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1. 发明授权

US07520067B2 Three-dimensional measurement probe 有权
标题翻译：三维测量探头
公开(公告)号：US07520067B2
公开(公告)日：2009-04-21
申请号：US11979034
申请日：2007-10-30
申请人： Keiichi Yoshizumi , Keishi Kubo , Hiroyuki Mochizuki , Takanori Funabashi
发明人： Keiichi Yoshizumi , Keishi Kubo , Hiroyuki Mochizuki , Takanori Funabashi
IPC分类号： G01B5/012
CPC分类号： G01B5/012 , G01B7/012 , G01B11/007 , Y10S33/01 , Y10S33/02
摘要： A three-dimensional measurement probe that is less likely to break, that is of long lifespan, and that is of low cost, capable of measuring the shape and the like of a measuring object such as an aspheric lens with higher precision is realized. A magnetic force for preventing rotation and axial displacement of a small slidably moving shaft part is generated by constructing a magnetic circuit by a magnet attached to a small air bearing part, a yoke, and a magnetic pin attached to the small slidably moving shaft part. The three-dimensional measurement probe is able to perform measurement from below and from the side since the magnetic force is non-contacting.
摘要翻译：实现了能够测量诸如非球面透镜的测量对象的形状等能够更高精度的三维测量探头，该三维测量探头不太可能断裂，寿命长，成本低。用于防止小的可滑动移动的轴部的旋转和轴向位移的磁力通过由安装在小型空气轴承部分上的磁体构成磁路而产生磁轭，磁轭和安装在小滑动轴部分上的磁性销。由于磁力不接触，三维测量探头能够从下方和侧面进行测量。

2. 发明申请

US20080148588A1 Three-dimensional measurement probe 有权
标题翻译：三维测量探头
公开(公告)号：US20080148588A1
公开(公告)日：2008-06-26
申请号：US11979034
申请日：2007-10-30
申请人： Keiichi Yoshizumi , Keishi Kubo , Hiroyuki Mochizuki , Takanori Funabashi
发明人： Keiichi Yoshizumi , Keishi Kubo , Hiroyuki Mochizuki , Takanori Funabashi
IPC分类号： G01B5/008
CPC分类号： G01B5/012 , G01B7/012 , G01B11/007 , Y10S33/01 , Y10S33/02
摘要： A three-dimensional measurement probe that is less likely to break, that is of long lifespan, and that is of low cost, capable of measuring the shape and the like of a measuring object such as an aspheric lens with higher precision is realized. A magnetic force for preventing rotation and axial displacement of a small slidably moving shaft part is generated by constructing a magnetic circuit by a magnet attached to a small air bearing part, a yoke, and a magnetic pin attached to the small slidably moving shaft part. The three-dimensional measurement probe is able to perform measurement from below and from the side since the magnetic force is non-contacting.
摘要翻译：实现了能够测量诸如非球面透镜的测量对象的形状等能够更高精度的三维测量探头，该三维测量探头不太可能断裂，寿命长，成本低。用于防止小的可滑动移动的轴部的旋转和轴向位移的磁力通过由安装在小型空气轴承部分上的磁体构成磁路而产生磁轭，磁轭和安装在小滑动轴部分上的磁性销。由于磁力不接触，三维测量探头能够从下方和侧面进行测量。

3. 发明授权

US07065893B2 Measurement probe and using method for the same 失效
标题翻译：测量探头和使用方法相同
公开(公告)号：US07065893B2
公开(公告)日：2006-06-27
申请号：US11014947
申请日：2004-12-20
申请人： Takaaki Kassai , Keishi Kubo , Masateru Doi , Hiroyuki Mochizuki , Keiichi Yoshizumi
发明人： Takaaki Kassai , Keishi Kubo , Masateru Doi , Hiroyuki Mochizuki , Keiichi Yoshizumi
IPC分类号： G01B5/00
CPC分类号： G01B3/008 , G01B5/012 , G01B7/002
摘要： A measuring probe for obtaining positional information on a measuring target face has: a movable member having a contact portion which is formed in its top and comes into contact with the measuring target face and a reflecting plane formed on its base end for reflecting a measuring light beam; a magnetic substance mounted on the movable member; a fixed member disposed in a fixed state; a bearing provided on the fixed member for supporting the movable member movably in axis line direction; and a magnetic force generating portion provided on the fixed member for generating force acting upon the magnetic substance to move the movable member in the axis line direction. The movable member is formed from a nonmagnetic material, and the bearing and the fixed member are formed from a magnetic material.
摘要翻译：用于获得测量目标面上的位置信息的测量探针具有：具有形成在其顶部并与测量对象面接触的接触部分的可动部件和形成在其基端的用于反射测量光的反射面光束; 安装在可动件上的磁性物质; 以固定状态设置的固定部件; 设置在所述固定构件上用于沿轴线方向可移动地支撑所述可动构件的轴承; 以及磁力产生部，其设置在所述固定部件上，用于产生作用在所述磁性物质上的力，以使所述可动部件沿所述轴线方向移动。可动构件由非磁性材料形成，并且轴承和固定构件由磁性材料形成。

4. 发明授权

US5616916A Configuration measuring method and apparatus for optically detecting a displacement of a probe due to an atomic force 失效
标题翻译：用于光学地检测由原子力引起的探头位移的配置测量方法和装置
公开(公告)号：US5616916A
公开(公告)日：1997-04-01
申请号：US563071
申请日：1995-11-27
申请人： Koji Handa , Keishi Kubo , Masateru Doi , Keiichi Yoshizumi
发明人： Koji Handa , Keishi Kubo , Masateru Doi , Keiichi Yoshizumi
IPC分类号： G01B11/00 , G01B21/30 , G01H9/00 , G01H17/00 , G01N37/00 , G01Q10/04 , G01Q20/02 , G01Q20/04 , G01Q60/24 , G01Q80/00 , G02B21/00 , H01J37/28 , H01J3/14
CPC分类号： G01Q60/38 , B82Y35/00 , G01H9/00 , G01Q10/04 , G01Q30/025 , G02B21/0004 , Y10S977/87
摘要： Substantially collimated displacement detection light is led to a first lens and condensed by the first lens to proximities to a reflecting surface of a probe. The reflected light is displaced by an atomic force acting against a surface of a sample, where the reflected light varies in reflection angle according to the displacement. The displaced light is lead to the first lens, changed in direction by a mirror, and detected by magnifying the displacement of the probe. The detection further includes steps of moving a Z direction scan block in a direction vertical to the sample surface by a Z direction driving device, the Z direction scan block having the first lens and the probe, moving an X direction scan block in a first axial direction within a plane parallel to the sample surface by an X direction driving device, the X direction scan block having the Z direction scan block, the Z direction driving device, and the mirror, and moving a Y direction scan block by a Y direction driving device in a second axial direction perpendicular to the first axial direction within a plane parallel to the sample surface, the Y direction scan block having the X direction scan block, the X direction driving device, the detection light radiation system, and the displacement detection system.
摘要翻译：基本上准直的位移检测光被引导到第一透镜，并且被第一透镜聚光到探针的反射表面。反射光被作用在样品表面上的原子力移位，其中反射光根据位移以反射角度变化。偏移的光线通过第一透镜，通过镜子改变方向，并且通过放大探针的位移来检测。该检测还包括以下步骤：通过Z方向驱动装置使Z方向扫描块沿垂直于样品表面的方向移动，Z方向扫描块具有第一透镜和探头，沿X方向扫描块移动第一轴向通过X方向驱动装置在与样品表面平行的平面内的方向，具有Z方向扫描块的X方向扫描块，Z方向驱动装置和反射镜，并且通过Y方向驱动来移动Y方向扫描块在垂直于第一轴向的第二轴向方向的平面内的装置，具有X方向扫描块的Y方向扫描块，X方向驱动装置，检测光辐射系统和位移检测系统。

5. 发明授权

US06710883B2 Apparatus and method for measuring flatness of thin plate 失效
标题翻译：测量薄板平整度的装置和方法
公开(公告)号：US06710883B2
公开(公告)日：2004-03-23
申请号：US10140883
申请日：2002-05-09
申请人： Keiichi Yoshizumi , Keishi Kubo , Hiroyuki Takeuchi , Kouji Handa
发明人： Keiichi Yoshizumi , Keishi Kubo , Hiroyuki Takeuchi , Kouji Handa
IPC分类号： G01B902
CPC分类号： G01B11/2441 , G01B11/306
摘要： The invention measures a thickness variation at a high accuracy around a wide range of a thin plate by a comparatively large spot diameter between 0.5 mm and 2 mm. A polarization beam splitter separating a laser beam emitted from a laser generator and transmitting through an isolator into a measurement light and a reference light is provided. A quarter wavelength plate is provided between the polarization beam splitter and a measurement surface, and between the polarization beam splitter and a reference surface. A focusing and reflecting means for focusing and reflecting the measurement light reflected by the measurement surface and reflected by the polarization beam splitter, and the reference light reflecting by the reference surface and transmitting through the polarization beam splitter is provided. A half mirror reflecting the measurement light and the reference light which return from the polarization beam splitter is provided. A light receiving portion receiving the measurement light and the reference light which are reflected by the half mirror so as to interfere, converting an interference light intensity change into an electric signal, and counting the electric signal so as to measure a flatness of the measurement surface is provided.
摘要翻译：本发明通过0.5mm至2mm之间的较大的光点直径来测量薄板宽范围内的高精度的厚度变化。提供了将从激光发生器发射的激光束分离并通过隔离器传输到测量光和参考光的偏振分束器。四分之一波长板设置在偏振分束器和测量表面之间以及偏振分束器与参考表面之间。提供了用于聚焦和反射由测量表面反射并由偏振分束器反射的测量光以及由参考表面反射并通过偏振分束器透射的参考光的聚焦和反射装置。提供了反射从偏振分束器返回的测量光和参考光的半反射镜。接收由半反射镜反射的测量光和参考光的光接收部分，其干涉，将干涉光强度变化转换成电信号，并对电信号进行计数，以便测量测量表面的平坦度被提供。

6. 发明授权

US07012680B2 Method and apparatus for quantitative quality inspection of substrate such as wafer 失效
标题翻译：用于定量质量检查的基板如晶片的方法和装置
公开(公告)号：US07012680B2
公开(公告)日：2006-03-14
申请号：US10619006
申请日：2003-07-15
申请人： Keishi Kubo , Masateru Doi , Hiroyuki Motizuki , Keiichi Yoshizumi
发明人： Keishi Kubo , Masateru Doi , Hiroyuki Motizuki , Keiichi Yoshizumi
IPC分类号： G01N21/88
CPC分类号： G01B21/30 , H01L22/20
摘要： A method for a quantitative evaluation of a substrate such as wafer defines a number of sequential first regions so that each of the first regions overlaps the adjacent region. A surface data (e.g., thickness data) in each of the first regions is used to determine a normal vector representing a surface configuration (e.g., thickness variation) of the first region. Then, an angular difference between the normal vectors is determined for each combination of adjacent two first regions. Subsequently, the determined angular difference is compared with a reference to evaluate a quality of a second region including at least one of the first regions, e.g., chip region, strip-like region and/or the entire of the wafer.
摘要翻译：用于定量评估诸如晶片的衬底的方法定义了多个顺序的第一区域，使得每个第一区域与相邻区域重叠。使用每个第一区域中的表面数据（例如，厚度数据）来确定表示第一区域的表面构造（例如，厚度变化）的法向矢量。然后，对于相邻的两个第一区域的每个组合确定法向量之间的角度差。随后，将确定的角度差与参考值进行比较，以评估包括第一区域，例如芯片区域，条状区域和/或整个晶片中的至少一个的第二区域的质量。

7. 发明授权

US06480286B1 Method and apparatus for measuring thickness variation of a thin sheet material, and probe reflector used in the apparatus 失效
标题翻译：用于测量薄片材料的厚度变化的方法和装置，以及用于该装置中的探针反射器
公开(公告)号：US06480286B1
公开(公告)日：2002-11-12
申请号：US09533652
申请日：2000-03-22
申请人： Keishi Kubo , Keiichi Yoshizumi , Yukio Imada , Hiroyuki Takeuchi , Koji Handa
发明人： Keishi Kubo , Keiichi Yoshizumi , Yukio Imada , Hiroyuki Takeuchi , Koji Handa
IPC分类号： G01B902
CPC分类号： G01B11/06 , G01B11/306 , G01B21/08 , G01B21/30
摘要： Optical displacement gauges 20 are respectively arranged on both sides of a thin sheet material w, and displacement of surface position of the thin sheet material w is measured by irradiating measurement light L1 to the surface of the thin sheet material w. Thickness variation of the thin sheet material w is obtained from the measurement results of displacement of the surface position of the thin sheet material w.
摘要翻译：光学位移计20分别设置在薄片材料w的两侧，并且通过将测量光L1照射到薄片材料w的表面来测量薄片材料w的表面位置的位移。从薄片材料w的表面位置的位移测定结果可以得到薄片材w的厚度变化。

8. 发明授权

US5917181A Profile measuring apparatus 失效
标题翻译：型材测量仪器
公开(公告)号：US5917181A
公开(公告)日：1999-06-29
申请号：US831080
申请日：1997-04-01
申请人： Keiichi Yoshizumi , Keishi Kubo , Shoji Kusumoto , Kiyokazu Uchimura , Keinosuke Kanashima
发明人： Keiichi Yoshizumi , Keishi Kubo , Shoji Kusumoto , Kiyokazu Uchimura , Keinosuke Kanashima
IPC分类号： G01B5/012 , G01B11/00 , G01B21/00 , G01B21/20
CPC分类号： G01B5/012 , G01B11/007
摘要： A profile measuring apparatus provided with an improved probe for measuring profiles throughout a wide area of the surface of an object with a high level of response and high accuracy. The probe 10 comprises an arm 3 having a stylus 1 fixedly mounted to the distal end thereof, which is coupled to a stationary part 11 of the apparatus by an arm holding member 5 made of a V-shaped leaf spring in such a way that the arm 3 is tilted in one axial direction by a contact pressure exerted thereto during measurement. Displacement of the arm 3 is thereby detected through measuring an elastic deformation of the leaf spring caused by the contact pressure exerted to the stylus 1 being pressed against the surface to be measured.
摘要翻译：一种轮廓测量装置，其具有改进的探针，用于以高水平的响应和高精度测量物体表面的广泛区域中的轮廓。探针10包括臂3，其具有固定地安装到其远端的触针1，其通过由V形片簧制成的臂保持构件5联接到装置的固定部分11，臂3在测量期间通过施加到其上的接触压力在一个轴向倾斜。因此通过测量由施加到触针1被测量表面的接触压力引起的板簧的弹性变形，来检测臂3的位移。

9. 发明授权

US5459939A Apparatus and method for measuring width of micro gap 失效
标题翻译：用于测量微间隙宽度的装置和方法
公开(公告)号：US5459939A
公开(公告)日：1995-10-24
申请号：US179709
申请日：1994-01-11
申请人： Keishi Kubo , Keiichi Yoshizumi
发明人： Keishi Kubo , Keiichi Yoshizumi
IPC分类号： G01B11/14 , G01B7/00 , G01B7/06 , G01B7/14 , G01B11/02 , G01B21/16 , G01B21/30 , G01Q60/32 , G01Q60/36 , G01Q60/40 , G01Q70/14 , G01Q80/00 , G01Q90/00 , G01B5/02
CPC分类号： G01B7/14 , G01B11/02 , G01B7/06
摘要： An apparatus and method for measuring a width of a micro gap of a non-conductive material of a sample which is formed between two conductive materials thereof, includes a conductive probe having a sharpened front end, a cantilever having the probe, a sample confronting the probe, a driving device for relatively moving the sample with respect to the probe in three directions of XYZ, and bias power source for applying a voltage between the probe and the sample, an electric current detecting device for detecting a contact current running between the probe and the sample, a micro displacement detecting part which detects an amount of deflection of the cantilever when the sample and the probe are in touch with each other, a servo part which feeds back the amount of the deflection of the cantilever detected by the micro displacement detecting part to the driving device thereby to control to change a position of the sample in the Z-direction of the probe so as to make the amount of the deflection of the cantilever constant, and a measuring device for scanning the probe on the sample in a widthwise direction of the gap of the sample by the driving device, and at the same time sampling outputs of the detecting device thereby to measure the width of the gap in the widthwise direction.
摘要翻译：用于测量在其两个导电材料之间形成的样品的非导电材料的微隙的宽度的装置和方法包括具有锋利前端的导电探针，具有探针的悬臂，面向探针，用于在XYZ的三个方向上相对于探针相对移动样品的驱动装置，以及用于在探针和样品之间施加电压的偏置电源，用于检测探头之间的接触电流的电流检测装置以及所述样本，当所述样本和所述探针相互接触时检测所述悬臂的偏转量的微位移检测部，反馈由所述微位移检测出的所述悬臂的偏转量的伺服部检测部件到驱动装置，从而控制在探针的Z方向上改变样品的位置，从而使得取样量悬臂常数的测量装置，以及用于通过驱动装置在样品的间隙的宽度方向上扫描样品的测量装置，同时对检测装置的采样输出进行测量，宽度方向的间隙。

10. 发明授权

US07029224B2 Method and apparatus for transferring a thin plate 失效
标题翻译：传递薄板的方法和装置
公开(公告)号：US07029224B2
公开(公告)日：2006-04-18
申请号：US10384791
申请日：2003-03-11
申请人： Keishi Kubo , Keiichi Yoshizumi , Hiroyuki Takeuchi , Koji Handa , Takaaki Kassai
发明人： Keishi Kubo , Keiichi Yoshizumi , Hiroyuki Takeuchi , Koji Handa , Takaaki Kassai
IPC分类号： B25J17/02
CPC分类号： H01L21/67742 , B25J15/103 , H01L21/68707 , Y10T74/20335
摘要： A method for transferring a thin plate is provided, in which three or more grasping claws of a transfer arm grasp the periphery of the thin plate in order to transfer it to a predetermined transfer position, and three or more holding claws hold the periphery of the thin plate in the transfer position. The transfer arm rotates about a shaft which is in a direction of a vector sum of a first vector perpendicular to a surface of the thin plate before transfer, and a second vector perpendicular to the surface of the thin plate after the transfer, to transfer the thin plate with changing the posture thereof.
摘要翻译：提供一种用于传送薄板的方法，其中传送臂的三个或更多个把持爪抓住薄板的周边以便将其传送到预定的传送位置，并且三个或更多个夹持爪保持薄板处于转移位置。传送臂围绕转轴旋转，该轴在转印之前沿垂直于薄板的表面的第一矢量的矢量方向和在转印之后垂直于薄板表面的第二矢量转动，改变其姿势的薄板。

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