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    • 3. 发明授权
    • Silicon-aluminum mixed oxide
    • 硅铝混合氧化物
    • US06455455B1
    • 2002-09-24
    • US09560190
    • 2000-04-28
    • Klaus DellerRainer GolchertDieter KernerHelmut Mangold
    • Klaus DellerRainer GolchertDieter KernerHelmut Mangold
    • C04B3510
    • B82Y30/00C01B33/183C01F7/02C01F7/302C01P2002/02C01P2002/60C01P2002/72C01P2004/04C01P2004/50C01P2004/62C01P2004/64C01P2006/10C01P2006/11C01P2006/12C01P2006/22C09K3/1409
    • A silicon-aluminum mixed oxide produced by flame hydrolysis and having a composition of from 1 to 99.999 wt. % Al2O3, the remainder being SiO2, which mixed oxide exhibits an amorphous structure in the X-ray diffraction pattern and consists of intergrown primary particles, and in these primary particles crystallites are present. These crystallites having sizes of between one and 200 namometers and the specific surface of the powder being between 5 and 300 m2/g. These products are produced by a process wherein silicon halide and aluminum halide are vaporized in a particular ratio to one another and are homogeneously mixed with air, oxygen and hydrogen in a mixing unit by means of any carrier gas, this mixture undergoes combustion in a burner of known construction and, after the separation of the solids from the vapour phase, any traces of halide possibly adhering to the product are separated off in a further processing step by means of moist air at elevated temperature. The silicon-aluminum mixed oxide produced by flame hydrolysis are used in the form of dispersions for polishing, in particular in the electronics industry (CMP).
    • 通过火焰水解制备的硅铝混合氧化物,其组成为1至99.999wt。 %Al 2 O 3,其余为SiO 2,该混合氧化物在X射线衍射图中呈现无定形结构并且由共生的一次粒子组成,并且在这些一次粒子中存在微晶。 这些微晶的尺寸为1至200纳米,粉末的比表面积为5至300平方米/克。 这些产品通过一种方法生产,其中卤化硅和卤化铝以特定比例彼此蒸发,并通过任何载气在混合单元中与空气,氧气和氢气均匀混合,该混合物在燃烧器中燃烧 已知的结构,并且在从气相中分离出固体之后,任何痕量的可能附着在产品上的卤化物在另外的加工步骤中通过在高温下的潮湿空气分离出来。 通过火焰水解生产的硅铝混合氧化物以抛光用分散体的形式使用,特别是在电子工业(CMP)中。