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    • 7. 发明授权
    • Charge trapping semiconductor memory element with improved trapping dielectric
    • 电荷捕获半导体存储元件具有改进的俘获电介质
    • US07312491B2
    • 2007-12-25
    • US11359783
    • 2006-02-23
    • Klaus-Dieter UfertJosef Willer
    • Klaus-Dieter UfertJosef Willer
    • H01L27/108
    • H01L27/11568H01L21/28282H01L27/115H01L29/513H01L29/792
    • A semiconductor memory element, which can be controlled via field effect, includes a semiconductor substrate of a first conduction type, a first doping region of a second conduction type provided in the semiconductor substrate, a second doping region of the second conduction type provided in the semiconductor substrate, a channel region located between the first and second doping regions, a multilayer gate dielectric which is arranged adjacent to the channel region and has a charge trapping memory layer, and a gate terminal provided above the gate dielectric. The charge trapping memory layer includes at least one sequence of adjacent layers, wherein the sequence of adjacent layers comprises an amorphous silicon carbide layer and an amorphous silicon nitride layer.
    • 可以通过场效应控制的半导体存储元件包括:第一导电类型的半导体衬底;设置在半导体衬底中的第二导电类型的第一掺杂区;第二导电类型的第二掺杂区; 半导体衬底,位于第一和第二掺杂区域之间的沟道区,与沟道区相邻布置并具有电荷俘获存储层的多层栅极电介质和设置在栅极电介质上方的栅极端子。 电荷捕获存储层包括至少一个相邻层序列,其中相邻层的序列包括非晶碳化硅层和非晶氮化硅层。