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    • 5. 发明申请
    • Polishing Slurry
    • 抛光泥浆
    • US20080248727A1
    • 2008-10-09
    • US11579151
    • 2005-04-28
    • Kiyotaka ShindoAkinori EtohTomokazu Ishizuka
    • Kiyotaka ShindoAkinori EtohTomokazu Ishizuka
    • B24B1/00
    • C09K3/1463C09G1/02C09G1/04H01L21/3212
    • The present invention provides a polishing slurry which remarkably inhibits the occurrence of scratch, dishing or erosion. According to the present invention, provided is a polishing slurry comprising organic particles (A), an oxidizing agent and a complexing agent, wherein said organic particles (A) are those obtained by coating a part of the surface of an organic particle (B) having functional groups capable of reacting with a metal to be polished on the surface with a resin (C) free from functional groups capable of reacting with a metal to be polished, and the organic particle (B) is preferably one containing a copolymer obtained by polymerization of a monomer composition comprising 1 to 50 weight % of one, two or more monomers selected from a monomer having a carboxyl group, a monomer having a hydroxyl group, a monomer having an amino group, a monomer having an acetoacetoxy group and a monomer having a glycidyl group, and 99 to 50 weight % of other monomers, with each percentage based on the total weight of the monomers.
    • 本发明提供了显着抑制刮擦,凹陷或侵蚀的发生的研磨浆料。 根据本发明,提供了包含有机颗粒(A),氧化剂和络合剂的抛光浆料,其中所述有机颗粒(A)是通过涂布有机颗粒(B)的一部分表面而获得的那些, 具有能够在表面上与能够与被研磨金属反应的官能团的树脂(C)与表面上的被研磨金属反应的官能团,有机粒子(B)优选含有通过 包含1至50重量%的一种或多种选自具有羧基的单体,具有羟基的单体,具有氨基的单体,具有乙酰乙酰氧基的单体和单体的单体组合物的聚合反应 具有缩水甘油基和99至50重量%的其它单体,每个百分比基于单体的总重量。
    • 7. 发明授权
    • Lithium ionic conducting glass thin film and carbon dioxide sensor
comprising the glass thin film
    • 锂离子导电玻璃薄膜和包含玻璃薄膜的二氧化碳传感器
    • US5755940A
    • 1998-05-26
    • US591650
    • 1996-02-12
    • Kiyotaka Shindo
    • Kiyotaka Shindo
    • C03C4/18C03C8/24G01N27/407G01N33/00
    • C03C8/24C03C4/18G01N27/4074G01N33/004
    • The lithium ionic conducting glass thin film of the present invention comprises a glass containing 20 to 80 mol % of an Li.sub.2 O component. This glass thin film has a dense structure which shuts off gas and can be used as a solid electrolyte in a carbon dioxide sensor. The thin carbon dioxide sensor of the present invention comprises the above lithium ionic conducting glass thin film as a solid electrolyte. This sensor enables complete elimination of noise attributed to gas permeation by virtue of the lithium ionic conducting glass thin film having a dense structure with the result that the accuracy of carbon dioxide concentration measurement can be enhanced. Further, the lithium ionic conducting glass is formed into a thin film, so that the sensor has a low internal resistance, acts at low operating temperatures and exhibits a high response speed. Therefore, a heater having a capacity smaller than in the prior art can be used in the sensor, so that, even when a structure integral with a heater and the like is employed, miniaturization of the sensor can be realized.
    • PCT No.PCT / JP95 / 01181 Sec。 371日期:1996年12月12日 102(e)日期1996年12月12日PCT提交1995年6月13日PCT公布。 第WO95 / 34515号公报 日期:1995年12月21日本发明的锂离子导电玻璃薄膜包含含有20〜80摩尔%Li 2 O成分的玻璃。 该玻璃薄膜具有密闭的结构,可以在二氧化碳传感器中用作固体电解质。 本发明的薄型二氧化碳传感器包括作为固体电解质的上述锂离子导电玻璃薄膜。 该传感器能够通过具有致密结构的锂离子导电玻璃薄膜完全消除归因于气体渗透的噪声,从而可以提高二氧化碳浓度测量的精度。 此外,锂离子导电玻璃形成为薄膜,使得传感器具有低的内阻,作用在低的操作温度下并且表现出高响应速度。 因此,可以在传感器中使用具有比现有技术更小的容量的加热器,使得即使采用与加热器等一体的结构,也可以实现传感器的小型化。