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1. 发明授权

US5628662A Method of fabricating a color field emission flat panel display tetrode 失效
标题翻译：制造彩色场发射平板显示器四极杆的方法
公开(公告)号：US5628662A
公开(公告)日：1997-05-13
申请号：US521510
申请日：1995-08-30
申请人： Kenneth G. Vickers , Henry S. Yan , Kurt P. Wachtler
发明人： Kenneth G. Vickers , Henry S. Yan , Kurt P. Wachtler
IPC分类号： H01J29/08 , H01J9/227
CPC分类号： H01J29/085 , H01J2201/304 , H01J2329/00
摘要： An anode plate 40, suitable for use in a field emission display tetrode, includes a transparent planar substrate 42 having thereon a layer 46 of a transparent, electrically conductive material, which comprises the anode electrode of the display tetrode. Barrier structures 48 comprising an electrically insulating, preferably opaque material, are formed on anode electrode 46 as a series of parallel ridges. Atop each barrier structure 48 are a series of electrically conductive stripes 50, which function as deflection electrodes. Luminescent material 52 overlies anode electrode 46 in the channels between barrier structures 48. Conductive stripes 50 are termed into three series such that every third stripe 50 is electrically interconnected. Deflection voltage controller 70 permits selective deflection of electrons toward the proper luminescent material 52. By applying a positive voltage on two of the three series of stripes 50, and applying a negative voltage on the third series of stripes 50, electrons are deflected between pairs of stripes 50 biased to the positive voltage. Deflection electrodes 50 may advantageously be formed of a conductive material having getting qualifies, such as zirconium-vanadium-iron. Also disclosed is a method for fabricating anode plate 40.
摘要翻译：适用于场致发射显示四极管的阳极板40包括透明平面基板42，透明平面基板42上具有透明导电材料层46，其包括显示器四极的阳极电极。阻挡结构48包括电绝缘的，优选不透明的材料，在阳极电极46上形成一系列平行的脊。每个阻挡结构48的顶部是一系列作为偏转电极的导电条50。发光材料52覆盖在阻挡结构48之间的通道中的阳极电极46.导电条50被称为三个系列，使得每三分之一条50电互连。偏转电压控制器70允许电子向适当的发光材料52的选择性偏转。通过在三个系列条带50中的两个上施加正电压，并在第三系列条带50上施加负电压，电子在成对条带50偏压到正电压。偏转电极50可有利地由具有合格性的导电材料形成，例如锆 - 钒 - 铁。还公开了一种用于制造阳极板40的方法。

2. 发明授权

US5902165A Field emission device with over-etched gate dielectric 失效
标题翻译：具有过蚀刻栅极电介质的场致发射器件
公开(公告)号：US5902165A
公开(公告)日：1999-05-11
申请号：US677694
申请日：1996-07-10
申请人： Jules D. Levine , Kenneth G. Vickers
发明人： Jules D. Levine , Kenneth G. Vickers
IPC分类号： H01J3/02 , H01J9/02 , H01J1/30 , H01J9/18
CPC分类号： H01J9/025 , H01J3/022 , H01J2329/00
摘要： An electron emitter plate (110) for an FED image display has an extraction (gate) electrode (22) spaced by an insulating spacer (125) from a cathode electrode including a conductive mesh (18). Arrays of microtips (14) are located in mesh spacings (16), within apertures (26) formed in extraction electrode (22) and subcavities (141) formed through apertures (26) in insulating spacer (125). Subcavities (141a) are open to row-adjacent and column-adjacent subcavities (141b, 141c) to form larger main cavities (144). Posts (143) of insulating spacer (125) separate diagonally-adjacent cavities (141d). Subcavities (141) are formed by over-etching a layer of insulating spacer material (25) through apertures (26) before or after forming microtips (14) through the same apertures (26). Over-etching reduces the dielectric constant factor of gate-to-cathode capacitance in the finished structure.
摘要翻译：用于FED图像显示器的电子发射极板（110）具有从包括导电网（18）的阴极电极与绝缘间隔物（125）间隔开的提取（栅极）电极（22）。小尖头（14）的阵列位于形成在引出电极（22）的孔（26）中的网格间隔（16）中，以及通过绝缘间隔物（125）中的孔（26）形成的子部分（141）。子腔（141a）对行相邻和列相邻的子区（141b，141c）开放以形成较大的主腔（144）。绝缘间隔物（125）的柱（143）分离对角相邻的空腔（141d）。在通过相同的孔（26）形成微尖端（14）之前或之后，通过孔（26）过度蚀刻绝缘隔离材料层（25）形成子腔（141）。过蚀刻降低了成品结构中栅极至阴极电容的介电常数因子。

3. 发明授权

US5635791A Field emission device with circular microtip array 失效
标题翻译：具有圆形微尖阵列的场发射装置
公开(公告)号：US5635791A
公开(公告)日：1997-06-03
申请号：US518829
申请日：1995-08-24
申请人： Kenneth G. Vickers
发明人： Kenneth G. Vickers
IPC分类号： H01J3/02 , H01J1/16
CPC分类号： H01J3/022 , H01J2201/30403 , H01J2201/319 , H01J2329/00
摘要： An electron emitter plate (110) for an FED image display has an extraction (gate) electrode (122) spaced by an insulating layer (25) from a cathode electrode including a conductive mesh (118). Circular arrays (112) of microtips (14) are located concentrically within circular mesh spacings (116) on a resistive layer (15), within apertures (26) formed in extraction electrode (122). Microtips (14) are laterally spaced from mesh structure (118) by substantially identical paths of a ballast-providing resistive layer (15), placing all microtips (14) at generally the same potential.
摘要翻译：用于FED图像显示器的电子发射器板（110）具有从包括导电网（118）的阴极电极与绝缘层（25）间隔开的提取（栅极）电极（122）。微尖端（14）的圆形阵列（112）同心地位于电阻层（15）的圆形网格间隔（116）内，形成在引出电极（122）中的孔（26）内。微型插座（14）通过基本相同的镇流器提供电阻层（15）的路径与网格结构（118）横向隔开，将所有微型插头（14）放置在大致相同的电位。

4. 发明授权

US5538450A Method of forming a size-arrayed emitter matrix for use in a flat panel display 失效
标题翻译：形成用于平板显示器的尺寸排列的发射器矩阵的方法
公开(公告)号：US5538450A
公开(公告)日：1996-07-23
申请号：US473863
申请日：1995-06-07
申请人： Kenneth G. Vickers
发明人： Kenneth G. Vickers
IPC分类号： H01J1/304 , H01J9/02
CPC分类号： H01J1/3042 , H01J9/025
摘要： A size-arrayed emitter structure is disclosed for use in a field emission display device. The emitter structure is designed such that each emitter array (illustratively, an array comprising microtips 40 in a 5.times.5 matrix) has an emitter hole 52 size (critical dimension) distribution that is centered on the optimum hole critical dimension and extends past the point at which the emitter tip 40 will operate. If the manufacturing process varies and produces an actual critical dimension larger than the designed value, emitters with the designed critical dimensions smaller than optimal will shift toward optimal, and emitters with critical dimensions smaller than the minimum operating value will become operational, while emitters with designed critical dimensions larger than optimal will cease to function. Similarly, if the actual critical dimension is smaller than the designed value, emitters with the designed critical dimensions larger than optimal will shift toward optimal, and emitters with critical dimensions larger than the maximum operating value will become operational, while emitters with designed critical dimensions smaller than optimal will cease to function. This will result in a distribution of active emitters in each array that are centered on the optimal value and that extend from the minimum functional emitter critical dimension to the maximum functional emitter critical dimension. Where the number of emitter arrays per display pixel is relatively large, the critical dimension of all of the emitter holes within each array may be designed to be equal, and the totality of arrays within each pixel may be designed such that their emitter hole critical dimensions are centered on the optimum hole critical dimension and extend past the point at which the emitter tips will operate.
摘要翻译：公开了用于场发射显示装置的尺寸排列的发射极结构。发射极结构被设计成使得每个发射极阵列（示例性地，包括5×5矩阵中的微尖端40的阵列）具有以最佳孔临界尺寸为中心的发射极孔52的尺寸（临界尺寸）分布，并且延伸超过发射极尖端40将工作。如果制造过程发生变化并产生大于设计值的实际临界尺寸，则设计临界尺寸小于最佳值的发射器将朝向最佳状态转移，并且具有小于最小工作值的关键尺寸的发射器将变为可操作，而具有设计的发射器大于最优的关键尺寸将不再起作用。类似地，如果实际临界尺寸小于设计值，则具有大于最优值的设计临界尺寸的发射器将朝向最佳状态移动，并且具有大于最大工作值的关键尺寸的发射器将变得可操作，而具有设计临界尺寸的发射器较小而不是最优将停止运作。这将导致在每个阵列中以最佳值为中心并从最小功能发射极临界尺寸延伸到最大功能发射极临界尺寸的有源发射器的分布。在每个显示像素的发射器阵列的数量相对较大的情况下，每个阵列内的所有发射器孔的临界尺寸可被设计为相等，并且每个像素内的阵列的总数可被设计成使得它们的发射极临界尺寸以最佳孔临界尺寸为中心，并延伸超过发射器尖端将工作的点。

5. 发明授权

US06684125B2 In-situ randomization and recording of wafer processing order at process tools 有权
标题翻译：在工艺工具中原位随机化和记录晶圆处理顺序
公开(公告)号：US06684125B2
公开(公告)日：2004-01-27
申请号：US09997930
申请日：2001-11-30
申请人： Randolph W. Kahn , Kenneth G. Vickers , Richard L. Guldi , Edward J. Leonard , Yaojian Leng
发明人： Randolph W. Kahn , Kenneth G. Vickers , Richard L. Guldi , Edward J. Leonard , Yaojian Leng
IPC分类号： G06F700
CPC分类号： G05B19/41875 , G05B2219/32221 , G05B2219/32225 , G05B2219/45031 , H01L21/67276 , Y02P90/22 , Y10S414/137
摘要： Wafer order is randomized in-situ by use of a separate wafer staging area and randomly shuffling wafers to and from this staging area to shuffle the processing order of the wafer lot. Positional data is captured for each wafer at both the send and receive ends of the process.
摘要翻译：晶片顺序通过使用单独的晶片分级区域原位随机化，并且从该分段区域随机混洗晶片以洗牌晶片批次的处理顺序。在进程的发送和接收端都为每个晶片捕获位置数据。

6. 发明授权

US5830527A Flat panel display anode structure and method of making 失效
标题翻译：平板显示器阳极结构及制作方法
公开(公告)号：US5830527A
公开(公告)日：1998-11-03
申请号：US654653
申请日：1996-05-29
申请人： Kenneth G. Vickers
发明人： Kenneth G. Vickers
IPC分类号： H01J9/20 , C23C14/00 , B05D5/06
CPC分类号： H01J9/20
摘要： In accordance with the principles of the present invention, there is disclosed herein a structure and method of fabricating an anode plate for use in a field emission device. The method comprises the steps of providing a transparent substrate 20 and applying transparent insulative material 28 over the substrate 20. Next, particles of luminescent material 25 are partially embedded in selective areas of the transparent insulative material 28. A layer of electrically conductive material 23 is then applied over the luminescent material 25. The layer of electrically conductive material 23 is abraded so as to remove portions of the layer of electrically conductive material 23 and portions of at least some of the luminescent particles 25.
摘要翻译：根据本发明的原理，本文公开了一种制造用于场发射装置的阳极板的结构和方法。该方法包括以下步骤：提供透明基板20并将透明绝缘材料28涂覆在基板20上。接下来，发光材料25的颗粒部分地嵌入透明绝缘材料28的选择区域中。导电材料层23是然后涂覆在发光材料25上。磨蚀导电材料层23，以去除导电材料层23的一部分和至少一些发光颗粒25的部分。

7. 发明授权

US5659467A Multiple model supervisor control system and method of operation 失效
标题翻译：多模型主管控制系统及操作方法
公开(公告)号：US5659467A
公开(公告)日：1997-08-19
申请号：US672468
申请日：1996-06-26
申请人： Kenneth G. Vickers
发明人： Kenneth G. Vickers
IPC分类号： G05B17/02 , G05B19/418 , G05B15/02 , G05B19/18
CPC分类号： G05B17/02 , G05B19/41875 , G05B2219/32191 , G05B2219/32196 , G05B2219/32201 , Y02P90/10 , Y02P90/14 , Y02P90/22
摘要： A multiple model supervisor control system (24) for use in a manufacturing environment (10) including a plurality of model based statistical process control units (14.sub.1 -14.sub.N) associated with equipment (#1-#N) is provided. The multiple model supervisor control system (24) includes a database (16) storing model coefficient shift data representing statistically significant drifts in output measurables that are associated with the model based statistical process control units (14.sub.1 -14.sub.N). A supervisor control unit (26) is coupled to the database (16) and is operable to access the coefficient shift data stored in the database (16). A multiple model map (30) of coefficient shift history is generated by the supervisor control unit (26) and shows the coefficient shift data against a common domain. A user interface (28) is coupled to the supervisor control unit (26) to provide user access to the multiple model map (30) to allow identification of problems caused by equipment drift and problems caused by environmental change.
摘要翻译：提供一种用于在与设备（＃1-＃N）相关联的多个基于模型的统计过程控制单元（141-14N）的制造环境（10）中使用的多模型主管控制系统（24）。多模型监控器控制系统（24）包括存储表示与基于模型的统计过程控制单元（141-14N）相关联的输出可测量中的统计上显着的漂移的模型系数移位数据的数据库（16）。管理器控制单元（26）耦合到数据库（16）并且可操作以访问存储在数据库（16）中的系数移位数据。系统移位历史的多重模型图（30）由监控器控制单元（26）生成，并且针对公共域显示系数移位数据。用户界面（28）耦合到主管控制单元（26），以向用户提供对多模型图（30）的访问以允许识别由设备偏移引起的问题和由环境变化引起的问题。

8. 发明授权

US5577943A Method for fabricating a field emission device having black matrix SOG as an interlevel dielectric 失效
标题翻译：制造具有黑矩阵SOG作为层间电介质的场致发射器件的方法
公开(公告)号：US5577943A
公开(公告)日：1996-11-26
申请号：US450610
申请日：1995-05-25
申请人： Kenneth G. Vickers , Chi-Cheong Shen , Bruce E. Gnade , Jules D. Levine
发明人： Kenneth G. Vickers , Chi-Cheong Shen , Bruce E. Gnade , Jules D. Levine
IPC分类号： H01J29/08 , H01J29/32 , H01J9/227 , H01J9/20
CPC分类号： H01J29/327 , H01J29/085 , H01J2329/00
摘要： A method of fabricating an anode plate 80 for use in a field emission device. The method comprises the steps of providing a substantially transparent substrate 88 having spaced-apart, electrically conductive regions 50 on a surface thereof, then coating the anode plate with a substantially opaque material 86. The opaque material 86 is removed from the surface of the conductive regions 50 in the active area 58, and from selected areas 60 of the interconnect portion of the conductive regions 50. A first bus 52 is provided for electrically connecting a first series 50.sub.R of the conductive regions 50, a second bus 54 is provided for electrically connecting a second series 50.sub.G of the conductive regions 50, and a third bus 56 is provided for electrically connecting a third series 50.sub.B of the conductive regions 50. Luminescent material of a first color 84.sub.R is applied to the first series of conductive regions 50.sub.R, luminescent material of a second color 84.sub.G is applied to the second series of conductive regions 50.sub.G, and luminescent material of a third color 84.sub.B is applied to the third series of conductive regions 50.sub.B.
摘要翻译：一种制造用于场发射装置的阳极板80的方法。该方法包括以下步骤：提供在其表面上具有间隔开的导电区域50的基本上透明的基底88，然后用基本上不透明的材料86涂覆阳极板。不透明材料86从导电的表面去除有源区域58中的区域50以及导电区域50的互连部分的选定区域60.第一总线52用于电连接导电区域50的第一系列50R，第二总线54设置用于电气连接导电区域50的第二系列50G和第三总线56，用于电连接导电区域50的第三系列50B。将第一颜色84R的发光材料施加到第一系列导电区域50R，发光将第二颜色84G的材料施加到第二系列导电区域50G，并将第三颜色84B的发光材料施加到第三系列的导电区域50B。

9. 发明授权

US5558554A Method for fabricating a field emission device anode plate having multiple grooves between anode conductors 失效
标题翻译：用于制造在阳极导体之间具有多个凹槽的场致发射器件阳极板的方法
公开(公告)号：US5558554A
公开(公告)日：1996-09-24
申请号：US455312
申请日：1995-05-31
申请人： John E. Finklea , Chi-Cheong Shen , Kenneth G. Vickers , Mark A. Kressley
发明人： John E. Finklea , Chi-Cheong Shen , Kenneth G. Vickers , Mark A. Kressley
IPC分类号： H01J9/14 , H01J29/08 , H01J9/20
CPC分类号： H01J9/148 , H01J29/085
摘要： A method of fabricating an anode plate 40 having a multiplicity of grooves 50 for use in a field emission flat panel display device comprises the steps of providing a transparent planar substrate 42 having a plurality of electrically conductive, parallel stripes 46 comprising the anode electrode of the device; etching a plurality of grooves 50 in the surface of the substrate in the spaces between the stripes 46; and then applying phosphor material 48.sub.R, 48.sub.G and 48.sub.B over the stripes 46. In one embodiment, a plurality of grooves 50', having generally vertical sidewalls, are formed in the upper surface of planar substrate 42' at the interstices of conductors 46. In a second embodiment, a plurality of grooves 50", having generally curved sidewalls, are formed in the upper surface of planar substrate 42' at the interstices of conductors 46'. In a third embodiment, a plurality of grooves 50", having generally vertical sidewalls, are formed in the upper surface of an insulating material 52 located between conductors 46". In a fourth embodiment, a plurality of grooves 50'", having generally curved sidewalls, are formed in the upper surface of an insulating material 52' between conductors 46'". In a fifth embodiment, a plurality of grooves are formed in the upper surface of planar substrate 100, and insulating material 108 is applied over the grooves. In a sixth embodiment, a plurality of grooves are formed in both the surface of the planar substrate 120 and the surface of insulating material 128.
摘要翻译：一种制造具有用于场发射平板显示装置中的多个凹槽50的阳极板40的方法包括以下步骤：提供具有多个导电平行条纹46的透明平面基板42，所述多个导电平行条纹46包括：设备; 在条纹46之间的空间中蚀刻衬底表面中的多个凹槽50; 然后将荧光材料48R，48G和48B施加在条纹46上。在一个实施例中，在导体46的间隙处，在平面基底42'的上表面中形成多个具有大致垂直侧壁的凹槽50'。在第二实施例中，在导体46'的间隙处在平面基板42'的上表面中形成具有大体弯曲的侧壁的多个凹槽50“。在第三实施例中，在位于导体46“之间的绝缘材料52的上表面中形成有具有大致垂直侧壁的多个凹槽50”。在第四实施例中，在导体46“之间的绝缘材料52'的上表面上形成有多个具有大致弯曲侧壁的槽50”'。在第五实施例中，在平面基板100的上表面中形成多个槽，并且在槽上施加绝缘材料108。在第六实施例中，在平面基板120的表面和绝缘材料128的表面上形成多个槽。

10. 发明授权

US5557159A Field emission microtip clusters adjacent stripe conductors 失效
标题翻译：场发射微尖端簇相邻条纹导体
公开(公告)号：US5557159A
公开(公告)日：1996-09-17
申请号：US341740
申请日：1994-11-18
申请人： Robert H. Taylor , Kenneth G. Vickers , Bruce E. Gnade , Arthur M. Wilson , Charies E. Primm
发明人： Robert H. Taylor , Kenneth G. Vickers , Bruce E. Gnade , Arthur M. Wilson , Charies E. Primm
IPC分类号： H01J1/304 , H01J1/30 , H01J29/04
CPC分类号： H01J1/3042 , H01J2201/319
摘要： The emitter plate 60 of a field emission flat panel display device includes a layer 68 of a resistive material and a mesh-like structure 62 of an electrically conductive material. A conductive plate 78 is also formed on top of resistive coating 68 within the spacing defined by the meshes of conductor 62. Microtip emitters 70, illustratively in the shape of cones, are formed on the upper surface of conductive plate 78. With this configuration, all of the microtip emitters 70 will be at an equal potential by virtue of their electrical connection to conductive plate 78. In one embodiment, a single conductive plate 82 is positioned within each mesh spacing of conductor 80; in another embodiment, four conductive plates 92 are symmetrically positioned within each mesh spacing of conductor 90. Also disclosed is an arrangement of emitter clusters comprising conductive plates 102 having a plurality of microtip emitters 104 formed thereon, each cluster adjacent and laterally spaced from a stripe conductor 100 by a region 106 of a resistive material. The conductive stripes 100 are substantially parallel to each other, are spaced from one another by two conductive plates 102, and are joined by bus regions 110 outside the active area of the display.
摘要翻译：场发射平板显示装置的发射极板60包括电阻材料层68和导电材料的网状结构62。在由导体62的网格限定的间隔内，还在电阻涂层68的顶部形成导电板78.导电板78的上表面上形成了示意为锥体形状的微尖头发射体70。通过它们与导电板78的电连接，所有微尖端发射器70将处于相等的电位。在一个实施例中，单个导电板82位于导体80的每个网格间隔内; 在另一个实施例中，四个导电板92对称地定位在导体90的每个网格间隔内。还公开了发射器簇的布置，其包括导电板102，其具有形成在其上的多个微尖端发射器104，每个簇相邻并且横向间隔开条带导体100由电阻材料的区域106。导电条100基本上彼此平行，通过两个导电板102彼此隔开，并且通过显示器的有效区域外的总线区域110连接。

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