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    • 1. 发明授权
    • Acrylate derivatives, alcohol derivatives, and method for producing them
    • 丙烯酸酯衍生物,醇衍生物及其制备方法
    • US08188299B2
    • 2012-05-29
    • US12884677
    • 2010-09-17
    • Kazuya ShimizuMasayoshi YamanakaTatsuhiko HayashibaraHideharu Iwasaki
    • Kazuya ShimizuMasayoshi YamanakaTatsuhiko HayashibaraHideharu Iwasaki
    • C07D209/56
    • C07D209/02C07D491/18
    • Provided are an acrylate derivative useful as a raw material of a polymer compound for resist compositions capable of giving resist patterns which are excellent in lithographic performance and have a good shape, an intermediate thereof (alcohol derivative) and production processes for them. To be specific, it is an acrylate derivative represented by a formula shown below: (wherein R1 represents a hydrogen atom, methyl or trifluoromethyl; R2, R3, R5, R7, R8, R9 and R10 each represent independently a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, a cycloalkyl group having 3 to 6 carbon atoms or an alkoxy group having 1 to 6 carbon atoms; R4 and R6 each represent independently a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, a cycloalkyl group having 3 to 6 carbon atoms or an alkoxy group having 1 to 6 carbon atoms, or both of R4 and R6 are combined to represent an alkylene group having 1 to 3 carbon atoms, —O— or —S—; and R11 represents a hydrogen atom, an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 10 carbon atoms).
    • 提供可用作抗蚀剂组合物的聚合物化合物的原料的丙烯酸酯衍生物,其能够提供平版印刷性能优异且形状良好的抗蚀剂图案,其中间体(醇衍生物)及其制备方法。 具体来说,它是由下式表示的丙烯酸酯衍生物:其中R1表示氢原子,甲基或三氟甲基; R2,R3,R5,R7,R8,R9和R10各自独立地表示氢原子,烷基 具有1至6个碳原子的基团,具有3至6个碳原子的环烷基或具有1至6个碳原子的烷氧基; R 4和R 6各自独立地表示氢原子,具有1至6个碳原子的烷基,环烷基 具有3至6个碳原子的烷基或具有1至6个碳原子的烷氧基,或者R 4和R 6都被结合以表示具有1至3个碳原子的亚烷基,-O-或-S-; R 11表示 氢原子,碳原子数1〜6的烷基或碳原子数3〜10的环状烃基)。