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    • 4. 发明授权
    • Electromechanical transducer film and method for manufacturing electromechanical transducer film
    • 机电换能器薄膜及制造机电换能器薄膜的方法
    • US08425026B2
    • 2013-04-23
    • US13004203
    • 2011-01-11
    • Osamu MachidaYoshikazu AkiyamaKeiji UedaAkira Shimofuku
    • Osamu MachidaYoshikazu AkiyamaKeiji UedaAkira Shimofuku
    • B41J2/04B41J2/17
    • B41J2/14233H01L41/0805H01L41/0926H01L41/318
    • A method for manufacturing an electromechanical transducer film including a lower electrode and plural layers of a sol-gel solution film formed on the lower electrode by an inkjet method, the method including the steps of a) modifying a surface of the lower electrode, b) forming a first sol-gel solution film on the surface of the lower electrode by ejecting droplets of a sol-gel solution to the surface of the lower electrode, and c) forming a second sol-gel solution film on the first sol-gel solution film by ejecting droplets of the sol-gel solution to a surface of the first sol-gel solution film. Adjacent dots formed on the surface of the lower electrode by the droplets ejected in step b) overlap each other. Adjacent dots formed on the surface of the first sol-gel solution film by the droplets ejected in step c) do not overlap each other.
    • 一种制造机电换能器薄膜的方法,所述机电换能器薄膜包括下电极和通过喷墨方法形成在下电极上的多层溶胶 - 凝胶溶液膜,所述方法包括以下步骤:a)修改下电极的表面,b) 通过将溶胶 - 凝胶溶液的液滴喷射到下电极的表面,在下电极的表面上形成第一溶胶 - 凝胶溶液膜,以及c)在第一溶胶 - 凝胶溶液上形成第二溶胶 - 凝胶溶液膜 通过将溶胶 - 凝胶溶液的液滴喷射到第一溶胶 - 凝胶溶液膜的表面上。 在步骤b)中喷射的液滴在下电极的表面上形成的相邻点彼此重叠。 在步骤c)中喷射的液滴在第一溶胶 - 凝胶溶液膜的表面上形成的相邻点彼此不重叠。