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    • 2. 发明授权
    • Shape measuring apparatus and method
    • 形状测量装置及方法
    • US6026583A
    • 2000-02-22
    • US988397
    • 1997-12-10
    • Keiichi YoshizumiHiroyuki TakeuchiKeishi KuboYukio ImadaKoji Handa
    • Keiichi YoshizumiHiroyuki TakeuchiKeishi KuboYukio ImadaKoji Handa
    • G01B11/00G01B11/24
    • G01B11/005G01B11/24
    • A shape measuring apparatus includes an object measuring device, a holding base, a reference plane measuring device, and a length measuring unit. The holding base holds an object-to-be-measured on its surface and has a reference plane provided on its back side so that a measured surface of the object and the reference plane can be simultaneously scanned by the object measuring device and the reference plane measuring device, respectively. Therefore, the object and the reference plane can sway integrally with each other, and the accuracy of measurement of the measured surface is not influenced by any moving straightness deviation of the holding base unless any change occurs in relative positions of the reference plane and the measured surface. Therefore, the shape of the measured surface can be measured with the flatness accuracy of the reference plane.
    • 一种形状测量装置,包括物体测量装置,保持基座,基准平面测量装置和长度测量单元。 保持基座在其表面上保持要测量的物体,并且具有设置在其背面的参考平面,使得物体和参考平面的测量表面可以被物体测量装置和参考平面同时扫描 测量装置。 因此,物体和参考平面可以彼此一体摆动,并且测量表面的测量精度不受保持基座的任何移动直线度偏差的影响,除非在参考平面的相对位置和测量的相对位置发生变化 表面。 因此,可以用参考平面的平坦度精度来测量被测表面的形状。