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    • 5. 发明授权
    • Microactuator for use in mass data storage devices, or the like, and method for making same
    • 用于大容量数据存储装置的微型致动器等,以及制造其的方法
    • US06655002B1
    • 2003-12-02
    • US09607415
    • 2000-06-28
    • Peter J. MaimoneTsen-Hwang LinKurt P. Wachtler
    • Peter J. MaimoneTsen-Hwang LinKurt P. Wachtler
    • H02K1516
    • G11B5/5552H02K99/00Y10T29/49009
    • A microactuator, or micromotor, (60) and method for making it are presented such that a symmetrical build up of material is performed on opposite sides of a substrate. This reduces mechanical stresses in the device. In its construction, respective layers of circuit portions (108, 110) are built on each side of the structure, thereby eliminating the need to stack complex patterns. Stacking one complex pattern on top of a similar pattern is difficult because the surface, which is the base for subsequent layers, is not flat. The photolithography process that forms these patterns is not very forgiving to non-flat surfaces. Avoiding the stacked layers also allows thicker conductors to be considered for each circuit. Thicker circuits increase current carrying capacity, which in one of the key variables increase the power of the micromotor.
    • 呈现微致动器或微电动机(60)及其制造方法,使得在衬底的相对侧上进行对称的材料堆积。 这降低了设备中的机械应力。 在其结构中,各层电路部分(108,110)被构建在结构的每一侧上,从而不需要堆叠复杂的图案。 在类似图案之上堆叠一个复杂图案是困难的,因为作为后续层的基底的表面不是平坦的。 形成这些图案的光刻工艺不是非平坦的非平坦表面。 避免堆叠层也允许为每个电路考虑更厚的导体。 较大的电路增加了电流承载能力,其中一个关键变量增加了微电机的功率。