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    • 9. 发明申请
    • GAS CONCENTRATION CONTROLLER SYSTEM
    • 气体浓度控制系统
    • US20120152364A1
    • 2012-06-21
    • US13327678
    • 2011-12-15
    • Yuichiro HashimotoJunichi Miyaji
    • Yuichiro HashimotoJunichi Miyaji
    • F15D1/00
    • G05D11/132G01N33/0006Y10T137/0318Y10T137/7759Y10T137/7761Y10T137/87249Y10T137/8729Y10T137/87314Y10T137/87676
    • The present invention is one that prevents standard gas from remaining in a standard gas line to prevent a concentration of standard gas from being reduced due to adsorption, modification, or the like, and has: a diluent gas line provided with a diluent gas flow rate controlling mechanism; a standard gas line provided with a standard gas flow rate controlling mechanism; an output gas line joined by the diluent gas line and standard gas line and outputs the standard gas having a predetermined concentration; an exhaust gas line connected to an upstream side of the standard gas flow rate controlling mechanism in the standard gas line and provided with an on/off valve and a flow rate control part; and a control part that, depending on a flow rate of the standard gas flowing through the standard gas line or the type of the standard gas, switches on/off the on/off valve.
    • 本发明是防止标准气体残留在标准气体管线中,以防止标准气体由于吸附,改性等而降低的浓度,并具有:具有稀释气体流量的稀释气体管线 控制机制; 设有标准气体流量控制机构的标准气体管线; 通过稀释气体管线和标准气体管路连接的输出气体管线,输出具有预定浓度的标准气体; 与标准气体流量控制机构的标准气体流量控制机构的上游侧连接并配置有开关阀和流量控制部的排气管路, 以及控制部,其根据流过标准气体管路的标准气体的流量或标准气体的类型来开/关开闭阀。