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    • 1. 发明授权
    • Semiconductor device and method of manufacturing the same
    • 半导体装置及其制造方法
    • US06171905B2
    • 2001-01-09
    • US09192537
    • 1998-11-17
    • Kiyoyuki MoritaKiyoshi MorimotoKoichiro YukiKiyoshi Araki
    • Kiyoyuki MoritaKiyoshi MorimotoKoichiro YukiKiyoshi Araki
    • H01L21336
    • H01L21/76264H01L21/76267H01L21/76281H01L21/84H01L27/12H01L27/1203H01L29/7606H01L29/882
    • The invention provides a semiconductor device, having a variety of functions such as a bistable memory and a logic circuit, in which a MOS semiconductor element, a resonance tunnel diode, a hot electron transistor and the like are formed on a common substrate. An n-type Si layer and a p-type Si layer surrounded with an isolation oxide film are formed on an SOI substrate. A mask oxide film and a gate oxide film are formed, and the n-type Si layer is subjected to crystal anisotropic etching by using the mask oxide film as a mask, so as to change the n-type Si layer into the shape of a thin Si plate. After first and second tunnel oxide films are formed on side faces of this n-type Si layer, first and second polysilicon electrodes of a resonance tunnel diode and a polysilicon electrode working as a gate electrode of a MOS semiconductor element are formed out of a common polysilicon film. Thus, a Si/SiO2 type quantum device can be manufactured with ease at a low cost.
    • 本发明提供一种半导体器件,其具有各种功能,例如双稳态存储器和逻辑电路,其中在公共衬底上形成有MOS半导体元件,谐振隧道二极管,热电子晶体管等。 在SOI衬底上形成由隔离氧化膜包围的n型Si层和p型Si层。 形成掩模氧化膜和栅极氧化膜,并且通过使用掩模氧化膜作为掩模对n型Si层进行结晶各向异性蚀刻,以将n型Si层改变为 薄Si板。 在该n型Si层的侧面上形成第一和第二隧道氧化物膜之后,共用隧道二极管的第一和第二多晶硅电极和用作MOS半导体元件的栅电极的多晶硅电极由共同的 多晶硅膜。 因此,可以容易地以低成本制造Si / SiO 2型量子器件。
    • 2. 发明授权
    • MIS SOI semiconductor device with RTD and/or HET
    • 具有RTD和/或HET的MIS SOI半导体器件
    • US6091077A
    • 2000-07-18
    • US955267
    • 1997-10-21
    • Kiyoyuki MoritaKiyoshi MorimotoKoichiro YukiKiyoshi Araki
    • Kiyoyuki MoritaKiyoshi MorimotoKoichiro YukiKiyoshi Araki
    • H01L21/762H01L21/84H01L27/12H01L29/76H01L29/88H01L29/06
    • H01L21/76264H01L21/84H01L27/12H01L27/1203H01L29/7606H01L29/882H01L21/76267H01L21/76281
    • The invention provides a semiconductor device, having a variety of functions such as a bistable memory and a logic circuit, in which a MOS semiconductor element, a resonance tunnel diode, a hot electron transistor and the like are formed on a common substrate. An n-type Si layer and a p-type Si layer surrounded with an isolation oxide film are formed on an SOI substrate. A mask oxide film and a gate oxide film are formed, and the n-type Si layer is subjected to crystal anisotropic etching by using the mask oxide film as a mask, so as to change the n-type Si layer into the shape of a thin Si plate. After first and second tunnel oxide films are formed on side faces of this n-type Si layer, first and second polysilicon electrodes of a resonance tunnel diode and a polysilicon electrode working as a gate electrode of a MOS semiconductor element are formed out of a common polysilicon film. Thus, a Si/SiO.sub.2 type quantum device can be manufactured with ease at a low cost.
    • 本发明提供一种半导体器件,其具有各种功能,例如双稳态存储器和逻辑电路,其中在公共衬底上形成有MOS半导体元件,谐振隧道二极管,热电子晶体管等。 在SOI衬底上形成由隔离氧化膜包围的n型Si层和p型Si层。 形成掩模氧化膜和栅极氧化膜,并且通过使用掩模氧化膜作为掩模对n型Si层进行结晶各向异性蚀刻,以将n型Si层改变为 薄Si板。 在该n型Si层的侧面上形成第一和第二隧道氧化物膜之后,共用隧道二极管的第一和第二多晶硅电极和用作MOS半导体元件的栅电极的多晶硅电极由共同的 多晶硅膜。 因此,可以容易地以低成本制造Si / SiO 2型量子器件。