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    • 7. 发明授权
    • Optoelectronic device
    • 光电器件
    • US4816890A
    • 1989-03-28
    • US915410
    • 1986-10-06
    • Hirobumi OuchiIchiro FujiwaraHiroshi MatsudaKazuhiro ItoKazuyuki Nagatsuma
    • Hirobumi OuchiIchiro FujiwaraHiroshi MatsudaKazuhiro ItoKazuyuki Nagatsuma
    • H01L31/107H01L27/14H01L31/00
    • H01L31/1075
    • An avalanche photodiode including a substrate, a first semiconductor region of a first conductivity type having a relatively large band gap, a second semiconductor region of a second conductivity type having a relatively large band gap, and a third semiconductor region of the first conductivity type having a band gap smaller than the band gap of the first and second semiconductor regions, is disclosed in which, in order to suppress an increase in dark current and to cause the avalanche photodiode to operate on a low voltage, a fourth semiconductor region equal in conductivity type to and larger in impurity concentration than the first semiconductor region is formed in the first semiconductor region at a position below a central portion of a pn junction formed between the first semiconductor region and the second semiconductor region. The avalanche photodiode formed with this structure has low-noise and low operation voltage characteristics.
    • 一种雪崩光电二极管,包括基板,具有相对较大带隙的第一导电类型的第一半导体区域,具有相对较大带隙的第二导电类型的第二半导体区域,以及具有第一导电类型的第三半导体区域, 公开了一种小于第一和第二半导体区域的带隙的带隙,其中为了抑制暗电流的增加并使雪崩光电二极管在低电压下工作,等于导电性的第四半导体区域 在形成在第一半导体区域和第二半导体区域之间的pn结的中心部分下方的位置处,在第一半导体区域中形成并且具有比第一半导体区域更大的杂质浓度。 用这种结构形成的雪崩光电二极管具有低噪声和低工作电压特性。