thick masking material 24, a high energy implantation step introduces additional doping into exposed silicon regions 14'. Before the mesa etch is performed to isolate the individual active device regions 32 a filament 28 is formed on the walls of the masking material 24 which covers the predetermined locations of the active device regions 32. The mesa etch is then performed using a chemistry which will be blocked not only by the original masking material 24 but also by the sidewall filaments 28. Thus, the doping level defined by implantation into regions 14' will extend into the sidewalls of the mesas 32 for a distance which is controlled not only by the lateral diffusion length of those dopants, but also by the thickness of the sidewall filament 28.
    • 硅绝缘体器件(包括氧化硅,氮化硅和蓝宝石器件上的硅)制作侧壁通道的新方式。 当护壁区域11,13(其中将形成有源器件)被厚掩模材料24覆盖时,高能量注入步骤将额外的掺杂引入暴露的硅区域14'。 在执行台面蚀刻以隔离各个有源器件区域32之前,在覆盖有源器件区域32的预定位置的掩模材料24的壁上形成细丝28.然后使用化学物质进行台面蚀刻 不仅被原始掩模材料24阻挡,而且被侧壁细丝28阻挡。因此,通过注入到区域14'中限定的掺杂水平将延伸到台面32的侧壁中一段距离,该距离不仅由侧向 这些掺杂剂的扩散长度,也是侧壁丝28的厚度。
    • 7. 发明授权
    • Method of manufacturing semiconductor on insulator transistor with
complementary transistor coupled to the channel
    • 制造具有耦合到沟道的互补晶体管的半导体绝缘体晶体管的方法
    • US5399519A
    • 1995-03-21
    • US76599
    • 1993-06-14
    • Mishel Matloubian
    • Mishel Matloubian
    • H01L27/088H01L21/335
    • H01L27/088
    • The described embodiments of the present invention provide a method and structure for actively controlling the voltage applied to the channel of field effect transistors. In the described embodiments, a transistor connected to the channel region is fabricated. The channel transistor has opposite conductivity type to the transistor using the main channel region. The source of the channel transistor is connected to the channel and the drain of the channel transistor is connected to a reference voltage. The same gate is used to control the channel transistor and the main transistor. When a voltage which causes the main transistor to be on is applied, the channel transistor is off, thus allowing the channel to float and allowing higher drive current. On the other hand, when a voltage to turn off the main transistor is applied, the channel transistor is turned on, thus clamping the channel region to the reference voltage. This allows for consistent threshold voltage control of the main transistor. In a preferred embodiment, the channel of the main transistor is used as the source of the channel transistor and the gate of the main transistor extends onto the channel region of the channel transistor. The reference voltage is then connected to the drain region which is formed on the opposite side of the channel transistor channel region from the main transistor's channel.
    • 本发明的所描述的实施例提供了一种用于主动控制施加到场效应晶体管的沟道的电压的方法和结构。 在所描述的实施例中,制造了连接到沟道区的晶体管。 沟道晶体管与使用主沟道区的晶体管具有相反的导电类型。 沟道晶体管的源极连接到沟道,沟道晶体管的漏极连接到参考电压。 相同的栅极用于控制沟道晶体管和主晶体管。 当施加导致主晶体管导通的电压时,沟道晶体管截止,从而允许沟道浮动并允许更高的驱动电流。 另一方面,当施加关闭主晶体管的电压时,沟道晶体管导通,从而将沟道区夹持到参考电压。 这允许主晶体管的一致的阈值电压控制。 在优选实施例中,主晶体管的沟道用作沟道晶体管的源极,并且主晶体管的栅极延伸到沟道晶体管的沟道区上。 参考电压然后连接到形成在沟道晶体管沟道区域与主晶体管沟道的相对侧上的漏极区域。
    • 8. 发明授权
    • Silicon-on insulator transistor with internal body node to source node
connection
    • 具有内部节点到源节点连接的硅上绝缘体晶体管
    • US5144390A
    • 1992-09-01
    • US663190
    • 1991-02-28
    • Mishel Matloubian
    • Mishel Matloubian
    • H01L21/336H01L27/07H01L29/10H01L29/786
    • H01L29/66772H01L27/0727H01L29/1083H01L29/78612
    • A transistor and a method of making a transistor are disclosed, where a tunnel diode is formed to make connection between the source of the transistor and the body node underlying the gate. For the example of an n-channel transistor, a p+ region is formed by implant and diffusion under the n+ source region, the p+ region in contact on one end with the relatively lightly doped p-type body node. The relatively high dopant concentration of both the p+ region and the n+ source region creates a tunnel diode. The tunnel diode conducts with very low forward voltages, which causes the body node region to be substantially biased to the potential of the source region. Methods for forming the transistor are also disclosed, including the use of a source/drain anneal prior to p-type implant, or alternatively a second sidewall oxide filament, to preclude the boron from counterdoping the LDD extension at the source side. Both silicon-on-insulator and bulk embodiments are disclosed.
    • 公开了晶体管和制造晶体管的方法,其中形成隧道二极管以在晶体管的源极和栅极之下的体节点之间形成连接。 对于n沟道晶体管的示例,通过在n +源极区域下的注入和扩散形成p +区域,在一端与相对轻掺杂的p型体节点接触的p +区域。 p +区域和n +源极区域的相对高的掺杂剂浓度产生隧道二极管。 隧道二极管以非常低的正向电压导通,这导致体节点区域基本上偏置到源极区域的电位。 还公开了用于形成晶体管的方法,包括在p型注入之前使用源极/漏极退火,或者替代地使用第二侧壁氧化物细丝,以阻止硼反​​向掺杂源极侧的LDD延伸。 公开了绝缘体上硅和体实施例。
    • 10. 发明授权
    • Masking scheme for silicon dioxide mesa formation
    • 二氧化硅台面形成掩蔽方案
    • US4950618A
    • 1990-08-21
    • US338719
    • 1989-04-14
    • Ravishankar SundaresanMishel Matloubian
    • Ravishankar SundaresanMishel Matloubian
    • H01L21/033H01L21/266
    • H01L21/266H01L21/033Y10S148/053Y10S148/082
    • An improved masking stack (63) comprises a pad oxide (58), polysilicon (60) and nitride (62). After forming a photoresist pattern (64) over the stack (63), an anisotropic etch is performed to remove the nitride (62) and a portion of the polysilicon (60) not covered by the pattern (64). Another etch is performed to remove the remaining polysilicon (60) to leave at least a portion of the pad oxide (58). A boron implant (66) is conducted to form implant areas (68 and 70) within the unmasked silicon active device layer (56). A portion of the implant areas (68 and 70) is masked with nitride (72), and the unmasked silicon layer (56) is then etched. The masking stack (63) and the nitride (72) is removed and unprotected silicon layer (56) and implant areas (68 and 70) are covered with an oxide forming the silicon dioxide mesa (78).
    • 改进的掩模叠层(63)包括衬垫氧化物(58),多晶硅(60)和氮化物(62)。 在堆叠(63)上形成光致抗蚀剂图案(64)之后,进行各向异性蚀刻以除去未被图案(64)覆盖的氮化物(62)和多晶硅(60)的一部分。 执行另一蚀刻以去除剩余的多晶硅(60)以留下衬垫氧化物(58)的至少一部分。 导电硼植入物(66)在未掩模的硅有源器件层(56)内形成植入区域(68和70)。 植入区域(68和70)的一部分用氮化物(72)掩蔽,然后对未掩模的硅层(56)进行蚀刻。 除去掩蔽堆叠(63)和氮化物(72),并且用形成二氧化硅台面(78)的氧化物覆盖未保护的硅层(56)和植入区域(68和70)。