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    • 6. 发明申请
    • Defect image classifying method and apparatus and a semiconductor device manufacturing process based on the method and apparatus
    • 基于该方法和装置的缺陷图像分类方法和装置以及半导体器件制造方法
    • US20060274933A1
    • 2006-12-07
    • US11506310
    • 2006-08-17
    • Kenji ObaraYuji TakagiRyo NakagakiYasuhiro OzawaToshiei KurosakiSeiji Isogai
    • Kenji ObaraYuji TakagiRyo NakagakiYasuhiro OzawaToshiei KurosakiSeiji Isogai
    • G06K9/00G06K9/62
    • G06T7/001G06T2207/30148
    • According to the present invention, techniques including a method and apparatus for classifying and displaying images are provided. In an embodiment of the present invention a defect image classification method using inspected objects is provided. The method includes defect images obtained from at least one inspected object. Next a set of defect images is classified into a specified category, which has a feature. The defect images are arranged for display according to the feature and then displayed. The arranging of the defect images may also be based on an evaluation value for each defect image. Another embodiment provides a defect image classification method using inspected objects. Defect images are obtained from at least one inspected object. Next the defect images are classified into a plurality of categories and at least two information items for example, a defect distribution diagram showing locations of defects in the inspected object, information associated with a category of the plurality of categories, and a defect size distribution, are displayed.
    • 根据本发明,提供了包括用于分类和显示图像的方法和装置的技术。 在本发明的一个实施例中,提供了使用检查对象的缺陷图像分类方法。 该方法包括从至少一个检查对象获得的缺陷图像。 接下来,一组缺陷图像被分类为具有特征的指定类别。 故障图像根据特征进行显示,然后显示。 缺陷图像的布置也可以基于每个缺陷图像的评估值。 另一实施例提供使用检查对象的缺陷图像分类方法。 从至少一个检查对象获得缺陷图像。 接下来,将缺陷图像分为多个类别和至少两个信息项,例如,示出被检查对象中的缺陷的位置的缺陷分布图,与多个类别的类别相关联的信息以及缺陷尺寸分布, 被显示。
    • 8. 发明授权
    • Screw cutter die head
    • 螺丝刀模头
    • US4880340A
    • 1989-11-14
    • US222691
    • 1988-07-21
    • Naohiro TakiYasuhiro Ozawa
    • Naohiro TakiYasuhiro Ozawa
    • B23G5/10
    • B23G5/10Y10T408/853Y10T408/85915Y10T408/85918
    • A screw cutter die head comprising an annular body portion, a ring member formed with several cam ridges and angularly movable relative thereto and several chasers held by said body member to be radially movable by engagement of a cam recess formed in each chaser with each of said cam ridges is in public knowledge. When it is necessary to process the work of far larger or smaller diameter in the known die head, the chasers must be exchanged with the others formed with the cam recess nearer to the cutting edges or more apart therefrom. The invention provides the chasers formed with a plurality of recesses and the ring member formed with the corresponding number of notches to be engaged with the latch for fixing it.
    • 一种螺旋切割模头,包括环形主体部分,形成有多个凸轮脊并且相对于其可角运动的环形构件,以及由所述本体构件保持的几个踏板,以通过每个追踪器中形成的凸轮凹部与每个所述 凸轮脊是公知的。 当需要在已知的模头中处理更大或更小的直径的工作时,必须与其它形成有更靠近切削刃或更远离其的凸轮凹部更换锯齿。 本发明提供了形成有多个凹部的敲击器,并且环形构件形成有相应数量的凹口以与闩锁接合以固定它。