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    • 9. 发明授权
    • Method for forming fine particles, method for forming concavities and convexities, and device for forming fine particles
    • 形成细颗粒的方法,形成凹凸的方法和用于形成细颗粒的装置
    • US08152972B2
    • 2012-04-10
    • US12291817
    • 2008-11-13
    • Noboru IwataYoshiteru Murakami
    • Noboru IwataYoshiteru Murakami
    • C23C14/00
    • G11B5/74B82Y10/00G11B5/743G11B5/746G11B5/82G11B5/855
    • A method of the present invention for forming fine particles includes forming fine particles on a substrate by supplying, in the presence of inert gas, to the substrate, atoms or molecules of a supply material capable of being combined with a material constituting a surface of the substrate to produce a compound, the atoms or the molecules being supplied from a supply source. The supply source is positioned in such a manner as not to be directly connected by a line with the surface of the substrate where the fine particles are to be formed, and a high-frequency voltage varying positively and negatively, ranging from 100 kHz to 100 MHz, is applied to at least one of the substrate and a substrate supporter for supporting the substrate. This realizes a method for forming fine particles that allows forming highly uniformed magnetic fine particles with a periodic pattern through a simple process at a time.
    • 本发明的形成微粒子的方法包括:在惰性气体存在下,向衬底,能够与构成表面的材料组合的供给材料的原子或分子, 底物以产生化合物,原子或分子从供应源供应。 供给源的定位方式不是通过与要形成细颗粒的基板的表面的线直接连接,并且从100kHz到100的范围内正向和负的变化的高频电压 MHz,被施加到用于支撑衬底的衬底和衬底支撑体中的至少一个。 这实现了形成细颗粒的方法,其允许通过简单的工艺一次形成具有周期性图案的高度均匀的磁性细颗粒。