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1. 发明授权

US06518872B1 High resolution scanning thermal probe and method of manufacturing thereof 失效
标题翻译：高分辨率扫描热探针及其制造方法
公开(公告)号：US06518872B1
公开(公告)日：2003-02-11
申请号：US09951620
申请日：2001-09-14
申请人： Klaus Edinger , Ivaylo Rangelow
发明人： Klaus Edinger , Ivaylo Rangelow
IPC分类号： H01L304
CPC分类号： G01Q60/58 , Y10S977/867 , Y10S977/873
摘要： A resistant based thermal probe including a nanometer sized four-leg filament integrated with a piezoresistive AFM type cantilever is created by depositing the filament structure onto the cantilever by a chemical vapor deposition technique where the cantilever is exposed to the flux of precursor gas. An incident electron beam causes a fragmentation of the gas molecules leaving a deposit behind which leads to a conductive deposit shaped as a multi-leg filament structure for thermal measurements of a sample. A deposited four leg filament structure has a mechanical rigidity, high spatial resolution, low thermal conductivity and thermal capacitance, fast response time, and in combination with a four point resistant measurement and lock-in technique, eliminates resistivity for increasing both the temperature sensitivity and the signal-to-noise ratio of the thermal probe.
摘要翻译：通过使用化学气相沉积技术将悬臂梁暴露于前体气体的通量的化学气相沉积技术，将长丝结构沉积到悬臂上，形成包括与压阻AFM型悬臂结合的纳米尺寸的四条腿细丝的基于电阻的热探针。入射的电子束导致气体分子的断裂，留下沉积物，导致沉积物形成为多腿细丝结构的导电沉积物，用于样品的热测量。沉积的四腿细丝结构具有机械刚性，高空间分辨率，低热导率和热电容，响应时间快，并结合四点电阻测量和锁定技术，消除了电阻率，提高温度灵敏度和热探头的信噪比。

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