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    • 1. 发明授权
    • Positioning device
    • 定位装置
    • US5286977A
    • 1994-02-15
    • US8804
    • 1993-01-25
    • Kazuo YokoyamaMotoshi Shibata
    • Kazuo YokoyamaMotoshi Shibata
    • G01B7/00G01B7/34G01N37/00G01Q10/02G01Q10/04G01Q20/04G01Q30/18G01Q70/04G01Q90/00G12B5/00H01J37/20
    • G01Q10/04B82Y35/00G01Q70/04H01J37/20Y10S977/872
    • Disclosed is a positioning device comprising an X-Y scanning mechanism capable of scanning and driving in planar directions and a Z-scanning mechanism capable of scanning and driving in a direction perpendicular to the planar directions. A sample table is affixed to the moving part of the Z-scanning mechanism, and the housing of the probe head is fixed to the casing of the positioning device through a plate spring. The housing abuts against a plane formed in the moving part of the X-Y scanning mechanism through three point contact legs such that the resonance frequency of the entire device can be set high, thereby realizing a high anti-vibration effect and stable probe scanning. The housing of the probe head abuts against said plane formed in the moving part of the X-Y scanning mechanism through three ball bearings composing the three point contact legs, and is mounted on the fixed table through a thin plate spring.
    • 公开了一种定位装置,其包括能够在平面方向上扫描和驱动的X-Y扫描机构,以及能够沿垂直于平面方向的方向扫描和驱动的Z扫描机构。 样品台固定在Z扫描机构的运动部分,探头的外壳通过板簧固定在定位装置的壳体上。 壳体通过三点接触腿与X-Y扫描机构的移动部分形成的平面抵接,使得整个装置的共振频率可以设定得高,从而实现高抗振效果和稳定的探头扫描。 探针头的壳体通过构成三点接触腿的三个球轴承抵靠形成在X-Y扫描机构的运动部分中的所述平面,并通过薄板弹簧安装在固定台上。