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    • 2. 发明授权
    • Apparatus for processing substrate
    • 基板处理装置
    • US07918940B2
    • 2011-04-05
    • US11342610
    • 2006-01-31
    • Ki-Choul AnYoung-Chul JoungTae-Young HaJung-Won ChangIl-Ho NohSeung-Bae Lee
    • Ki-Choul AnYoung-Chul JoungTae-Young HaJung-Won ChangIl-Ho NohSeung-Bae Lee
    • C23C16/00
    • H01L21/67236H01L21/67173H01L21/67748
    • In a substrate processing apparatus for forming thin layers on a substrate used for an organic light emitting diode, the apparatus includes a mask attaching chamber, a deposition chamber and a mask detaching chamber. The mask attaching chamber, the deposition chamber and the mask detaching chamber are provided with a transferring guide installed thereinside, and a substrate supporter for supporting the substrate moves along the transferring guide in or between the chambers. Thus, a time for processing the substrate and an area for the apparatus may be reduced. Also, the chambers are grouped in one or more, and a gate valve is installed between the grouped chambers for opening and closing a path between the grouped chambers. Accordingly, the chambers may be continuously maintained in a vacuum state when any one of the chambers is repaired.
    • 在用于有机发光二极管的基板上形成薄层的基板处理装置中,该装置包括掩模附着室,沉积室和掩模分离室。 掩模附着室,沉积室和掩模拆卸室设置有安装在其上的传送导向器,用于支撑基板的基板支撑件沿着传送导向件在室内或室之间移动。 因此,可以减少处理基板和设备的区域的时间。 而且,这些室分组成一个或多个,并且闸门安装在分组室之间,用于打开和关闭分组室之间的路径。 因此,当任何一个腔室被修复时,腔室可以被连续地保持在真空状态。
    • 4. 发明申请
    • Apparatus for manufacturing semiconductor device
    • 半导体器件制造装置
    • US20080138176A1
    • 2008-06-12
    • US11881012
    • 2007-07-25
    • Hyung-Joon KimSeung-Bae LeeDae-Hyun YangKi-Yung Lee
    • Hyung-Joon KimSeung-Bae LeeDae-Hyun YangKi-Yung Lee
    • H01L21/677
    • H01L21/67173H01L21/6719H01L21/67196H01L21/67201
    • The present invention provides an apparatus for manufacturing a semiconductor device. The apparatus includes vacuum wafer transfer modules disposed in a line so as to correspond to stages, a loadlock chamber module transferring wafers in vacuum, first process chambers disposed around the vacuum wafer transfer modules so as to process the wafers transferred from the loadlock chamber module, first buffer stages disposed in the vacuum wafer transfer modules so that the wafers are loaded thereon and unloaded therefrom, a first transfer robot disposed between the first process chambers so as to transfer the wafers from the loadlock chamber module to the first process chambers and then to transfer the wafers from the loadlock chamber module onto the first buffer stages, second process chambers disposed around the vacuum wafer transfer modules so as to process the wafers transferred from the first buffer stages, and a second transfer robot disposed between the second process chambers so as to transfer the wafers, which are transferred to the first buffer stages, to the second process chambers.
    • 本发明提供一种半导体器件的制造装置。 该装置包括:一排设置成对应于一级的真空晶片传送模块,一个负载锁定室模块,在真空中传送晶片,设置在真空晶片传送模块周围的第一处理室,以处理从负载锁定室模块传送的晶片, 设置在真空晶片转移模块中的第一缓冲级,使得晶片在其上装载并卸载;第一传送机器人,设置在第一处理室之间,以将晶片从负载锁定室模块传送到第一处理室,然后到 将晶片从负载锁定室模块转移到第一缓冲级上,第二处理室设置在真空晶片传送模块周围,以处理从第一缓冲级传送的晶片,以及设置在第二处理室之间的第二传送机器人,以便 以将转移到第一缓冲级的晶片传送到第二缓冲级 处理室。
    • 6. 发明申请
    • POWER-SAVING DISPLAY DEVICE
    • 省电显示设备
    • US20140292672A1
    • 2014-10-02
    • US13942424
    • 2013-07-15
    • Byeong-Hwa ChoiSeung-Bae Lee
    • Byeong-Hwa ChoiSeung-Bae Lee
    • G06F3/041
    • G06F3/041G06F1/1652G06F1/3262G06F1/3265Y02D10/153
    • A display device includes a display panel including a plurality of first sensing lines that extend in a first direction, and a plurality of second sensing lines that extend in a second direction, a first position selector and a second position selector at an edge of the display panel, and spaced apart from each other in the first direction, and a third position selector and a fourth position selector at or above the display panel, and spaced apart from each other in the second direction, wherein an activated region of the display panel corresponds to respective positions of the first position selector, the second position selector, the third position selector, and the fourth position selector
    • 显示装置包括:显示面板,包括沿着第一方向延伸的多个第一感测线,以及沿着第二方向延伸的多个第二感测线,在显示器的边缘处的第一位置选择器和第二位置选择器 并且在第一方向上彼此间隔开,以及在显示面板上或上方的第三位置选择器和第四位置选择器,并且在第二方向上彼此间隔开,其中显示面板的激活区域对应于 到第一位置选择器,第二位置选择器,第三位置选择器和第四位置选择器的相应位置