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1. 发明授权

US06778879B2 Automated material handling system and method of use 失效
标题翻译：自动物料搬运系统及使用方法
公开(公告)号：US06778879B2
公开(公告)日：2004-08-17
申请号：US10268379
申请日：2002-10-10
申请人： Ko-Pin Chang , Ming Wang , Jui-An Shih , Jim Chue , Jason Liu
发明人： Ko-Pin Chang , Ming Wang , Jui-An Shih , Jim Chue , Jason Liu
IPC分类号： G06F700
CPC分类号： H01L21/67271 , G05B19/41865 , G05B2219/32097 , G05B2219/32263 , G05B2219/45026 , H01L21/67276 , Y02P90/20 , Y02P90/24 , Y02P90/28
摘要： The present invention provides an automated material handling system (AMHS) having: a FOUP management system, for managing a plurality of multiple lot FOUPs; a real time dispatch system for controlling dispatching of wafer lot orders within a wafer fabrication system; an automatic material handling integration system having a stocker for storing and sequencing a plurality of FOUPs, the stocker having an embedded sorter disposed there within for sorting wafers within a plurality of multiple lot FOUPs, and a FOUP transportation system for transporting FOUPs within a wafer fabrication facility; a manufacture execution system in operative communication with the real time dispatch system for controlling recipe processing and for controlling flow of FOUPs within the FAB; and a computer integrated manufacturing system for automating equipment within the AMHS. Additionally provided is a methodology for using the embedded sorter to sort FOUPs and a plurality of wafers within the AMHS.
摘要翻译：本发明提供了一种自动化材料处理系统（AMHS），其具有：用于管理多个多批FOUP的FOUP管理系统; 用于控制晶片制造系统内的晶片批次的调度的实时调度系统; 一种自动材料处理集成系统，具有用于存储和排序多个FOUP的储料器，所述储存器具有设置在其内的嵌入式分选机，用于在多个多批次FOUP内分类晶片;以及FOUP运输系统，用于在晶片制造中传送FOUP 设施; 与实时调度系统进行操作性通信的制造执行系统，用于控制配方处理和控制FAB内FOUP的流动; 以及用于自动化AMHS设备的计算机集成制造系统。另外提供了一种使用嵌入式分拣机来对AMU内的FOUP和多个晶片进行分类的方法。

2. 发明申请

US20050075753A1 Integrated transport system 有权
公开(公告)号：US20050075753A1
公开(公告)日：2005-04-07
申请号：US10677867
申请日：2003-10-02
申请人： Ko-Pin Chang , Jui-An Shih , Hui-Tang Liu
发明人： Ko-Pin Chang , Jui-An Shih , Hui-Tang Liu
IPC分类号： B23Q41/00 , B65G1/02 , B65G49/00 , B65G49/07 , G06F7/00 , G06Q10/00
CPC分类号： G06Q10/047 , G06Q10/08 , Y10S414/14
摘要： A transport system within a fabrication system. The fabrication system contains a plurality of tool bays, each of which has a plurality of processing tools for processing articles. The transport system contains a plurality of intrabay transport subsystems, an interbay transport subsystem, a plurality of stockers, and at least one linking subsystem. Each intrabay transport subsystem is dedicated to transporting articles within a particular tool bay. The interbay transport subsystem, linking the tool bays, transports articles between the tool bays. The stockers, located between the intrabay and interbay transport subsystems, store articles between processing and transfer articles between the intrabay and interbay transport subsystems. The linking subsystem, located between two adjacent intrabay transport subsystems, provides direct transport between the two corresponding tool bays.

3. 发明申请

US20050203654A1 System and method for scheduling manufacturing jobs for a semiconductor manufacturing tool 有权
标题翻译：用于调度半导体制造工具的制造作业的系统和方法
公开(公告)号：US20050203654A1
公开(公告)日：2005-09-15
申请号：US10796646
申请日：2004-03-09
申请人： Jui-An Shih , Ko-Pin Chang , Hui-Tang Liu
发明人： Jui-An Shih , Ko-Pin Chang , Hui-Tang Liu
IPC分类号： G06F19/00
CPC分类号： G06Q10/06 , G05B19/41865 , G05B2219/32254 , G05B2219/45031 , Y02P90/20 , Y02P90/86
摘要： A system and method are provided for scheduling a monitor job for a tool in a semiconductor manufacturing environment and for optimizing the scheduling of jobs in such an environment. In one example, the method includes receiving a monitor job and monitoring a status of the tool to determine when a predefined event occurs. A position in a buffer in which to place the monitor job may be identified in response to the event occurring, where placing the monitor job in the identified position will cause the monitor job to be executed at a correct time.
摘要翻译：提供了一种系统和方法，用于调度半导体制造环境中的工具的监视作业并优化在这种环境中的作业的调度。在一个示例中，该方法包括接收监视作业并监视工具的状态以确定何时发生预定事件。响应于发生的事件，可以识别在其中放置监视作业的缓冲器中的位置，其中将监视作业置于识别位置将导致监视作业在正确的时间被执行。

4. 发明授权

US07203563B2 Automatic N2 purge system for 300 mm full automation fab 有权
标题翻译：自动N2吹扫系统，适用于300 mm全自动化工厂
公开(公告)号：US07203563B2
公开(公告)日：2007-04-10
申请号：US10821156
申请日：2004-04-08
申请人： Ko-Pin Chang , Jui-An Shih , Hui-Tang Liu , Simon Chang , Nain-Sung Lee , Yung-Chang Peng
发明人： Ko-Pin Chang , Jui-An Shih , Hui-Tang Liu , Simon Chang , Nain-Sung Lee , Yung-Chang Peng
IPC分类号： G06F19/00
CPC分类号： H01L21/67017
摘要： A system for manufacturing semiconductor integrated circuit (IC) devices, including an operating control system, a process intermediate station in communication with the operating control system, and a gas purge device, wherein the gas purge device is included in the process intermediate station.
摘要翻译：一种用于制造半导体集成电路（IC）装置的系统，包括操作控制系统，与操作控制系统通信的过程中间站和气体净化装置，其中气体净化装置包括在过程中间站中。

5. 发明授权

US07269469B2 System and method for scheduling manufacturing jobs for a semiconductor manufacturing tool 有权
标题翻译：用于调度半导体制造工具的制造作业的系统和方法
公开(公告)号：US07269469B2
公开(公告)日：2007-09-11
申请号：US10796646
申请日：2004-03-09
申请人： Jui-An Shih , Ko-Pin Chang , Hui-Tang Liu
发明人： Jui-An Shih , Ko-Pin Chang , Hui-Tang Liu
IPC分类号： G06F19/00
CPC分类号： G06Q10/06 , G05B19/41865 , G05B2219/32254 , G05B2219/45031 , Y02P90/20 , Y02P90/86
摘要： A system and method are provided for scheduling a monitor job for a tool in a semiconductor manufacturing environment and for optimizing the scheduling of jobs in such an environment. In one example, the method includes receiving a monitor job and monitoring a status of the tool to determine when a predefined event occurs. A position in a buffer in which to place the monitor job may be identified in response to the event occurring, where placing the monitor job in the identified position will cause the monitor job to be executed at a correct time.
摘要翻译：提供了一种系统和方法，用于调度半导体制造环境中的工具的监视作业并优化在这种环境中的作业的调度。在一个示例中，该方法包括接收监视作业并监视工具的状态以确定何时发生预定事件。响应于发生的事件，可以识别在其中放置监视作业的缓冲器中的位置，其中将监视作业置于识别位置将导致监视作业在正确的时间被执行。

6. 发明申请

US20050228530A1 Automatic N2 purge system for 300mm full automation fab 有权
标题翻译：自动氮气吹扫系统300mm全自动化工厂
公开(公告)号：US20050228530A1
公开(公告)日：2005-10-13
申请号：US10821156
申请日：2004-04-08
申请人： Ko-Pin Chang , Jui-An Shih , Hui-Tang Liu , Simon Chang , Nain-Sung Lee , Yung-Chang Peng
发明人： Ko-Pin Chang , Jui-An Shih , Hui-Tang Liu , Simon Chang , Nain-Sung Lee , Yung-Chang Peng
IPC分类号： G06F19/00 , H01L21/00
CPC分类号： H01L21/67017
摘要： A system for manufacturing semiconductor integrated circuit (IC) devices, including an operating control system, a process intermediate station in communication with the operating control system, and a gas purge device, wherein the gas purge device is included in the process intermediate station.
摘要翻译：一种用于制造半导体集成电路（IC）装置的系统，包括操作控制系统，与操作控制系统通信的过程中间站和气体净化装置，其中气体净化装置包括在过程中间站中。

7. 发明授权

US06931303B2 Integrated transport system 有权
标题翻译：综合运输系统
公开(公告)号：US06931303B2
公开(公告)日：2005-08-16
申请号：US10677867
申请日：2003-10-02
申请人： Ko-Pin Chang , Jui-An Shih , Hui-Tang Liu
发明人： Ko-Pin Chang , Jui-An Shih , Hui-Tang Liu
IPC分类号： B23Q41/00 , B65G1/02 , B65G49/00 , B65G49/07 , G06F7/00 , G06Q10/00
CPC分类号： G06Q10/047 , G06Q10/08 , Y10S414/14
摘要： A transport system within a fabrication system. The fabrication system contains a plurality of tool bays, each of which has a plurality of processing tools for processing articles. The transport system contains a plurality of intrabay transport subsystems, an interbay transport subsystem, a plurality of stockers, and at least one linking subsystem. Each intrabay transport subsystem is dedicated to transporting articles within a particular tool bay. The interbay transport subsystem, linking the tool bays, transports articles between the tool bays. The stockers, located between the intrabay and interbay transport subsystems, store articles between processing and transfer articles between the intrabay and interbay transport subsystems. The linking subsystem, located between two adjacent intrabay transport subsystems, provides direct transport between the two corresponding tool bays.
摘要翻译：制造系统内的运输系统。制造系统包括多个工具托架，每个工具托架具有用于加工制品的多个加工工具。运输系统包含多个内部运输子系统，间隔运输子系统，多个储料器以及至少一个连接子系统。每个内部运输子系统专用于在特定工具托架内运输物品。连接工具托架的间隔运输子系统在工具托架之间运输物品。位于intrabay和interbay运输子系统之间的储料器在处理和转移物品之间的物品之间存储物品在树枝间和运输间子系统之间。连接子系统位于两个相邻的内部传输子系统之间，可在两个相应的工具托架之间提供直接传输。

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