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    • 3. 发明授权
    • Semiconductor integrated circuit device having MOS transistor
    • 具有MOS晶体管的半导体集成电路器件
    • US07161198B2
    • 2007-01-09
    • US10236413
    • 2002-09-06
    • Toshihiko OmiHitomi WatanabeKazutoshi IshiiNaoto Saitoh
    • Toshihiko OmiHitomi WatanabeKazutoshi IshiiNaoto Saitoh
    • H01L29/76
    • H01L29/7816H01L29/0878H01L29/1083H01L29/1095H01L29/42368H01L29/7833H01L29/7835
    • An N-channel MOS transistor of a semiconductor device having a high withstand voltage employs a drain structure with a low concentration and a large diffusion depth, which causes a problem in that a sufficiently high withstand voltage cannot be obtained due to a parasitic NPN transistor formed among the drain, the well, and the semiconductor substrate which are arranged in the stated order. According to the present invention, provided are a semiconductor device, including: a semiconductor substrate; an epitaxial layer having an electric polarity identical with that of the semiconductor substrate, which is formed on the semiconductor substrate; a buried diffusion layer having the electric polarity different from that of the semiconductor substrate, which is formed between the semiconductor substrate and the epitaxial layer; and a well region having the electric polarity identical with that of the buried diffusion layer, which is formed above the buried diffusion layer and is electrically connected therewith, in which a MOS transistor is formed in a well having a structure in which the buried diffusion layer is electrically connected with the well region, and a manufacturing method therefor.
    • 具有高耐受电压的半导体器件的N沟道MOS晶体管采用具有低浓度和大扩散深度的漏极结构,这导致由于形成的寄生NPN晶体管而不能获得足够高的耐受电压的问题 在排列,阱和半导体衬底之中,以所述顺序排列。 根据本发明,提供一种半导体器件,包括:半导体衬底; 具有与半导体衬底的电极性相同的电极的外延层,其形成在半导体衬底上; 形成在半导体衬底和外延层之间的具有与半导体衬底的电极性不同的电极的掩埋扩散层; 以及具有与掩埋扩散层的电极性相同的电极性的阱区,其形成在掩埋扩散层的上方并与其电连接,其中MOS晶体管形成在具有埋入扩散层的结构的阱中, 与该阱区电连接,及其制造方法。
    • 7. 发明授权
    • Current regulating semiconductor integrated circuit device and
fabrication method of the same
    • 电流调节半导体集成电路器件及其制造方法
    • US5663589A
    • 1997-09-02
    • US314140
    • 1994-09-28
    • Yutaka SaitohJun OsanaiYoshikazu KojimaKazutoshi Ishii
    • Yutaka SaitohJun OsanaiYoshikazu KojimaKazutoshi Ishii
    • H01L21/8234H01L27/08H01L27/088H01L29/76H01L21/04
    • H01L27/0814Y10S257/907Y10S257/91
    • A semiconductor integrated device having a current regulating diode may be substantially reduced in size and improved in performance by forming the current regulating diode of a plurality of MOS transistors each having a gate, a drain region, and a source region formed in a semiconductor substrate, the source regions and the substrate regions being electrically coupled to each other, the drain regions of at least two of the MOS transistors being electrically coupled, and the source regions of each of the MOS transistors being electrically coupled, the coupled drain regions, the coupled source regions, and the coupled gates forming a drain terminal, a source terminal and a gate terminal, respectively. In order to set a desired regulated current, selected coupling lines in the current regulating diode may be cut. This may be accomplished, for example, by measuring a first current which flows in the drain terminal while applying a first voltage to the gate terminal and a second voltage to the drain terminal relative to an electric potential of the source terminal, then measuring a second current which flows in the drain terminal while applying a third voltage to the gate terminal and the second voltage to the drain terminal relative to an electric potential of the source terminal. In order to achieve the desired current characteristic, selected conductive lines between coupled drains or between coupled sources are then cut.
    • 具有电流调节二极管的半导体集成器件可以通过形成多个MOS晶体管的电流调节二极管来大大减小尺寸并提高其性能,每个MOS晶体管具有形成在半导体衬底中的栅极,漏极区域和源极区域, 源极区域和衬底区域彼此电耦合,至少两个MOS晶体管的漏极区域电耦合,并且每个MOS晶体管的源极区域电耦合,耦合的漏极区域,耦合的 源极区域和耦合栅极分别形成漏极端子,源极端子和栅极端子。 为了设定期望的调节电流,可以切断电流调节二极管中的选择的耦合线。 这可以例如通过测量在漏极端子中流动的第一电流,同时向栅极端子施加第一电压,并且相对于源极端子的电位向漏极端子施加第二电压,然后测量第二电压 相对于源极端子的电位向漏极端子施加第三电压而向漏极端子施加第三电压而流过漏极端子的电流。 为了实现期望的电流特性,然后切割耦合的漏极之间或耦合的源之间的选定的导线。
    • 8. 发明授权
    • Method of producing low and high voltage MOSFETs with reduced masking
steps
    • 降低屏蔽步骤生产低压和高压MOSFET的方法
    • US5449637A
    • 1995-09-12
    • US128059
    • 1993-09-27
    • Yutaka SaitoYoshikazu KojimaKazutoshi Ishii
    • Yutaka SaitoYoshikazu KojimaKazutoshi Ishii
    • H01L21/265H01L21/266H01L21/8238H01L27/092
    • H01L21/8238
    • An electroconductive or insulative film 100 is formed over a surface of a semiconductor substrate 1. A first photoresist 101 is coated over the film 100, and is then patterned. The film 100 is selectively removed by etching to expose a given area of the substrate 1. Subsequently an impurity of the first conductivity type is doped into the exposed area to form a first impurity region. After removing the first photoresist 101, a second photoresist 103 is coated entirely over the film 100, and is then patterned. Subsequently, the film 100 is selectively removed from another given area by etching. Another impurity of the second conductivity type is doped into the exposed area to form a second impurity region 104. Only the two steps of the photoresist patterning are carried out to form the impurity regions of the different conductivity types, thereby reducing production cost of the semiconductor device. The impurity can be doped by ion implantation while covering the film 100 with the photoresist, thereby facilitating micronization and integration of the semiconductor device.
    • 在半导体衬底1的表面上形成导电或绝缘膜100.第一光致抗蚀剂101涂覆在膜100上,然后被图案化。 通过蚀刻选择性地去除膜100以暴露衬底1的给定区域。随后将第一导电类型的杂质掺杂到暴露区域中以形成第一杂质区域。 在去除第一光致抗蚀剂101之后,将第二光致抗蚀剂103整个涂覆在膜100上,然后被图案化。 随后,通过蚀刻从另一给定区域选择性地去除膜100。 第二导电类型的另一杂质被掺杂到暴露区域中以形成第二杂质区域104.只进行光致抗蚀剂图案化的两个步骤以形成不同导电类型的杂质区域,从而降低半导体的制造成本 设备。 可以通过离子注入来掺杂杂质,同时用光致抗蚀剂覆盖膜100,从而有助于半导体器件的微粉化和集成。