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    • 4. 发明授权
    • Thermal flow sensor
    • 热流量传感器
    • US08627717B2
    • 2014-01-14
    • US13361372
    • 2012-01-30
    • Satoshi AsanoMasahiro MatsumotoHiroshi NakanoKeiji Hanzawa
    • Satoshi AsanoMasahiro MatsumotoHiroshi NakanoKeiji Hanzawa
    • G01F1/68
    • G01F1/6845G01F1/692G01F1/698
    • A thermal flow sensor includes a heater temperature controller that realizes stable startup characteristics and prevents degradation of a sensor element and can also accommodate a smaller heater. The sensor also includes a semiconductor substrate; a cavity portion provided in the semiconductor substrate; a dielectric film provided on the semiconductor substrate; a thin layer area formed as a result of the dielectric film covering the cavity portion; a heating resistor provided in the thin layer area on the dielectric film; a first temperature-sensitive resistor provided in the thin layer area on the dielectric film; a heating controller; a second temperature-sensitive resistor provided near the heating resistor; and a flow rate detector that detects a flow rate of a fluid on the basis of temperature of the second temperature-sensitive resistor. The heating controller controls the temperature of the heating resistor on the basis of first and second reference temperatures.
    • 热流传感器包括加热器温度控制器,其实现稳定的启动特性并防止传感器元件的劣化并且还可以容纳较小的加热器。 传感器还包括半导体衬底; 设置在所述半导体基板中的空腔部; 设置在所述半导体基板上的电介质膜; 作为覆盖空腔部分的电介质膜的结果而形成的薄层区域; 设置在电介质膜上的薄层区域中的加热电阻器; 设置在介电膜上的薄层区域中的第一温敏电阻器; 加热控制器 设置在加热电阻附近的第二温敏电阻器; 以及流量检测器,其基于第二温度敏感电阻器的温度来检测流体的流量。 加热控制器基于第一和第二参考温度来控制加热电阻器的温度。
    • 5. 发明授权
    • Thermal flow meter
    • 热流量计
    • US08336376B2
    • 2012-12-25
    • US12844429
    • 2010-07-27
    • Hiroshi NakanoMasahiro MatsumotoKeiji Hanzawa
    • Hiroshi NakanoMasahiro MatsumotoKeiji Hanzawa
    • G01F1/68
    • G01F1/6845G01F1/692G01F1/698G01F1/699
    • Provided is a heating temperature adjustment circuit in a thermal flow meter capable of adjusting fluctuations of a heating temperature of a heat-generating resistor due to fluctuations of resistances with high accuracy and low cost. The thermal flow meter comprises: a heat-generating resistor that generates heat when a current flows therethrough; a first temperature measuring resistor, a second resistor, a third resistor, and a fourth resistor whose resistance values vary due to temperature; and a fixed resistance having a resistance temperature coefficient lower than that of the first temperature measuring resistor, and measuring a flow rate of a fluid by controlling the heating temperature of the heat-generating resistor. The thermal flow meter includes: a first series circuit in which the fixed resistance, the first temperature measuring resistor, and the second resistor are connected to one another in series; and a second series circuit in which the third resistor and the fourth resistor are connected to each other in series, and generates a voltage to be added to the second series circuit based on voltages at both ends of the fixed resistance.
    • 提供一种热流量计中的加热温度调节电路,其能够以高精度和低成本由于电阻的波动而调节发热电阻器的加热温度的波动。 热流量计包括:当电流流过其中时产生热量的发热电阻器; 第一温度测量电阻器,第二电阻器,第三电阻器和电阻值由温度变化的第四电阻器; 以及电阻温度系数低于第一温度测量电阻器的固定电阻,并且通过控制发热电阻器的加热温度来测量流体的流量。 热流量计包括:第一串联电路,其中固定电阻,第一温度测量电阻器和第二电阻器串联连接; 以及第二串联电路,其中第三电阻器和第四电阻器串联连接,并且基于固定电阻两端的电压产生要添加到第二串联电路的电压。
    • 8. 发明申请
    • Thermal flowmeter of fluid
    • 流体热流量计
    • US20070125169A1
    • 2007-06-07
    • US10580112
    • 2003-11-20
    • Hiroshi NakanoMasamichi YamadaMasahiro MatsumotoIzumi WatanabeKeiji HanzawaKeiichi Nakada
    • Hiroshi NakanoMasamichi YamadaMasahiro MatsumotoIzumi WatanabeKeiji HanzawaKeiichi Nakada
    • G01F1/68
    • G01F1/6965G01F1/6845
    • A thermal air flowmeter having excellent temperature characteristics and improved measurement accuracy. The thermal air flowmeter comprises a temperature sensor disposed in a casing of the air flowmeter, a computing unit for correcting a flow rate detection voltage from a measuring element by using the temperature sensor, and heating temperature control means disposed in a temperature control circuit for performing temperature control of a heating resistor to vary a temperature rise of the heating resistor relative to an air temperature depending on the air temperature. Flow rate detection errors of the thermal air flowmeter caused by an overall temperature change and a temperature change on an intake passage wall surface can be corrected simultaneously and a thermal air flowmeter having superior measurement accuracy can be realized.
    • 具有优异的温度特性和改进的测量精度的热空气流量计。 热空气流量计包括设置在空气流量计的壳体中的温度传感器,用于通过使用温度传感器校正来自测量元件的流量检测电压的计算单元,以及设置在温度控制电路中的加热温度控制装置,用于执行 加热电阻器的温度控制以根据空气温度改变加热电阻器相对于空气温度的温度升高。 可以同时校正由总体温度变化和进气通道壁面上的温度变化引起的热空气流量计的流量检测误差,并且可以实现具有优异的测量精度的热空气流量计。
    • 9. 发明授权
    • Heating resistance flow rate measuring apparatus
    • 耐热流量测量装置
    • US07225669B2
    • 2007-06-05
    • US11283778
    • 2005-11-22
    • Masahiro MatsumotoMasamichi YamadaHiroshi NakanoIzumi WatanabeKeiji HanzawaKeiichi Nakada
    • Masahiro MatsumotoMasamichi YamadaHiroshi NakanoIzumi WatanabeKeiji HanzawaKeiichi Nakada
    • G01F1/68
    • G01F1/6845F02D41/187G01F1/692G01F1/696G01F1/699
    • A heating resistance flow rate measuring apparatus which can use a power source of an ECU in an automobile without requiring an expensive protective circuit and regulator. Heating of temperature detecting resistors themselves causes temperature changes on the windward and leeward sides, and these temperature changes depend on the amounts of heat generated by the temperature detecting resistors. The amounts of heat generated by the temperature detecting resistors depend on a voltage value of the ECU power source applied to the temperature detecting resistors, and an error is caused in a sensor output depending on a variation in the voltage of the ECU power source. Based on the finding that suppressing the amount of heat generated by the temperature detecting resistors is effective in avoiding the sensor output error caused depending on a variation in the output voltage of the ECU power source, means for suppressing the amount of heat generated by the temperature detecting resistors is disposed.
    • 一种能够在汽车中使用ECU的电源而不需要昂贵的保护电路和调节器的加热电阻流量测量装置。 温度检测电阻本身的加热引起迎风侧风和背风侧的温度变化,这些温度变化取决于温度检测电阻产生的热量。 由温度检测电阻器产生的热量取决于施加到温度检测电阻器的ECU电源的电压值,并且根据ECU电源的电压变化在传感器输出中引起误差。 基于这样的发现,抑制由温度检测电阻产生的热量对于避免根据ECU电源的输出电压的变化而导致的传感器输出误差是有效的,用于抑制由温度产生的热量的装置 设置检测电阻器。