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1. 发明授权

US5003516A Ultrasonic probe and manufacture method for same 失效
标题翻译：超声波探头及其制造方法相同
公开(公告)号：US5003516A
公开(公告)日：1991-03-26
申请号：US336685
申请日：1989-04-12
申请人： Kazuo Sato , Hiroshi Kanda , Shigeo Kato , Kuninori Imai , Takeji Shiokawa , Shinji Tanaka , Isao Ishikawa , Harumasa Onozato , Hisayoshi Hashimoto , Morio Tamura , Kazuyoshi Hatano , Fujio Sato , Ken Ichiryuu , Kiyoshi Tanaka , Takao Kawanuma
发明人： Kazuo Sato , Hiroshi Kanda , Shigeo Kato , Kuninori Imai , Takeji Shiokawa , Shinji Tanaka , Isao Ishikawa , Harumasa Onozato , Hisayoshi Hashimoto , Morio Tamura , Kazuyoshi Hatano , Fujio Sato , Ken Ichiryuu , Kiyoshi Tanaka , Takao Kawanuma
IPC分类号： G01N29/24 , G10K11/30 , H04R1/34
CPC分类号： G10K11/30 , Y10T29/42
摘要： An ultrasonic probe comprising an acoustic lens (20) having a concave lens surface (21) formed on one side of a lens body, and a piezoelectric transducer (23) disposed on the other side of the acoustic lens, ultrasonic waves generated by applying voltage to the piezoelectric transducer being focused through the lens surface to detect the reflected waves of the ultrasonic waves from a sample (26) by the piezoelectric transducer for obtaining information about the surface or interior of the sample. The lens surface (21) of the acoustic lens (20) is defined by an etch profile (15) formed by etching a substrate material (11) which makes up the lens body.

2. 发明授权

US5050137A Ultrasonic probe 失效
标题翻译：超声波探头
公开(公告)号：US5050137A
公开(公告)日：1991-09-17
申请号：US522928
申请日：1990-05-14
申请人： Kazuo Sato , Hiroshi Kanda , Shigeo Kato , Kuninori Imai , Takeji Shiokawa , Shinji Tanaka , Isao Ishikawa , Harumasa Onozato , Hisayoshi Hashimoto , Morio Tamura , Kazuyoshi Hatano , Fujio Sato , Ken Ichiryuu , Kiyoshi Tanaka , Takao Kawanuma
发明人： Kazuo Sato , Hiroshi Kanda , Shigeo Kato , Kuninori Imai , Takeji Shiokawa , Shinji Tanaka , Isao Ishikawa , Harumasa Onozato , Hisayoshi Hashimoto , Morio Tamura , Kazuyoshi Hatano , Fujio Sato , Ken Ichiryuu , Kiyoshi Tanaka , Takao Kawanuma
IPC分类号： G01N29/24 , G10K11/30 , H04R1/34
CPC分类号： G10K11/30 , Y10T29/42
摘要： An ultrasonic probe comprising an acoustic lens (20) having a concave lens surface (21) formed on one side of a lens body, and a piezoelectric transducer (23) disposed on the other side of the acoustic lens, ultrasonic waves generated by applying voltage to the piezoelectric transducer being focused through the lens surface to detect the reflected waves of the ultrasonic waves from a sample (26) by the piezoelectric transducer for obtaining information about the surface or interior of the sample. The lens surface (21) of the acoustic lens (20) is defined by an etch profile (15) formed by etching a substrate material (11) which makes up the lens body.

3. 发明授权

US4730494A Method for examining a surface of a sample by means of ultrasound 失效
标题翻译：通过超声波检查样品表面的方法
公开(公告)号：US4730494A
公开(公告)日：1988-03-15
申请号：US904400
申请日：1986-09-08
申请人： Isao Ishikawa , Hiroshi Kanda , Kageyoshi Katakura
发明人： Isao Ishikawa , Hiroshi Kanda , Kageyoshi Katakura
IPC分类号： G01N29/26 , G01B17/00 , G01B17/02 , G01H3/12 , G01N29/00 , G01N29/06 , G01N29/34 , G01N29/04
CPC分类号： G01B17/025 , G01H3/125 , G01N29/348 , G01N2291/02854
摘要： A method for examining a layer having defects and in particular the thickness of a machining damaged layer on a surface of a sample by means of a focused ultrasound beam and a device for realizing the method are disclosed, in which a focused ultrasound beam is generated and ultrasound reflected by the sample is detected. Curves (called V(z) curves) representing the relation of the distance between a transducer detecting the reflected ultrasound and the sample versus the detection output are traced while varying the distance and this measurement is repeated while varying the frequency of the focused ultrasound beam. The propagation velocity of surface acoustic wave in the sample is calculated on the basis of the period in each of the plurality of V(z) curves and a frequency dependence characteristic curve for the propagation velocity is obtained. The thickness of the machining damaged layer in the surface portion of the sample is evaluated from inflection points in the frequency dependence characteristic curve.
摘要翻译：公开了一种通过聚焦超声波束和用于实现该方法的装置来检查具有缺陷，特别是样品表面上的加工损伤层的厚度的层的方法，其中产生聚焦超声波束，检测由样品反射的超声波。在改变距离的同时，跟踪表示检测反射超声波检测器的传感器与样本与检测输出之间的距离的关系的曲线（称为V（z）曲线），并且在改变聚焦超声波束的频率的同时重复该测量。基于多个V（z）曲线中的每一个的周期来计算样本中表面声波的传播速度，并且获得用于传播速度的频率依赖特性曲线。样品表面部分的加工损伤层的厚度根据频率相关特性曲线的拐点进行评价。

4. 发明授权

US4394824A Acoustic microscope 失效
标题翻译：声学显微镜
公开(公告)号：US4394824A
公开(公告)日：1983-07-26
申请号：US261032
申请日：1981-05-06
申请人： Hiroshi Kanda , Isao Ishikawa , Toshio Kondo , Kageyoshi Katakura
发明人： Hiroshi Kanda , Isao Ishikawa , Toshio Kondo , Kageyoshi Katakura
IPC分类号： G01N29/06 , G01H3/12 , G01S15/89 , G01N29/00
CPC分类号： G01S15/8906 , G01H3/125
摘要： In an acoustic microscope wherein a piezoelectric transducer disposed on one face of an ultrasonic wave focusing lens radiates an ultrasonic wave into the lens and also converts into an electric signal a reflected wave from a specimen arranged on the side of the other face of the lens, a reflected wave from the interface of the lens and the reflected wave from the specimen are caused to interfere with each other.
摘要翻译：在其中设置在超声波聚焦透镜的一个面上的压电换能器将超声波辐射到透镜中并且还将来自设置在透镜另一面侧的试样的反射波转换成电信号的声学显微镜中，使来自透镜的界面的反射波和来自试样的反射波相互干扰。

5. 发明授权

US4597293A Scanning acoustic microscope 失效
标题翻译：扫描声学显微镜
公开(公告)号：US4597293A
公开(公告)日：1986-07-01
申请号：US689955
申请日：1985-01-09
申请人： Hiroshi Kanda , Isao Ishikawa , Kageyoshi Katakura , Chitose Nakaya
发明人： Hiroshi Kanda , Isao Ishikawa , Kageyoshi Katakura , Chitose Nakaya
IPC分类号： G01N29/06 , G10K11/02 , G01N29/04
CPC分类号： G01N29/06 , G10K11/02 , G01N2291/02854
摘要： An acoustic microscope wherein an ultrasonic beam is projected on a sample through a propagating medium by an ultrasonic transducer having a short focus, reflected acoustic waves from the sample are detected by the transducer, and a microscopic image of the sample is obtained by scanning the sample mechanically in two dimensions, comprises a cover member which is interposed between the sample and the propagating medium and which has an acoustic impedance higher than those of the two. The intensity of a reflection signal depends upon multipath reflection within the cover member, and an intense reflection signal is obtained even for a sample which differs slightly in the acoustic impedance from the propagating medium.
摘要翻译：一种声学显微镜，其中超声波束通过具有短焦距的超声波换能器通过传播介质投射在样本上，由换能器检测来自样品的反射声波，并通过扫描样品获得样品的显微图像在两个维度上机械地包括盖构件，其插入在样品和传播介质之间，并且具有比两者更高的声阻抗。反射信号的强度取决于盖构件内的多径反射，并且即使对于声阻抗与传播介质略有差异的样本也可获得强反射信号。

6. 发明授权

US4563900A Acoustic microscope 失效
标题翻译：声学显微镜
公开(公告)号：US4563900A
公开(公告)日：1986-01-14
申请号：US603937
申请日：1984-04-26
申请人： Kunio Harada , Sumio Yamaguchi , Hiroshi Kanda , Isao Ishikawa , Yuzuru Ohji
发明人： Kunio Harada , Sumio Yamaguchi , Hiroshi Kanda , Isao Ishikawa , Yuzuru Ohji
IPC分类号： G01N29/28 , G01H3/12 , G01N29/06 , G10K11/02 , G01N29/04
CPC分类号： G10K11/02 , G01H3/125
摘要： In an acoustic microscope wherein an acoustic wave is projected to a predetermined specimen by an acoustic lens, and a disturbed acoustic wave from the specimen is imaged; an acoustic microscope characterized in that the lens has a ring which is arranged around it, whereby a liquid to serve as an acoustic propagation medium is held between the ring and the specimen by capillarity.
摘要翻译：在声波显微镜中，声波通过声透镜投射到预定的样本，并且来自样本的干扰的声波被成像; 一种声学显微镜，其特征在于，透镜具有围绕其布置的环，由此通过毛细作用将用作声传播介质的液体保持在环和样品之间。

7. 发明授权

US4577504A Acoustic microscope 失效
标题翻译：声学显微镜
公开(公告)号：US4577504A
公开(公告)日：1986-03-25
申请号：US601960
申请日：1984-04-19
申请人： Hiroshi Kanda , Isao Ishikawa
发明人： Hiroshi Kanda , Isao Ishikawa
IPC分类号： G01N29/06 , G01H3/12 , G01S15/89 , G01N29/00
CPC分类号： G01S15/8906 , G01H3/125
摘要： An acoustic microscope of the type of mechanical scanning in which a single transducer works to generate an acoustic beam as well as to detect echoes reflected from the specimen. An echo reflected from an interface between an acoustic lens and an acoustic propagation medium is detected, and the detected intensity is used as a reference to display the distribution of attenuation factors of the specimen in a two-dimensional manner. Among the signals representing the distribution of attenuation factors of the specimen, furthermore, only those signals having intensities that lie within a predetermined range are displayed to obtain a picture of the specimen that represents the distribution of attenuation factors of a predetermined range only.
摘要翻译：机械扫描类型的声学显微镜，其中单个换能器工作以产生声束以及检测从样本反射的回波。检测从声透镜和声传播介质之间的界面反射的回波，并且将检测的强度用作参考，以二维方式显示样品的衰减因子的分布。在表示试样的衰减因子分布的信号中，仅显示具有处于预定范围内的强度的信号，以获得仅表示预定范围的衰减因子分布的样本的图像。

8. 发明授权

US4563898A Acoustic microscope 失效
标题翻译：声学显微镜
公开(公告)号：US4563898A
公开(公告)日：1986-01-14
申请号：US586806
申请日：1984-03-06
申请人： Hiroshi Kanda , Kageyoshi Katakura , Isao Ishikawa
发明人： Hiroshi Kanda , Kageyoshi Katakura , Isao Ishikawa
IPC分类号： G01H3/12 , G01N29/06 , G01N29/00
CPC分类号： G01H3/125 , G01N29/06
摘要： An acoustic microscope comprising an acoustic transducer which performs both generation and detection of acoustic wave beams, and a sample holding member which opposes to an acoustic wave transmitting and receiving surface of the transducer, to hold an object sample through an acoustic wave propagating medium and to offer behind the sample a layer of an acoustic impedance unequal to that of the sample, so that the sample holding member is moved in parallel, thereby to detect acoustic waves reflected from front and rear surfaces of the sample and acoustic waves reflected from a surface of the sample holding member without reaching the sample and to measure amplitudes and returning periods of time of the reflected acoustic waves, so as to measure the velocity of sound through the sample of unknown thickness, the acoustic impedance of the sample, etc. from the measured values.
摘要翻译：一种声学显微镜，包括执行声波波束的产生和检测的声换能器，以及与所述换能器的声波发射和接收表面相对的样本保持构件，以通过声波传播介质保持对象样本，并且在样品后面提供与样品不同的声阻抗层，使得样品保持构件平行移动，从而检测从样品的前表面和后表面反射的声波以及从样品的表面反射的声波样品保持构件未到达样品并测量反射声波的振幅和返回时间段，以便测量来自测量的未知厚度样品的声音速度，样品的声阻抗等价值观。

9. 发明授权

US4510810A Ultrasonic microscope 失效
标题翻译：超声波显微镜
公开(公告)号：US4510810A
公开(公告)日：1985-04-16
申请号：US454026
申请日：1982-12-28
申请人： Hiroshi Kanda , Isao Ishikawa
发明人： Hiroshi Kanda , Isao Ishikawa
IPC分类号： G01N29/06 , B06B1/06 , G01H3/12 , G01N29/04
CPC分类号： G01H3/125 , B06B1/0625
摘要： An ultrasonic microscope displays an ultrasonic wave image of a sample relatively and two-dimensionally scanned with respect to an ultrasonic wave beam transmitted from and focused by a transducer including a piezoelectric element and an acoustic lens. The F number of the acoustic lens is variably changeable while the scan in one direction of the two-dimensional scan is substituted by a time axis scan of the received echo.
摘要翻译：超声波显微镜相对于由包括压电元件和声透镜的换能器传输并聚焦的超声波波相对并二维地扫描样品的超声波图像。声透镜的F数可以变化，而二维扫描的一个方向上的扫描被接收的回波的时间轴扫描代替。

10. 发明授权

US4446738A Acoustic scanning microscope 失效
标题翻译：声扫描显微镜
公开(公告)号：US4446738A
公开(公告)日：1984-05-08
申请号：US330779
申请日：1981-12-14
申请人： Isao Ishikawa , Hiroshi Kanda , Kageyoshi Katakura
发明人： Isao Ishikawa , Hiroshi Kanda , Kageyoshi Katakura
IPC分类号： G01S7/52 , G01D5/48 , G01H3/12 , G01N29/06 , G01S15/89 , G01N29/04
CPC分类号： G01H3/125 , G01D5/48 , G01N29/06 , G01N2291/2697
摘要： An acoustic scanning microscope includes a specimen table for supporting a specimen illuminated by an ultrasonic wave. The specimen table is supported in a non-contacting manner under aerostatic pressure or alternatively magnetic repulsion.
摘要翻译：声扫描显微镜包括用于支撑由超声波照射的样本的样本台。样品台在空气静压或磁排斥下以非接触的方式支撑。

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