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    • 3. 发明授权
    • Linescan apparatus for detecting salient pattern of a product
    • 用于检测产品突出图案的线条装置
    • US4983827A
    • 1991-01-08
    • US427507
    • 1989-10-25
    • Kazutoshi IkegayaKunio SannomiyaYukifumi TsudaYuji MaruyamaNobuhiro ArakiHiroto Toba
    • Kazutoshi IkegayaKunio SannomiyaYukifumi TsudaYuji MaruyamaNobuhiro ArakiHiroto Toba
    • G01N21/88G01B11/24G01B11/245G01N21/93G01N21/956G01R31/309H05K3/34H05K13/08
    • G01R31/309H05K13/08
    • A linescan apparatus for detecting salient pattern on a surface of a product comprises: a laser light source for continuously emitting a laser beam; a polygon mirror for reflecting the laser beam; a drive for rotating the polygon mirror to scan said laser beam; an f.theta. lens arranged such that the linescan laser beam strikes against the plane perpendicularly; a carrying device for moving the product in the direction substantially perpendicular to the plane; a mirror for reflecting the linescan laser beam reflected at a surface of the product to direct the linescan laser beam to the polygon mirror through the f.theta. lens, the mirror being positioned apart from the second plane; and a beam position detector for detecting unidimensional position of a spot mede by the linescan laser beam projected thereon from the mirror via the polygon mirror. This linescan apparatus provides three-dimensional data of a surface of the product. The detected position signal is compared by reference data for inspecting the product. An linescan apparatus further comprises second beam position detector and an averaging circuit for averaging outputs from first mentioned and second beam detectors.
    • 用于检测产品表面上的突出图案的线条扫描装置包括:用于连续发射激光束的激光源; 用于反射激光束的多面镜; 用于旋转多面镜以扫描所述激光束的驱动器; f theta透镜布置成使得线可激光束垂直于平面撞击平面; 用于沿着与该平面基本垂直的方向移动产品的承载装置; 用于反射在产品的表面处反射的线阵激光束的反射镜,以通过fθ透镜将线阵激光束引导到多面镜,反射镜被定位成离开第二平面; 以及光束位置检测器,用于通过经由多面镜从反射镜投射到其上的线扫描激光束来检测点中心的一维位置。 该线扫描装置提供产品表面的三维数据。 通过用于检查产品的参考数据来比较检测到的位置信号。 线扫描装置还包括第二光束位置检测器和用于平均来自第一和第二光束检测器的输出的平均电路。