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1. 发明授权

US06756589B1 Method for observing specimen and device therefor 有权
标题翻译：观察标本及其装置的方法
公开(公告)号：US06756589B1
公开(公告)日：2004-06-29
申请号：US09743560
申请日：2001-01-09
申请人： Kenji Obara , Yuji Takagi , Atsushi Shimoda , Ryou Nakagaki , Seiji Isogai , Yasuhiko Ozawa , Hideka Banba , Kenji Watanabe , Chie Shishido
发明人： Kenji Obara , Yuji Takagi , Atsushi Shimoda , Ryou Nakagaki , Seiji Isogai , Yasuhiko Ozawa , Hideka Banba , Kenji Watanabe , Chie Shishido
IPC分类号： H01L2166
CPC分类号： H01J37/28 , G01N21/956 , G01N21/95692 , G01N2021/8867 , H01J2237/2817 , H01L22/12
摘要： During closer inspection with a local defect area being magnified, it is desirable to reduce image acquisition time by making the number of stage moves as few as possible so that a defect can be observed efficiently. To accomplish this, the invention offers a method of observing samples characterized by: acquiring a reference sample image not including any defect on a sample by capturing an image of the sample, based on the information on the defect developed on the sample and detected by an inspection apparatus; adjusting the position of the sample so that the defect will fall within the field of view of image capture, based on the above information; acquiring a defective sample image including the defect on the sample by capturing an image of the sample in the adjusted position; locating the defect on the defective sample image by comparing the reference sample image and the defective sample image; acquiring a magnified image of the defect by capturing a magnified view of the local area where the located defect exists within the field of view of image capture; and displaying the magnified image of the defect on a screen.
摘要翻译：在局部缺陷区域放大的仔细检查中，期望通过使台数移动尽可能少地减少图像获取时间，从而可以有效地观察到缺陷。为了实现这一点，本发明提供了一种观察样本的方法，其特征在于：基于在样品上形成的缺陷的信息，通过采集样本的检测信息来获取样本上不包括任何缺陷的参考样本图像，检验仪器; 基于上述信息，调整样本的位置使得缺陷落入图像捕获视野内; 通过在调整位置拍摄样本的图像来获取包含样本上的缺陷的缺陷样本图像; 通过比较参考样本图像和有缺陷的样本图像来定位缺陷样本图像上的缺陷; 通过在图像捕获视野内捕获定位缺陷的局部区域的放大视图来获取缺陷的放大图像; 并在屏幕上显示缺陷的放大图像。

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