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    • 4. 发明授权
    • Wafer surface observing method and apparatus
    • 晶圆表面观察方法及装置
    • US08577119B2
    • 2013-11-05
    • US11698987
    • 2007-01-29
    • Hiroshi HigashiTetsuya WatanabeKenji Aiko
    • Hiroshi HigashiTetsuya WatanabeKenji Aiko
    • G06K9/00G01N21/00
    • G01N21/9501G01N21/9503
    • A wafer surface observing apparatus for inspecting a peripheral portion of an object has (A) a lens system and a CCD camera for taking images of the peripheral portion of the object, (B) storage for storing image data about the taken images, and (C) display for displaying the image data stored in the storage device. In particular, the present apparatus can have functions of rotating the object placed on a prealignment portion, recording images of one full outer periphery of an end portion of the object by the lens system and CCD camera into the location where the orientation flat portions or notched portions of the object are placed in position, accepting the images into the storage device, and displaying the images on a CRT.
    • 用于检查物体的周边部分的晶片表面观察装置具有(A)用于拍摄物体的周边部分的图像的透镜系统和CCD照相机,(B)用于存储关于拍摄图像的图像数据的存储器和( C)显示用于显示存储在存储装置中的图像数据。 具体地说,本装置具有使放置在预对准部上的物体旋转的功能,通过透镜系统和CCD照相机将物体的端部的一个完整外周的图像记录到定位平面部分或切口的位置 将物体的部分放置在适当位置,将图像接收到存储装置中,并将图像显示在CRT上。
    • 8. 发明申请
    • THERMAL CONDUCTIVITY DETECTOR AND GAS CHROMATOGRAPH USING SAME
    • 热导率检测器和使用相同的气相色谱仪
    • US20120042712A1
    • 2012-02-23
    • US13211753
    • 2011-08-17
    • Naoki KishiHitoshi HaraTetsuya WatanabeKentaro Suzuki
    • Naoki KishiHitoshi HaraTetsuya WatanabeKentaro Suzuki
    • G01N30/02G01N25/18
    • G01N30/66G01N27/18G01N30/6095
    • The present invention provides a thermal conductivity detector capable of realizing high detection performance even with the use of a miniaturized heating element, and expanding an effective applicable temperature range of a heating element, and to provide a gas chromatograph using the same. The thermal conductivity detector comprises a flow-path through which a measurement gas is caused to flow, a heating element disposed inside the flow-path, the heating element being formed on the substrate, for detecting thermal conductivity of the measurement gas according to magnitude of an amount of heat taken away from the heating element by the measurement gas, wherein said heating element is provided with a beam including a part where the beam is folded at a predetermined angle, the part being formed at the central part of the beam.
    • 本发明提供即使使用小型化的加热元件也能够实现高检测性能并且扩大加热元件的有效适用温度范围的热导率检测器,并且提供使用该热传导检测器的气相色谱仪。 热导率检测器包括流过测量气体的流路,设置在流路内部的加热元件,加热元件形成在基板上,用于根据测量气体的大小检测热传导率 通过所述测量气体从所述加热元件取走的热量,其中所述加热元件设置有梁,所述梁包括所述梁以预定角度折叠的部分,所述部分形成在所述梁的中心部分。