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    • 2. 发明申请
    • Photoelectric Conversion Device and Manufacturing Method Thereof
    • 光电转换装置及其制造方法
    • US20110303272A1
    • 2011-12-15
    • US13154990
    • 2011-06-07
    • Kazuo NishiTakashi HiroseFumito IsakaNaoto Kusumoto
    • Kazuo NishiTakashi HiroseFumito IsakaNaoto Kusumoto
    • H01L31/075H01L31/0264
    • H01L31/18H01L31/046H01L31/0463H01L31/0465H01L31/075Y02E10/548
    • An object is to provide a photoelectric conversion device in which defects are suppressed as much as possible by filling a separation process region of a semiconductor film with an insulating resin. A photoelectric conversion device includes a first conductive layer formed over a substrate; first to third semiconductor layers formed over the first conductive layer; a second conductive layer formed over the third semiconductor layer; a first separation groove for separating the first conductive layer and the first to third semiconductor layers into a plurality of pieces; a second separation groove for separating the first to third semiconductor layers into a plurality of pieces; and a third separation groove for separating the second conductive layer into a plurality of pieces. An insulating resin is filled in a structural defect that exists in at least one of the first to third semiconductor layers, and in the first separation groove.
    • 本发明的目的是提供一种通过用绝缘树脂填充半导体膜的分离工艺区域尽可能地抑制缺陷的光电转换装置。 光电转换装置包括形成在基板上的第一导电层; 形成在第一导电层上的第一至第三半导体层; 形成在所述第三半导体层上的第二导电层; 第一分离槽,用于将第一导电层和第一至第三半导体层分离成多个片; 第二分离槽,用于将第一至第三半导体层分离成多个片; 以及第三分离槽,用于将第二导电层分离成多个片。 绝缘树脂填充在存在于第一至第三半导体层中的至少一个和第一分离槽中的结构缺陷中。
    • 5. 发明授权
    • Semiconductor device and manufacturing method thereof
    • 半导体装置及其制造方法
    • US08258512B2
    • 2012-09-04
    • US12752388
    • 2010-04-01
    • Kazuo NishiJunya MaruyamaNaoto KusumotoYuusuke Sugawara
    • Kazuo NishiJunya MaruyamaNaoto KusumotoYuusuke Sugawara
    • H01L29/04
    • H01L27/14665H01L27/14632H01L27/14634H01L27/14636H01L27/1469H01L27/14692
    • An object of the present invention to provide a semiconductor device manufactured in short time by performing the step of forming the thin film transistor and the step of forming the photoelectric conversion layer in parallel, and to provide a manufacturing process thereof. According to the present invention, a semiconductor device is manufactured in such a way that a thin film transistor is formed over a first substrate, a photoelectric conversion element is formed over a second substrate, and the thin film transistor and the photoelectric conversion element are connected electrically by sandwiching a conductive layer between the first and second substrates opposed to each other so that the thin film transistor and the photoelectric conversion element are located between the first and second substrates. Thus, a method for manufacturing a semiconductor device which suppresses the increase in the number of steps and which increases the throughput can be provided.
    • 本发明的目的在于提供一种通过进行薄膜晶体管的形成工序和并联形成光电转换层的工序,在短时间内制造的半导体器件,并提供其制造工艺。 根据本发明,制造半导体器件,使得在第一衬底上形成薄膜晶体管,在第二衬底上形成光电转换元件,并且连接薄膜晶体管和光电转换元件 通过将导电层夹在彼此相对的第一和第二基板之间,使得薄膜晶体管和光电转换元件位于第一和第二基板之间。 因此,可以提供一种制造半导体器件的方法,该方法抑制步骤数量的增加并增加通过量。
    • 6. 发明授权
    • Photoelectric conversion device and electronic device, and method for manufacturing photoelectric conversion device
    • 光电转换装置和电子装置以及光电转换装置的制造方法
    • US08207589B2
    • 2012-06-26
    • US12068849
    • 2008-02-12
    • Naoto KusumotoKazuo NishiYuusuke Sugawara
    • Naoto KusumotoKazuo NishiYuusuke Sugawara
    • H01L27/146
    • H01L31/147H01L27/12H01L27/1214H01L31/153H01L2224/16225H01L2224/32225H01L2224/73204H01L2924/00
    • A photoelectric conversion device includes: a first substrate of which end portions are cut off so as to slope or with a groove shape; a photodiode and an amplifier circuit over the first substrate; a first electrode electrically connected to the photodiode and provided over one end portion of the first substrate; a second electrode electrically connected to the amplifier circuit and provided over an another end portion of the first substrate; and a second substrate having third and fourth electrodes thereon. The first and second electrodes are attached to the third and fourth electrodes, respectively, with a conductive material provided not only at the surfaces of the first, second, third, and fourth electrodes facing each other but also at the side surfaces of the first and second electrodes to increase the adhesiveness between a photoelectric conversion device and a member on which the photoelectric conversion device is mounted.
    • 一种光电转换装置,包括:第一基板,其端部被切割成倾斜或具有凹槽形状; 在所述第一衬底上的光电二极管和放大器电路; 电连接到所述光电二极管并且设置在所述第一基板的一个端部上的第一电极; 电连接到所述放大器电路并且设置在所述第一基板的另一端部上的第二电极; 以及在其上具有第三和第四电极的第二基板。 第一电极和第二电极分别被附接到第三和第四电极,导电材料不仅设置在第一,第二,第三和第四电极的彼此面对,而且在第一和第二电极的第一和第二电极的侧表面处 第二电极,以增加光电转换装置与安装有光电转换装置的部件之间的粘合性。