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    • 1. 发明申请
    • LITHIUM ION SECONDARY BATTERY
    • 锂离子二次电池
    • US20100167112A1
    • 2010-07-01
    • US12600391
    • 2008-07-18
    • Kazuyoshi HondaToshitada SatoDaisuke SuetsuguKatsumi KashiwagiKunihiko Bessho
    • Kazuyoshi HondaToshitada SatoDaisuke SuetsuguKatsumi KashiwagiKunihiko Bessho
    • H01M6/10H01M4/58
    • H01M10/0525H01M4/0421H01M4/131H01M4/134H01M4/1391H01M4/1395H01M4/386H01M4/387H01M4/485H01M10/446
    • A lithium ion secondary battery including: a positive electrode current collector; a positive electrode active material layer that is provided in contact with the positive electrode current collector; a separator layer that is provided on a side of the positive electrode active material layer on which the positive electrode current collector is not provided; a negative electrode active material layer that is provided on a side of the separator layer on which the positive electrode active material layer is not provided, that primarily contains silicon or tin, and that includes a opposing portion opposing the positive electrode active material layer and a non-opposing portion not opposing the positive electrode active material layer, the opposing portion and the non-opposing portion containing lithium produced by a thin film-forming method; and a negative electrode current collector that is provided on a side of the negative electrode active material layer on which the separator layer is not provided. Thereby, deformation of the negative electrode and deterioration in cycle characteristics accompanied by such deformation can be prevented.
    • 1.一种锂离子二次电池,包括:正极集电体; 设置为与正极集电体接触的正极活性物质层; 设置在不设置正极集电体的正极活性物质层的一侧的隔离层; 设置在不设置正极活性物质层的隔板层的一侧的负极活性物质层,其主要含有硅或锡,并且包括与正极活性物质层相对的相对部分和 不与正极活性物质层相对的非相对部分,相对部分和非相对部分含有通过薄膜形成方法生产的锂; 以及负极集电体,其设置在不设置隔板层的负极活性物质层的一侧。 由此,可以防止负极的变形和伴随这种变形的循环特性的劣化。
    • 2. 发明授权
    • Lithium ion secondary battery
    • 锂离子二次电池
    • US08486549B2
    • 2013-07-16
    • US12600391
    • 2008-07-18
    • Kazuyoshi HondaToshitada SatoDaisuke SuetsuguKatsumi KashiwagiKunihiko Bessho
    • Kazuyoshi HondaToshitada SatoDaisuke SuetsuguKatsumi KashiwagiKunihiko Bessho
    • H01M6/10H01M4/58
    • H01M10/0525H01M4/0421H01M4/131H01M4/134H01M4/1391H01M4/1395H01M4/386H01M4/387H01M4/485H01M10/446
    • A lithium ion secondary battery including: a positive electrode current collector; a positive electrode active material layer that is provided in contact with the positive electrode current collector; a separator layer that is provided on a side of the positive electrode active material layer on which the positive electrode current collector is not provided; a negative electrode active material layer that is provided on a side of the separator layer on which the positive electrode active material layer is not provided, that primarily contains silicon or tin, and that includes a opposing portion opposing the positive electrode active material layer and a non-opposing portion not opposing the positive electrode active material layer, the opposing portion and the non-opposing portion containing lithium produced by a thin film-forming method; and a negative electrode current collector that is provided on a side of the negative electrode active material layer on which the separator layer is not provided. Thereby, deformation of the negative electrode and deterioration in cycle characteristics accompanied by such deformation can be prevented.
    • 1.一种锂离子二次电池,包括:正极集电体; 设置为与正极集电体接触的正极活性物质层; 设置在不设置正极集电体的正极活性物质层的一侧的隔离层; 设置在不设置正极活性物质层的隔板层的一侧的负极活性物质层,其主要含有硅或锡,并且包括与正极活性物质层相对的相对部分和 不与正极活性物质层相对的非相对部分,相对部分和非相对部分含有通过薄膜形成方法生产的锂; 以及负极集电体,其设置在不设置隔板层的负极活性物质层的一侧。 由此,可以防止负极的变形和伴随这种变形的循环特性的劣化。
    • 6. 发明授权
    • Method of manufacturing thin film which suppresses unnecessary scattering and deposition of a source material
    • 制造薄膜的方法,其抑制源材料的不必要的散射和沉积
    • US08877291B2
    • 2014-11-04
    • US13390633
    • 2011-06-01
    • Kazuyoshi HondaKunihiko BesshoTakashi Shimada
    • Kazuyoshi HondaKunihiko BesshoTakashi Shimada
    • C23C16/00C23C14/56C23C14/24C23C14/54
    • C23C14/562C23C14/24C23C14/243C23C14/54H01M4/0423H01M4/139
    • The present invention provides a thin film manufacturing method which realizes stable, highly-efficient film formation using a nozzle-type evaporation source while avoiding unnecessary scattering and deposition of a film formation material before the start of the film formation. Used is a film forming apparatus including: an evaporation chamber 16; a film forming chamber 17 in which a substrate 21 is provided; an evaporation source 19 holding a film formation material 15 and including an opening surface 14; a moving mechanism 35 configured to cause the evaporation source 19 to move; and a conductance variable structure 34. The film forming chamber 17 and the evaporation chamber 16 are evacuated. In a state where the differential pressure between these chambers can be secured by the conductance variable structure 34, the nonreactive gas is introduced to the evaporation chamber 16 to adjust the pressure in the evaporation chamber 16 to predetermined pressure or more. Thus, the evaporation of the film formation material is suppressed. In the same state as above, the nonreactive gas is introduced to the film forming chamber 17 to adjust the pressure in the film forming chamber 17 to the predetermined pressure or more. The conductance variable structure 34 is activated to cancel the above state. Then, the evaporation source 19 is moved by the moving mechanism 35, so that the opening surface 14 is located close to the substrate 21. The pressure in each chamber is decreased to less than the predetermined pressure. Thus, the suppression of the evaporation of the film formation material is canceled, and the film formation is started.
    • 本发明提供一种薄膜制造方法,其使用喷嘴型蒸发源实现稳定,高效的成膜,同时避免在成膜开始之前成膜材料的不必要的散射和沉积。 使用的成膜装置包括:蒸发室16; 设置有基板21的成膜室17; 保持成膜材料15并包括开口表面14的蒸发源19; 构造成使蒸发源19移动的移动机构35; 和导电可变结构34.成膜室17和蒸发室16被抽真空。 在通过电导可变结构34可以确保这些室之间的压差的状态下,将非反应性气体引入蒸发室16,以将蒸发室16中的压力调节至预定压力或更大。 因此,抑制了成膜材料的蒸发。 在与上述相同的状态下,将非反应性气体引入成膜室17,以将成膜室17中的压力调节至预定压力或更大。 电导变量结构34被激活以消除上述状态。 然后,蒸发源19被移动机构35移动,使得开口表面14位于靠近基板21的位置。每个室中的压力降低到小于预定压力。 因此,抑制成膜材料的蒸发被消除,并且开始成膜。
    • 7. 发明授权
    • Method of manufacturing thin film which suppresses unnecessary scattering and deposition of a source material
    • 制造薄膜的方法,其抑制源材料的不必要的散射和沉积
    • US08865258B2
    • 2014-10-21
    • US13392433
    • 2011-06-01
    • Kazuyoshi HondaKunihiko BesshoTakashi Shimada
    • Kazuyoshi HondaKunihiko BesshoTakashi Shimada
    • C23C14/00C23C14/24C23C14/56C23C14/54
    • C23C14/24C23C14/243C23C14/542C23C14/562H01M4/0423H01M4/1391H01M4/1395
    • The present invention provides a thin film manufacturing method which realizes stable, highly-efficient film formation using a nozzle-type evaporation source while avoiding unnecessary scattering and deposition of a film formation material after the termination of the film formation. Used is a film forming apparatus including: an evaporation chamber 16; a film forming chamber 17 in which a substrate 21 is provided; an evaporation source 19 holding a film formation material 15 and including an opening surface 14; a moving mechanism 35 configured to cause the evaporation source 19 to move; and a conductance variable structure 34. The film formation is performed in a state where the opening surface 14 of the evaporation source 19 holding the heated film formation material is located close to the substrate 21 while evacuating the evaporation chamber 16 and the film forming chamber 17 without shutting off communication between the evaporation chamber 16 and the film forming chamber 17 by the conductance variable structure 34. Next, the evaporation of the film formation material is suppressed by introducing a nonreactive gas to the evaporation chamber 16 and the film forming chamber 17 to adjust pressure in each chamber to predetermined pressure or more. Then, the evaporation source 19 is moved by the moving mechanism 35 such that the opening surface 14 is located away from the substrate 21. The conductance variable structure is activated to shut off the communication between these chambers, and the film formation material is cooled while continuously introducing the nonreactive gas to the evaporation chamber 16.
    • 本发明提供一种薄膜制造方法,其使用喷嘴型蒸发源实现稳定,高效的成膜,同时避免成膜材料终止后不必要的成膜材料的散射和沉积。 使用的成膜装置包括:蒸发室16; 设置有基板21的成膜室17; 保持成膜材料15并包括开口表面14的蒸发源19; 构造成使蒸发源19移动的移动机构35; 和导电可变结构34.成膜是在保持加热成膜材料的蒸发源19的开口表面14位于靠近基板21的同时抽空蒸发室16和成膜室17的状态下进行的 而不用电导可变结构34关闭蒸发室16和成膜室17之间的连通。接下来,通过向蒸发室16和成膜室17引入非反应性气体来抑制成膜材料的蒸发, 将每个室中的压力调节至预定压力或更大。 然后,蒸发源19被移动机构35移动,使得开口表面14远离基板21.导电可变结构被激活以切断这些室之间的连通,并且成膜材料被冷却,同时 将非反应性气体连续引入蒸发室16。
    • 8. 发明申请
    • METHOD OF MANUFACTURING THIN FILM
    • 制造薄膜的方法
    • US20120148746A1
    • 2012-06-14
    • US13392433
    • 2011-06-01
    • Kazuyoshi HondaKunihiko BesshoTakashi Shimada
    • Kazuyoshi HondaKunihiko BesshoTakashi Shimada
    • C23C16/448C23C16/455
    • C23C14/24C23C14/243C23C14/542C23C14/562H01M4/0423H01M4/1391H01M4/1395
    • The present invention provides a thin film manufacturing method which realizes stable, highly-efficient film formation using a nozzle-type evaporation source while avoiding unnecessary scattering and deposition of a film formation material after the termination of the film formation. Used is a film forming apparatus including: an evaporation chamber 16; a film forming chamber 17 in which a substrate 21 is provided; an evaporation source 19 holding a film formation material 15 and including an opening surface 14; a moving mechanism 35 configured to cause the evaporation source 19 to move; and a conductance variable structure 34. The film formation is performed in a state where the opening surface 14 of the evaporation source 19 holding the heated film formation material is located close to the substrate 21 while evacuating the evaporation chamber 16 and the film forming chamber 17 without shutting off communication between the evaporation chamber 16 and the film forming chamber 17 by the conductance variable structure 34. Next, the evaporation of the film formation material is suppressed by introducing a nonreactive gas to the evaporation chamber 16 and the film forming chamber 17 to adjust pressure in each chamber to predetermined pressure or more. Then, the evaporation source 19 is moved by the moving mechanism 35 such that the opening surface 14 is located away from the substrate 21. The conductance variable structure is activated to shut off the communication between these chambers, and the film formation material is cooled while continuously introducing the nonreactive gas to the evaporation chamber 16.
    • 本发明提供一种薄膜制造方法,其使用喷嘴型蒸发源实现稳定,高效的成膜,同时避免成膜材料终止后不必要的成膜材料的散射和沉积。 使用的成膜装置包括:蒸发室16; 设置有基板21的成膜室17; 保持成膜材料15并包括开口表面14的蒸发源19; 构造成使蒸发源19移动的移动机构35; 和导电可变结构34.成膜是在保持加热成膜材料的蒸发源19的开口表面14位于靠近基板21的同时抽空蒸发室16和成膜室17的状态下进行的 而不用电导可变结构34关闭蒸发室16和成膜室17之间的连通。接下来,通过向蒸发室16和成膜室17引入非反应性气体来抑制成膜材料的蒸发, 将每个室中的压力调节至预定压力或更大。 然后,蒸发源19被移动机构35移动,使得开口表面14远离基板21.导电可变结构被激活以切断这些室之间的连通,并且成膜材料被冷却,同时 将非反应性气体连续引入蒸发室16。