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1. 发明授权

US07203563B2 Automatic N2 purge system for 300 mm full automation fab 有权
标题翻译：自动N2吹扫系统，适用于300 mm全自动化工厂
公开(公告)号：US07203563B2
公开(公告)日：2007-04-10
申请号：US10821156
申请日：2004-04-08
申请人： Ko-Pin Chang , Jui-An Shih , Hui-Tang Liu , Simon Chang , Nain-Sung Lee , Yung-Chang Peng
发明人： Ko-Pin Chang , Jui-An Shih , Hui-Tang Liu , Simon Chang , Nain-Sung Lee , Yung-Chang Peng
IPC分类号： G06F19/00
CPC分类号： H01L21/67017
摘要： A system for manufacturing semiconductor integrated circuit (IC) devices, including an operating control system, a process intermediate station in communication with the operating control system, and a gas purge device, wherein the gas purge device is included in the process intermediate station.
摘要翻译：一种用于制造半导体集成电路（IC）装置的系统，包括操作控制系统，与操作控制系统通信的过程中间站和气体净化装置，其中气体净化装置包括在过程中间站中。

2. 发明申请

US20050203654A1 System and method for scheduling manufacturing jobs for a semiconductor manufacturing tool 有权
标题翻译：用于调度半导体制造工具的制造作业的系统和方法
公开(公告)号：US20050203654A1
公开(公告)日：2005-09-15
申请号：US10796646
申请日：2004-03-09
申请人： Jui-An Shih , Ko-Pin Chang , Hui-Tang Liu
发明人： Jui-An Shih , Ko-Pin Chang , Hui-Tang Liu
IPC分类号： G06F19/00
CPC分类号： G06Q10/06 , G05B19/41865 , G05B2219/32254 , G05B2219/45031 , Y02P90/20 , Y02P90/86
摘要： A system and method are provided for scheduling a monitor job for a tool in a semiconductor manufacturing environment and for optimizing the scheduling of jobs in such an environment. In one example, the method includes receiving a monitor job and monitoring a status of the tool to determine when a predefined event occurs. A position in a buffer in which to place the monitor job may be identified in response to the event occurring, where placing the monitor job in the identified position will cause the monitor job to be executed at a correct time.
摘要翻译：提供了一种系统和方法，用于调度半导体制造环境中的工具的监视作业并优化在这种环境中的作业的调度。在一个示例中，该方法包括接收监视作业并监视工具的状态以确定何时发生预定事件。响应于发生的事件，可以识别在其中放置监视作业的缓冲器中的位置，其中将监视作业置于识别位置将导致监视作业在正确的时间被执行。

3. 发明申请

US20050075753A1 Integrated transport system 有权
公开(公告)号：US20050075753A1
公开(公告)日：2005-04-07
申请号：US10677867
申请日：2003-10-02
申请人： Ko-Pin Chang , Jui-An Shih , Hui-Tang Liu
发明人： Ko-Pin Chang , Jui-An Shih , Hui-Tang Liu
IPC分类号： B23Q41/00 , B65G1/02 , B65G49/00 , B65G49/07 , G06F7/00 , G06Q10/00
CPC分类号： G06Q10/047 , G06Q10/08 , Y10S414/14
摘要： A transport system within a fabrication system. The fabrication system contains a plurality of tool bays, each of which has a plurality of processing tools for processing articles. The transport system contains a plurality of intrabay transport subsystems, an interbay transport subsystem, a plurality of stockers, and at least one linking subsystem. Each intrabay transport subsystem is dedicated to transporting articles within a particular tool bay. The interbay transport subsystem, linking the tool bays, transports articles between the tool bays. The stockers, located between the intrabay and interbay transport subsystems, store articles between processing and transfer articles between the intrabay and interbay transport subsystems. The linking subsystem, located between two adjacent intrabay transport subsystems, provides direct transport between the two corresponding tool bays.

4. 发明授权

US07269469B2 System and method for scheduling manufacturing jobs for a semiconductor manufacturing tool 有权
标题翻译：用于调度半导体制造工具的制造作业的系统和方法
公开(公告)号：US07269469B2
公开(公告)日：2007-09-11
申请号：US10796646
申请日：2004-03-09
申请人： Jui-An Shih , Ko-Pin Chang , Hui-Tang Liu
发明人： Jui-An Shih , Ko-Pin Chang , Hui-Tang Liu
IPC分类号： G06F19/00
CPC分类号： G06Q10/06 , G05B19/41865 , G05B2219/32254 , G05B2219/45031 , Y02P90/20 , Y02P90/86
摘要： A system and method are provided for scheduling a monitor job for a tool in a semiconductor manufacturing environment and for optimizing the scheduling of jobs in such an environment. In one example, the method includes receiving a monitor job and monitoring a status of the tool to determine when a predefined event occurs. A position in a buffer in which to place the monitor job may be identified in response to the event occurring, where placing the monitor job in the identified position will cause the monitor job to be executed at a correct time.
摘要翻译：提供了一种系统和方法，用于调度半导体制造环境中的工具的监视作业并优化在这种环境中的作业的调度。在一个示例中，该方法包括接收监视作业并监视工具的状态以确定何时发生预定事件。响应于发生的事件，可以识别在其中放置监视作业的缓冲器中的位置，其中将监视作业置于识别位置将导致监视作业在正确的时间被执行。

5. 发明申请

US20050228530A1 Automatic N2 purge system for 300mm full automation fab 有权
标题翻译：自动氮气吹扫系统300mm全自动化工厂
公开(公告)号：US20050228530A1
公开(公告)日：2005-10-13
申请号：US10821156
申请日：2004-04-08
申请人： Ko-Pin Chang , Jui-An Shih , Hui-Tang Liu , Simon Chang , Nain-Sung Lee , Yung-Chang Peng
发明人： Ko-Pin Chang , Jui-An Shih , Hui-Tang Liu , Simon Chang , Nain-Sung Lee , Yung-Chang Peng
IPC分类号： G06F19/00 , H01L21/00
CPC分类号： H01L21/67017
摘要： A system for manufacturing semiconductor integrated circuit (IC) devices, including an operating control system, a process intermediate station in communication with the operating control system, and a gas purge device, wherein the gas purge device is included in the process intermediate station.
摘要翻译：一种用于制造半导体集成电路（IC）装置的系统，包括操作控制系统，与操作控制系统通信的过程中间站和气体净化装置，其中气体净化装置包括在过程中间站中。

6. 发明授权

US06931303B2 Integrated transport system 有权
标题翻译：综合运输系统
公开(公告)号：US06931303B2
公开(公告)日：2005-08-16
申请号：US10677867
申请日：2003-10-02
申请人： Ko-Pin Chang , Jui-An Shih , Hui-Tang Liu
发明人： Ko-Pin Chang , Jui-An Shih , Hui-Tang Liu
IPC分类号： B23Q41/00 , B65G1/02 , B65G49/00 , B65G49/07 , G06F7/00 , G06Q10/00
CPC分类号： G06Q10/047 , G06Q10/08 , Y10S414/14
摘要： A transport system within a fabrication system. The fabrication system contains a plurality of tool bays, each of which has a plurality of processing tools for processing articles. The transport system contains a plurality of intrabay transport subsystems, an interbay transport subsystem, a plurality of stockers, and at least one linking subsystem. Each intrabay transport subsystem is dedicated to transporting articles within a particular tool bay. The interbay transport subsystem, linking the tool bays, transports articles between the tool bays. The stockers, located between the intrabay and interbay transport subsystems, store articles between processing and transfer articles between the intrabay and interbay transport subsystems. The linking subsystem, located between two adjacent intrabay transport subsystems, provides direct transport between the two corresponding tool bays.
摘要翻译：制造系统内的运输系统。制造系统包括多个工具托架，每个工具托架具有用于加工制品的多个加工工具。运输系统包含多个内部运输子系统，间隔运输子系统，多个储料器以及至少一个连接子系统。每个内部运输子系统专用于在特定工具托架内运输物品。连接工具托架的间隔运输子系统在工具托架之间运输物品。位于intrabay和interbay运输子系统之间的储料器在处理和转移物品之间的物品之间存储物品在树枝间和运输间子系统之间。连接子系统位于两个相邻的内部传输子系统之间，可在两个相应的工具托架之间提供直接传输。

7. 发明申请

US20050051616A1 Dual ID verification system and switching method therefor 失效
标题翻译：双ID验证系统及其切换方法
公开(公告)号：US20050051616A1
公开(公告)日：2005-03-10
申请号：US10655049
申请日：2003-09-04
申请人： Jui-An Shin , Shun-An Chen , Ko-Pin Chang , Hui-Tang Liu , James You
发明人： Jui-An Shin , Shun-An Chen , Ko-Pin Chang , Hui-Tang Liu , James You
IPC分类号： G05B19/418 , G06F7/00
CPC分类号： G05B19/4183 , G05B2219/31086 , G05B2219/31312 , G05B2219/31315 , G05B2219/45031 , Y02P90/10
摘要： A method for switch dual Id verification systems for installing another carrier ID system on an equipment installation complying with SEMI E87. A first identification access system has internally installed on an equipment installation on which a second identification access system is then installed. Both systems are switched using a control flow and a wafer carrier ID is obtained by the chosen verification system.
摘要翻译：一种用于在符合SEMI E87的设备安装上安装另一个运营商ID系统的双重身份验证系统的方法。第一识别访问系统已经内部安装在设备安装上，然后安装第二识别访问系统。两个系统都使用控制流程进行切换，并且通过所选择的验证系统获得晶片载体ID。

8. 发明授权

US07077310B2 Dual ID verification system and switching method therefor 失效
标题翻译：双ID验证系统及其切换方法
公开(公告)号：US07077310B2
公开(公告)日：2006-07-18
申请号：US10655049
申请日：2003-09-04
申请人： Jui-An Shin , Shun-An Chen , Ko-Pin Chang , Hui-Tang Liu , James You
发明人： Jui-An Shin , Shun-An Chen , Ko-Pin Chang , Hui-Tang Liu , James You
IPC分类号： G06F17/00
CPC分类号： G05B19/4183 , G05B2219/31086 , G05B2219/31312 , G05B2219/31315 , G05B2219/45031 , Y02P90/10
摘要： A method for switch dual Id verification systems for installing another carrier ID system on an equipment installation complying with SEMI E87. A first identification access system has internally installed on an equipment installation on which a second identification access system is then installed. Both systems are switched using a control flow and a wafer carrier ID is obtained by the chosen verification system.
摘要翻译：一种用于在符合SEMI E87的设备安装上安装另一个运营商ID系统的双重身份验证系统的方法。第一识别访问系统已经内部安装在设备安装上，然后安装第二识别访问系统。两个系统都使用控制流程进行切换，并且通过所选择的验证系统获得晶片载体ID。

9. 发明申请

US20050177267A1 Tank scheduling optimization for replicated chemical in a semiconductor manufacturing wet bench 审中-公开
标题翻译：在半导体制造湿式工作台中的复制化学品的罐调度优化
公开(公告)号：US20050177267A1
公开(公告)日：2005-08-11
申请号：US10775802
申请日：2004-02-10
申请人： Yu-Ling Chang , Chen Hsiung , Hui-Tang Liu
发明人： Yu-Ling Chang , Chen Hsiung , Hui-Tang Liu
IPC分类号： G06F17/50 , G06F19/00
CPC分类号： H01L21/67271 , H01L21/6704
摘要： The present disclosure provides a system and method for identifying a tank containing a liquid from N number of tanks in a semiconductor manufacturing facility into which a batch of semiconductor products may be processed. An incoming batch of products to be processed in a predetermined number of tanks housing the liquid is received. A batch number associated with the batch is identified. A recipe index is determined using a relationship based on, for example, the modulus of N divided by the batch number, and a tank into which the batch is to be processed is determined using another relationship based at least in part on the recipe index and the predetermined number of tanks.
摘要翻译：本公开提供了一种用于在半导体制造设备中识别含有来自N个罐的液体的罐的系统和方法，一批半导体产品可以被加工到该罐中。在容纳液体的预定数量的容器中接收待加工的一批产品。识别与该批次相关联的批号。使用基于例如N的模数除以批号的关系来确定配方指数，并且至少部分地基于配方指数来确定要处理批次的罐，并且预定数量的坦克。

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