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2. 发明授权

US06710883B2 Apparatus and method for measuring flatness of thin plate 失效
标题翻译：测量薄板平整度的装置和方法
公开(公告)号：US06710883B2
公开(公告)日：2004-03-23
申请号：US10140883
申请日：2002-05-09
申请人： Keiichi Yoshizumi , Keishi Kubo , Hiroyuki Takeuchi , Kouji Handa
发明人： Keiichi Yoshizumi , Keishi Kubo , Hiroyuki Takeuchi , Kouji Handa
IPC分类号： G01B902
CPC分类号： G01B11/2441 , G01B11/306
摘要： The invention measures a thickness variation at a high accuracy around a wide range of a thin plate by a comparatively large spot diameter between 0.5 mm and 2 mm. A polarization beam splitter separating a laser beam emitted from a laser generator and transmitting through an isolator into a measurement light and a reference light is provided. A quarter wavelength plate is provided between the polarization beam splitter and a measurement surface, and between the polarization beam splitter and a reference surface. A focusing and reflecting means for focusing and reflecting the measurement light reflected by the measurement surface and reflected by the polarization beam splitter, and the reference light reflecting by the reference surface and transmitting through the polarization beam splitter is provided. A half mirror reflecting the measurement light and the reference light which return from the polarization beam splitter is provided. A light receiving portion receiving the measurement light and the reference light which are reflected by the half mirror so as to interfere, converting an interference light intensity change into an electric signal, and counting the electric signal so as to measure a flatness of the measurement surface is provided.
摘要翻译：本发明通过0.5mm至2mm之间的较大的光点直径来测量薄板宽范围内的高精度的厚度变化。提供了将从激光发生器发射的激光束分离并通过隔离器传输到测量光和参考光的偏振分束器。四分之一波长板设置在偏振分束器和测量表面之间以及偏振分束器与参考表面之间。提供了用于聚焦和反射由测量表面反射并由偏振分束器反射的测量光以及由参考表面反射并通过偏振分束器透射的参考光的聚焦和反射装置。提供了反射从偏振分束器返回的测量光和参考光的半反射镜。接收由半反射镜反射的测量光和参考光的光接收部分，其干涉，将干涉光强度变化转换成电信号，并对电信号进行计数，以便测量测量表面的平坦度被提供。

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