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1. 发明申请

US20130048605A1 DOUBLE PATTERNING ETCHING PROCESS 有权
标题翻译：双重图案蚀刻过程
公开(公告)号：US20130048605A1
公开(公告)日：2013-02-28
申请号：US13593412
申请日：2012-08-23
申请人： Kedar SAPRE , Jing Tang , Ajay Bhatnagar , Nitin Ingle , Shankar Venkataraman
发明人： Kedar SAPRE , Jing Tang , Ajay Bhatnagar , Nitin Ingle , Shankar Venkataraman
IPC分类号： B44C1/22
CPC分类号： H01L21/31144 , H01J37/32357 , H01J2237/334 , H01L21/0274 , H01L21/0337 , H01L21/3086 , H01L21/31116
摘要： A method of etching a substrate comprises forming on the substrate, a plurality of double patterning features composed of silicon oxide, silicon nitride, or silicon oxynitride. The substrate having the double patterning features is provided to a process zone. An etching gas comprising nitrogen tri-fluoride, ammonia and hydrogen is energized in a remote chamber. The energized etching gas is introduced into the process zone to etch the double patterning features to form a solid residue on the substrate. The solid residue is sublimated by heating the substrate to a temperature of at least about 100° C.
摘要翻译：蚀刻衬底的方法包括在衬底上形成由氧化硅，氮化硅或氮氧化硅组成的多个双重构图特征。具有双重图案化特征的基板被提供到处理区域。包括三氟化氮，氨和氢的蚀刻气体在远程室中通电。通电的蚀刻气体被引入到工艺区中以蚀刻双重图案化特征以在衬底上形成固体残余物。固体残余物通过将基底加热至至少约100℃的温度升华。

2. 发明授权

US08759223B2 Double patterning etching process 有权
标题翻译：双图案蚀刻工艺
公开(公告)号：US08759223B2
公开(公告)日：2014-06-24
申请号：US13593412
申请日：2012-08-23
申请人： Kedar Sapre , Jing Tang , Ajay Bhatnagar , Nitin Ingle , Shankar Venkataraman
发明人： Kedar Sapre , Jing Tang , Ajay Bhatnagar , Nitin Ingle , Shankar Venkataraman
IPC分类号： H01L21/311 , H01L21/302 , H01L21/461
CPC分类号： H01L21/31144 , H01J37/32357 , H01J2237/334 , H01L21/0274 , H01L21/0337 , H01L21/3086 , H01L21/31116
摘要： A method of etching a substrate comprises forming on the substrate, a plurality of double patterning features composed of silicon oxide, silicon nitride, or silicon oxynitride. The substrate having the double patterning features is provided to a process zone. An etching gas comprising nitrogen tri-fluoride, ammonia and hydrogen is energized in a remote chamber. The energized etching gas is introduced into the process zone to etch the double patterning features to form a solid residue on the substrate. The solid residue is sublimated by heating the substrate to a temperature of at least about 100° C.
摘要翻译：蚀刻衬底的方法包括在衬底上形成由氧化硅，氮化硅或氮氧化硅组成的多个双重构图特征。具有双重图案化特征的基板被提供到处理区域。包括三氟化氮，氨和氢的蚀刻气体在远程室中通电。通电的蚀刻气体被引入到工艺区中以蚀刻双重图案化特征以在衬底上形成固体残余物。固体残余物通过将基底加热至至少约100℃的温度升华。

3. 发明申请

US20120058281A1 METHODS FOR FORMING LOW MOISTURE DIELECTRIC FILMS 审中-公开
标题翻译：形成低水分电介质膜的方法
公开(公告)号：US20120058281A1
公开(公告)日：2012-03-08
申请号：US13041201
申请日：2011-03-04
申请人： Zhong Qiang Hua , Lei Luo , Manuel A. Hernandez , Zhitao Cao , Kedar Sapre , Ajay Bhatnagar
发明人： Zhong Qiang Hua , Lei Luo , Manuel A. Hernandez , Zhitao Cao , Kedar Sapre , Ajay Bhatnagar
IPC分类号： B05D5/00 , C23C16/56 , C23C16/50 , C23C16/40 , C23C16/44
CPC分类号： H01L21/02164 , C23C16/40 , C23C16/56 , H01L21/022 , H01L21/02271 , H01L21/02274 , H01L21/02362
摘要： A method for forming a pre-metal dielectric (PMD) layer or an inter-metal dielectric (IMD) layer over a substrate includes placing the substrate in a chemical vapor deposition (CVD) process chamber and forming a first oxide layer over the substrate in the CVD process chamber. The first oxide layer is formed using a thermal CVD process at a temperature of about 450° C. or less and a sub-atmospheric pressure. The method also includes forming a second oxide layer over the first oxide layer in the CVD process chamber. The second oxide layer is formed using a plasma enhanced chemical vapor deposition (PECVD) process at a temperature of about 450° C. or less and a sub-atmospheric pressure. The substrate remains in the CVD process chamber during formation of the first oxide layer and the second oxide layer.
摘要翻译：在衬底上形成预金属电介质（PMD）层或金属间电介质（IMD）层的方法包括将衬底放置在化学气相沉积（CVD）处理室中，并在衬底上形成第一氧化物层 CVD处理室。第一氧化物层使用热CVD工艺在约450℃或更低的温度和低于大气压的压力下形成。该方法还包括在CVD处理室中的第一氧化物层上形成第二氧化物层。使用等离子体增强化学气相沉积（PECVD）工艺在约450℃或更低的温度和低于大气压的压力下形成第二氧化物层。在形成第一氧化物层和第二氧化物层期间，衬底保留在CVD处理室中。

4. 发明授权

US06379492B2 Corrosion resistant coating 失效
标题翻译：耐腐蚀涂层
公开(公告)号：US06379492B2
公开(公告)日：2002-04-30
申请号：US09428140
申请日：1999-10-26
申请人： Won Bang , Chen-An Chen , Shankar Venkataraman , Ajay Bhatnagar
发明人： Won Bang , Chen-An Chen , Shankar Venkataraman , Ajay Bhatnagar
IPC分类号： C23F102
CPC分类号： C23C14/5806 , C23C14/0694 , C23C16/4404 , H01J37/32477 , H01J37/32559
摘要： A corrosion resistant part comprising a protective coating formed upon a component part. The protective coating comprises magnesium fluoride, which is substantially pure and substantially dense. Preferably, the coating is at least about 99% pure and at least about 85% dense. For example, such a coating can be formed upon the component part at a temperature of at least about 250° C. and a pressure of not more than about 1×10−5 torr. The resulting coating is effective in protecting the surfaces of an aluminum nitride heater against corrosion within a fluorine-containing environment inside a chemical vapor deposition chamber.
摘要翻译：一种耐腐蚀部件，包括形成在部件上的保护涂层。保护性涂层包括氟化镁，其基本上纯且基本上致密。优选地，涂层为至少约99％纯度且至少约85％致密。例如，这样的涂层可以在至少约250℃的温度和不大于约1×10-5乇的压力下在组分部分上形成。所得到的涂层有效地保护氮化铝加热器的表面免受化学气相沉积室内的含氟环境中的腐蚀。

5. 发明申请

US20070117397A1 Remote plasma pre-clean with low hydrogen pressure 有权
标题翻译：远程等离子体预清洁，氢气压力低
公开(公告)号：US20070117397A1
公开(公告)日：2007-05-24
申请号：US11334803
申请日：2006-01-17
申请人： Xinyu Fu , John Forster , Jick Yu , Ajay Bhatnagar , Praburam Gopalraja
发明人： Xinyu Fu , John Forster , Jick Yu , Ajay Bhatnagar , Praburam Gopalraja
IPC分类号： B08B3/00 , H01L21/302
CPC分类号： H01L21/02063 , G03F7/427 , H01J37/32357 , H01J37/32422 , H01J37/3266 , H01L21/02068 , H01L21/67028 , H01L21/67069 , H01L21/76814
摘要： A plasma cleaning method particularly useful for removing photoresist and oxide residue from a porous low-k dielectric with a high carbon content prior to sputter deposition. A remote plasma source produces a plasma primarily of hydrogen radicals. The hydrogen pressure may be kept relatively low, for example, at 30 milliTorr. Optionally, helium may be added to the processing gas with the hydrogen partial pressure held below 150 milliTorr. Superior results are obtained with 70% helium in 400 milliTorr of hydrogen and helium. Preferably, an ion filter, such as a magnetic filter, removes hydrogen and other ions from the output of the remote plasma source and a supply tube from the remote plasma source includes a removable dielectric liner in combination with dielectric showerhead and manifold liner.
摘要翻译：一种等离子体清洗方法，特别适用于在溅射沉积之前从具有高碳含量的多孔低k电介质中除去光致抗蚀剂和氧化物残留物。远程等离子体源产生主要为氢自由基的等离子体。氢气压力可以保持相对较低，例如在30毫乇。任选地，氦气可以被加到处理气体中，氢分压保持在150毫乇以下。在400毫乇的氢气和氦气中，70％的氦气可获得卓越的结果。优选地，诸如磁性过滤器的离子过滤器从远程等离子体源的输出中除去氢和其它离子，并且来自远程等离子体源的供应管包括与介电喷头和歧管衬套组合的可移除绝缘衬垫。

6. 发明申请

US20070282118A1 Process For Preparing Fatty Acid Alkylesters Using As Biodiesel 审中-公开
标题翻译：使用生物柴油制备脂肪酸烷基酯的方法
公开(公告)号：US20070282118A1
公开(公告)日：2007-12-06
申请号：US10585041
申请日：2003-12-30
申请人： Ashok Gupta , Ajay Bhatnagar , Savita Kaul
发明人： Ashok Gupta , Ajay Bhatnagar , Savita Kaul
IPC分类号： C11C3/10
CPC分类号： C11C3/003 , C10L1/026 , C11B3/10 , C11C3/10 , Y02E50/13 , Y02P30/20
摘要： Fatty acid alkyl esters suitable for use as biodiesel are produced by a single step esterification of free fatty acids and transesterification of triglycerides from vegetable oils or animal fats or combinations thereof with a lower alcohol (e.g. methanol) in presence of alkyl Tin oxide as catalyst. The ester thus produced is purified by distillation, treatment with an adsorbent, washing with water or combination thereof to give esters suitable for use as biodiesel.
摘要翻译：适合用作生物柴油的脂肪酸烷基酯是通过游离脂肪酸的单步酯化和甘油三酯从植物油或动物脂肪或其组合与低级醇（例如甲醇）在烷基氧化锡作为催化剂的存在下酯交换而产生的。由此产生的酯通过蒸馏纯化，用吸附剂处理，用水或其组合洗涤，得到适于用作生物柴油的酯。

7. 发明授权

US5057521A Use of bicyclic imidazole compounds for the treatment of hyperaldosteronism 失效
标题翻译：双卡咪唑化合物治疗高血压病的用途
公开(公告)号：US5057521A
公开(公告)日：1991-10-15
申请号：US412369
申请日：1989-09-26
申请人： Albert Hausler , Ajay Bhatnagar
发明人： Albert Hausler , Ajay Bhatnagar
IPC分类号： C07D487/04 , A61K31/397 , A61K31/415 , A61K31/435 , A61K31/44 , A61K31/495 , A61K31/535 , A61K31/55 , A61P5/38 , C07D471/04
CPC分类号： A61K31/55 , A61K31/415 , A61K31/44 , A61K31/495 , A61K31/535
摘要： The invention relates to specific bicyclic imidazole compounds such as 5-(p-cyanophenyl)-5,6,7,8-tetrahydroimidazo[1,5-a]pyridine, or pharmaceutically acceptable non-toxic salts thereof, for the treatment of hyperaldosteronism, and to a method of treating hyperaldosteronism using such compounds, as well as to the use of said compounds for the preparation of pharmaceutical compositions for the treatment of hyperaldosteronism.
摘要翻译：本发明涉及具体的双环咪唑化合物，例如5-（对 - 氰基苯基）-5,6,7,8-四氢咪唑并[1,5-a]吡啶或其药学上可接受的无毒盐，用于治疗醛固酮增多症以及使用这些化合物治疗醛固酮增多症的方法，以及所述化合物在制备用于治疗醛固酮增多症的药物组合物中的用途。

8. 发明申请

US20120255223A1 PROCESS FOR CONVERSION OF LOW COST AND HIGH FFA OILS TO BIODIESEL 审中-公开
标题翻译：将低成本和高FFA油转化生物柴油的方法
公开(公告)号：US20120255223A1
公开(公告)日：2012-10-11
申请号：US13395871
申请日：2010-03-19
申请人： Savita Kaul , Neeraj Atray , Ajay Bhatnagar
发明人： Savita Kaul , Neeraj Atray , Ajay Bhatnagar
IPC分类号： C10L1/188
CPC分类号： C11C3/003 , C10L1/026 , Y02E50/13
摘要： The present invention describes a process for converting high free fatty acid containing feed stocks (FFA 20-85%) like palm fatty acid distillate (PFAD), restaurant grease, waste cooking oil, Soya deodistillate, acid oil, jatropha curcas oil, mohua oil etc. to biodiesel, which involves esterification of FFA containing oil with lower alcohols like methanol, ethanol, propanol etc. in presence of macro reticular and gel type acidic heterogenous resin as catalyst to bring down acid value in the range of 1-2 mgKOH/g followed by transesterification in presence of homogeneous basic catalyst metal oxides, hydroxides and alkoxides like sodium hydroxide, potassium hydroxide, sodium methoxide, potassium methoxide etc. and separation of biodiesel and glycerine.
摘要翻译：本发明描述了一种将棕榈脂肪酸馏出物（PFAD），食用油脂，废食用油，大豆脱脂酸，酸性油，麻风树油，摩卡油（FFA 20-85％）的高游离脂肪酸等等生物柴油，其中包括含有FFA的油与低级醇如甲醇，乙醇，丙醇等在大网状和凝胶型酸性异种树脂作为催化剂的存在下降解酸值在1-2mgKOH / 然后在均相碱性催化剂金属氧化物，氢氧化物和醇盐如氢氧化钠，氢氧化钾，甲醇钠，甲醇钾等存在下进行酯交换反应，并分离生物柴油和甘油。

9. 发明授权

US07704887B2 Remote plasma pre-clean with low hydrogen pressure 有权
标题翻译：远程等离子体预清洁，氢气压力低
公开(公告)号：US07704887B2
公开(公告)日：2010-04-27
申请号：US11334803
申请日：2006-01-17
申请人： Xinyu Fu , John Forster , Jick Yu , Ajay Bhatnagar , Praburam Gopalraja
发明人： Xinyu Fu , John Forster , Jick Yu , Ajay Bhatnagar , Praburam Gopalraja
IPC分类号： B08B3/00 , H01L21/302
CPC分类号： H01L21/02063 , G03F7/427 , H01J37/32357 , H01J37/32422 , H01J37/3266 , H01L21/02068 , H01L21/67028 , H01L21/67069 , H01L21/76814
摘要： A plasma cleaning method particularly useful for removing photoresist and oxide residue from a porous low-k dielectric with a high carbon content prior to sputter deposition. A remote plasma source produces a plasma primarily of hydrogen radicals. The hydrogen pressure may be kept relatively low, for example, at 30 milliTorr. Optionally, helium may be added to the processing gas with the hydrogen partial pressure held below 150 milliTorr. Superior results are obtained with 70% helium in 400 milliTorr of hydrogen and helium. Preferably, an ion filter, such as a magnetic filter, removes hydrogen and other ions from the output of the remote plasma source and a supply tube from the remote plasma source includes a removable dielectric liner in combination with dielectric showerhead and manifold liner.
摘要翻译：一种等离子体清洗方法，特别适用于在溅射沉积之前从具有高碳含量的多孔低k电介质中除去光致抗蚀剂和氧化物残留物。远程等离子体源产生主要为氢自由基的等离子体。氢气压力可以保持相对较低，例如在30毫乇。任选地，氦气可以被加到处理气体中，氢分压保持在150毫乇以下。在400毫乇的氢气和氦气中，70％的氦气可获得卓越的结果。优选地，诸如磁性过滤器的离子过滤器从远程等离子体源的输出中除去氢和其它离子，并且来自远程等离子体源的供应管包括与介电喷头和歧管衬套组合的可移除绝缘衬垫。

10. 发明申请

US20060069067A1 Combination of an aromatase inhibitor with a bisphosphonate 审中-公开
标题翻译：芳香酶抑制剂与双膦酸盐的组合
公开(公告)号：US20060069067A1
公开(公告)日：2006-03-30
申请号：US10521928
申请日：2003-07-29
申请人： Ajay Bhatnagar , Dean Evans , Jurg Gasser , Jonathan Green
发明人： Ajay Bhatnagar , Dean Evans , Jurg Gasser , Jonathan Green
IPC分类号： A61K31/675 , A61K31/56 , A61K31/4196 , A61K31/4164 , A61K31/44
CPC分类号： A61K45/06 , A61K31/35 , A61K31/4164 , A61K31/4196 , A61K31/44 , A61K31/56 , A61K31/675 , A61K2300/00
摘要： The present invention provides a combination for the treatment of a disease or condition which responds to aromatase inhibition, in particular a proliferative disease, especially a malignant disease such as breast cancer or similar soft tissue endocrine-sensitive cancer, most preferably breast cancer, comprising an aromatase inhibitor and a bisphosphonate for simultaneous, concurrent, separate or sequential use in the prevention of bone loss which is caused by the treatment with an aromatase inhibitor. Also provided is a method of treating a patient suffering from a disease or condition which responds to aromatase inhibition comprising administering to the patient an effective amount of a bisphosphonate and an effective amount of an aromatase inhibitor.
摘要翻译：本发明提供了用于治疗响应芳香酶抑制，特别是增殖性疾病，特别是恶性疾病如乳腺癌或类似的软组织内分泌敏感性癌症，最优选乳腺癌的疾病或病症的组合，其包括芳香酶抑制剂和双膦酸盐，用于同时，并发，分离或顺序地用于预防由芳香酶抑制剂治疗引起的骨丢失。还提供了治疗患有对芳香酶抑制作用产生反应的疾病或病症的患者的方法，包括向患者施用有效量的双膦酸盐和有效量的芳香酶抑制剂。

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