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    • 1. 发明专利
    • Height measuring apparatus and height measuring method
    • 高度测量装置和高度测量方法
    • JP2013096859A
    • 2013-05-20
    • JP2011240344
    • 2011-11-01
    • Kobe Steel Ltd株式会社神戸製鋼所
    • MORIMOTO TSUTOMUKATAYAMA AKIRA
    • G01B11/24B21C51/00
    • PROBLEM TO BE SOLVED: To provide a technology with which the height of each position of a sample having a mirror surface property can be determined accurately.SOLUTION: An imaging section 2 captures a sample image that is an image of a sample S, for example, at a predetermined frame rate. A spectrum extraction section extracts spectrums from sample images captured sequentially by the imaging section 2 and determines deviation w(x) of the spectrums with respect to a reference spectrum indicating predetermined reference height and reference inclination. A height calculation section sequentially calculates a height d(x) of the sample S from the reference height by substituting the deviation w(x) of the spectrums extracted by the spectrum extraction section to w(x)=2L×(d/dx)×d(x)+2sinθ×d(x).
    • 要解决的问题:提供可以精确地确定具有镜面性质的样品的每个位置的高度的技术。 解决方案:成像部分2例如以预定的帧速率捕获作为样本S的图像的样本图像。 频谱提取部分从由成像部分2依次捕获的样本图像中提取频谱,并确定频谱相对于表示预定参考高度和参考倾斜度的参考频谱的偏差w(x)。 高度计算部分通过将频谱提取部分提取的频谱的偏差w(x)代入w(x)= 2L×(d / dx)),从参考高度顺序地计算样本S的高度d(x) ×d(x)+2sinθ×d(x)。 版权所有(C)2013,JPO&INPIT
    • 2. 发明专利
    • Device for measuring three-dimensional shape and method for measuring three-dimensional shape
    • 用于测量三维形状的装置和用于测量三维形状的方法
    • JP2012154684A
    • 2012-08-16
    • JP2011012051
    • 2011-01-24
    • Kobe Steel Ltd株式会社神戸製鋼所
    • MORIMOTO TSUTOMUKATAYAMA AKIRA
    • G01B11/24
    • PROBLEM TO BE SOLVED: To accurately calculate the surface shape of a measuring object without mechanically scanning illumination light.SOLUTION: A lighting control part 31 sequentially lights light sources LE one by one. An imaging control part 32 makes an imaging part 20 acquire image data on a measuring object whenever each light source LE is lit. An image data specification part 33 specifies image data whose luminance value becomes the maximum from among all the pieces of image data acquired by the imaging part 20 for each pixel constituting the image data. An inclination calculation part 34 specifies a position of the light source LE lit when each piece of image data is acquired for each piece of image data specified by the image data specification part 33, and calculates an inclination of each measurement position of the measuring object corresponding to each pixel based on the specified position of each light source LE. A surface shape calculation part 35 calculates height of each measurement position AP based on the inclination of each measurement position AP, calculated by the inclination calculation part 34, and calculates the surface shape of a measuring object OB.
    • 要解决的问题:精确地计算测量对象的表面形状而不机械扫描照明光。 解决方案:照明控制部分31逐个地依次点亮光源LE。 成像控制部32使每个光源LE点亮时,成像部20获取测量对象上的图像数据。 图像数据指定部分33针对构成图像数据的每个像素,从成像部件20获取的所有图像数据中的亮度值变为最大值的图像数据。 倾斜计算部34指定对于由图像数据指定部33指定的每个图像数据获取每个图像数据时点亮的光源LE的位置,并且计算对应于测量对象的每个测量位置的倾斜度 基于每个光源LE的指定位置到每个像素。 表面形状计算部35基于由倾斜计算部34计算的每个测量位置AP的倾斜度来计算各测量位置AP的高度,并计算测量对象OB的表面形状。 版权所有(C)2012,JPO&INPIT
    • 3. 发明专利
    • Surface angle measurement method and surface angle measurement device
    • 表面角度测量方法和表面角度测量装置
    • JP2012037268A
    • 2012-02-23
    • JP2010175313
    • 2010-08-04
    • Kobe Steel Ltd株式会社神戸製鋼所
    • KATAYAMA AKIRA
    • G01B11/26G01N21/27
    • PROBLEM TO BE SOLVED: To provide a surface angle measurement method and a surface angle measurement device that improve detection sensitivity of an angle of an object surface, and precisely measure the angle of the object surface without depending upon the measurement distance from the measurement device to the object surface.SOLUTION: A surface angle measurement device 1 that measures an inclination angle of a surface of a measurement object 2 by irradiating the surface of the measurement object 2 with measurement light and receiving measurement reflected light reflected by the measurement object 2 includes a plasmon filter unit 9 which receives the measurement reflected light with a metal thin film 11 and causes the metal thin film 11 to bring about surface plasmon resonance. Further, the surface angle measurement device includes an intensity detection unit 15 which measures the intensity of the reflected light from the metal thin film 11 having brought about the surface plasmon resonance, and a calculation unit 4 having inclination angle calculation means for calculating the inclination angle of the surface of the measurement object 2 based upon the intensity of the reflected light measured by the intensity detection unit 15.
    • 要解决的问题:提供一种提高物体表面的角度的检测灵敏度的表面角度测量方法和表面角度测量装置,并且精确地测量物体表面的角度,而不依赖于距离物体表面的测量距离 测量装置到物体表面。 解决方案:通过用测量光照射测量对象2的表面并接收由测量对象2反射的测量反射光来测量测量对象2的表面的倾斜角度的表面角度测量装置1包括等离子体激元 滤波器单元9,其接收具有金属薄膜11的测量反射光,并使金属薄膜11产生表面等离子体共振。 此外,表面角度测量装置包括强度检测单元15,其测量来自具有表面等离子体共振的金属薄膜11的反射光的强度;以及计算单元4,其具有用于计算倾斜角度的倾斜角度计算装置 基于由强度检测单元15测量的反射光的强度测量对象2的表面。(C)2012,JPO和INPIT
    • 5. 发明专利
    • Photothermal conversion measuring device and photothermal conversion measuring method
    • 光电转换测量装置和光电转换测量方法
    • JP2010266315A
    • 2010-11-25
    • JP2009117441
    • 2009-05-14
    • Kobe Steel Ltd株式会社神戸製鋼所
    • KATAYAMA AKIRAAMANAKA MASAHITOTAKAHASHI EIJI
    • G01N25/16
    • PROBLEM TO BE SOLVED: To prevent deterioration of measurement accuracy caused by, as noise, reflected light of signal light and excitation light to a cell when a phase change of the signal light caused by allowing the signal light and the excitation light to pass through a sample charged in the cell is measured by a heterodyne optical interference method. SOLUTION: Signal light Ps is allowed to enter a sample 1 obliquely with respect to a first outer wall 2a of a cell and pass through the sample 1 along a first optical path R1. The signal light having passed is partially reflected by a half mirror 3, and the reflected signal light Ps is allowed to pass through the sample 1 along a second optical light R2. Excitation light Ph is allowed to enter the sample 1 obliquely with respect to a second outer wall 2b through the half mirror 3, and pass through the sample 1 along the first optical path R1 in the direction opposite to that of the signal light Ps. Reference light Ph is allowed to pass through the sample 1 along the second optical path R2 through the half mirror 3 in the same direction as that of the signal light Ps. COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:为了防止当通过允许信号光和激发光引起的信号光的相变时,作为噪声而引起的信号光和激发光的反射光对单元造成的测量精度的劣化 通过外差光学干涉法测量通过电池中充电的样品。 解决方案:允许信号光Ps相对于单元的第一外壁2a倾斜地进入样品1,并沿着第一光路R1穿过样品1。 已经通过的信号光被半反射镜3部分地反射,并且允许反射信号光Ps沿第二光
      光R2通过样品1。 激发光Ph被允许通过半透半反镜3相对于第二外壁2b倾斜地进入样品1,并沿着与信号光Ps相反的方向沿着第一光路R1穿过样品1。 参考光Ph沿着第二光路R2通过半反射镜3以与信号光Ps相同的方向通过样品1。 版权所有(C)2011,JPO&INPIT
    • 6. 发明专利
    • Inspection device and inspection method
    • 检查装置和检查方法
    • JP2012047673A
    • 2012-03-08
    • JP2010191995
    • 2010-08-30
    • Kobe Steel Ltd株式会社神戸製鋼所
    • KATAYAMA AKIRAMORIMOTO TSUTOMU
    • G01N21/892
    • PROBLEM TO BE SOLVED: To detect a flaw of an inspection object with accuracy.SOLUTION: A feature amount calculation part 43 calculates a standard deviation V(i, j) of a luminance value P(n, i, j) of each pixel G(i, j) from image data of the inspection object H, uses the calculated standard deviation V(i, j) to normalize luminance the P(n, i, j), and calculates a normalized luminance value P'(n, i, j). The feature amount calculation part 43 sets a normal area in which flaws are estimated not to appear in the whole image data, and calculates a covariance matrix C of the normal area of the inspection object H from the normalized luminance value P'(n, i, j) within the set area. A flaw information generation part 44 calculates Mahalanobis distance d(i, j) between the normalized luminance value P'(n, i, j) and the covariance matrix C, and generates a flaw image showing a flaw place.
    • 要解决的问题:准确地检测检查对象的缺陷。 解决方案:特征量计算部43根据检查对象H的图像数据,计算各像素G(i,j)的亮度值P(n,i,j)的标准偏差V(i,j) 使用计算的标准偏差V(i,j)来将亮度归一化为P(n,i,j),并计算归一化亮度值P'(n,i,j)。 特征量计算部分43设置在整个图像数据中不出现缺陷的正常区域,并且从归一化亮度值P'(n,i)计算检查对象H的法线区域的协方差矩阵C ,j)在设定区域内。 缺陷信息生成部44计算归一化亮度值P'(n,i,j)与协方差矩阵C之间的马氏距离d(i,j),并生成表示缺陷的缺陷图像。 版权所有(C)2012,JPO&INPIT
    • 7. 发明专利
    • Light absorption characteristic measurement method
    • 光吸收特性测量方法
    • JP2010236991A
    • 2010-10-21
    • JP2009084483
    • 2009-03-31
    • Kobe Steel Ltd株式会社神戸製鋼所
    • KATAYAMA AKIRATAKAHASHI EIJI
    • G01N21/45
    • PROBLEM TO BE SOLVED: To provide a light absorption characteristic measurement method for accurately measuring a light absorption of a sample, and available to an evaluation of a photothermal effect on the light absorption of the sample and the degree of an effect due to the other factor.
      SOLUTION: An excitation light H for exciting the to-be-measured sample 1 and first and second reference samples 2a, 2b as two identical objects disposed on both sides of the to-be-measured sample 1 sequentially penetrates the first reference sample 2a, the to-be-measured sample 1 and the second reference sample 2b. First and second detection lights Pa, Pb pass through the first and second reference samples 2a, 2b so as to internally intersect with the excitation light H. After the passage, an optical interferometer 30 causes the detection lights Pa', Pb' to be interfered with each other so as to detect a strength of an interference light. A phase difference between the detection lights Pa', Pb' is detected from the detection signal.
      COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:提供一种用于精确测量样品的光吸收的光吸收特性测量方法,并且可用于评估样品的光吸收的光热效应和由于 另一个因素。 解决方案:用于激发被测量样品1和第一和第二参考样品2a,2b的激发光H作为设置在被测量样品1两侧的两个相同物体,依次穿透第一参考 样品2a,待测样品1和第二参考样品2b。 第一和第二检测光Pa,Pb通过第一和第二参考样品2a,2b,以便与激发光H内部相交。在通过之后,光学干涉仪30使检测光Pa',Pb'受到干扰 以便检测干涉光的强度。 从检测信号中检测出检测光Pa',Pb'之间的相位差。 版权所有(C)2011,JPO&INPIT
    • 8. 发明专利
    • Sample observing apparatus
    • 样品观察装置
    • JP2010032371A
    • 2010-02-12
    • JP2008194941
    • 2008-07-29
    • Kobe Steel Ltd株式会社神戸製鋼所
    • YAMAGUCHI AKASHIFUKUMOTO YOSHITOKATAYAMA AKIRA
    • G01N21/01G01N21/27
    • PROBLEM TO BE SOLVED: To provide a sample observing apparatus capable of observing all of a large number of samples arranged inside a cylindrical body. SOLUTION: A protein crystallizing apparatus 100 includes a plurality of sample holding units 10, which are mutually arranged axially in the bore part 8a, inside a bore part 8a. Each of the sample holding units 10 on and after the second sample holding unit 10 counted from an opening part 8b contains a sample holding member 20 respectively having sample holding parts 22 and 23 at a plurality of positions mutually arranged circumferentially in the bore part 8a and a light guide unit 30 arranged in a manner relatively rotatable around the center axis of the bore part 8a with respect to each sample holding member 20 so as to be successively opposed to the respective sample holding parts 22 and 23 of the sample holding member 20 and guiding the light from the sample held between the opposed sample holding parts 22 and 23 to the opening part 8b from the gap (d) between the outer peripheral surface of the sample holding unit 10 on this side and the inner peripheral surface of the bore part 8a. COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供能够观察布置在圆筒体内的大量样品的样本观察装置。 解决方案:蛋白质结晶装置100包括多个样品保持单元10,它们在孔部分8a中轴向相互布置,位于孔部分8a的内部。 从开口部8b计数的第二检体容纳单元10中的每个样本保持单元10包含分别具有在孔部8a中周向相互配置的多个位置处的检体保持部22,23的检体保持部件20, 导光单元30,以相对于每个样品保持构件20相对于孔部8a的中心轴线相对旋转的方式布置,以便与样品保持构件20的各个样品保持部22和23相连; 将保持在相对的样品保持部22和23之间的样品的光从该侧的样品保持单元10的外周面与孔部的内周面之间的间隙(d)引导到开口部8b 8A。 版权所有(C)2010,JPO&INPIT
    • 10. 发明专利
    • Defect detecting device
    • 缺陷检测装置
    • JP2013044635A
    • 2013-03-04
    • JP2011182443
    • 2011-08-24
    • Kobe Steel Ltd株式会社神戸製鋼所
    • KATAYAMA AKIRAMORIMOTO TSUTOMU
    • G01N21/892
    • PROBLEM TO BE SOLVED: To provide a defect detecting device which efficiently detects at a high speed a surface defect generating difference in surface roughness, by using the simplest processing possible.SOLUTION: A defect detecting device 1 includes an array-shaped light source 3 irradiating an inspection object T with irradiation light, and imaging means 2 for detecting reflection light which is the irradiation light reflected on a surface of the inspection object T; and detects a surface defect D existing on the surface of the inspection object T and having difference in roughness from a normal surface. The array-shaped light source 3 emits at least three kinds of the irradiation light having different characteristics. The imaging means 2 is disposed so as to make the light-receiving amount of specified one or two kinds of at least the three kinds of the irradiation light reflected by the surface defect D larger than the light-receiving amount of the rest of the irradiation light, when the surface defect D is in a mirror surface shape.
    • 要解决的问题:提供一种通过使用最简单的处理可以高效地高效地检测产生表面粗糙度差异的表面缺陷的缺陷检测装置。 解决方案:缺陷检测装置1包括用照射光照射检查对象T的阵列状光源3和用于检测作为在检查对象T的表面上反射的照射光的反射光的成像装置2; 并且检测存在于检查对象T的表面上的与正常表面的粗糙度不同的表面缺陷D. 阵列状光源3发射具有不同特性的至少三种照射光。 成像装置2被设置为使由表面缺陷D反射的至少三种照射光中的至少一种或两种以上的受光量大于其余照射的光接收量 当表面缺陷D处于镜面形状时。 版权所有(C)2013,JPO&INPIT