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    • 6. 发明申请
    • FABRICATION OF NANOSCALE THERMOELECTRIC DEVICES
    • 纳米热电装置的制造
    • US20050112872A1
    • 2005-05-26
    • US10720269
    • 2003-11-25
    • Yoshimasa OkamuraTimothy Kohler
    • Yoshimasa OkamuraTimothy Kohler
    • H01L21/44H01L35/32H01L35/34
    • H01L35/34H01L35/32Y10S977/833
    • In a method for fabricating a nanowire thermoelectric device, a first electrode pattern is formed on a substrate, wherein the first electrode pattern includes bottom electrodes and a first set of connections which connects the bottom electrodes to form first and second groups of electrically connected bottom electrodes. P-type nanowires and n-type nanowires are selectively formed on the substrate by selectively activating either the first group of electrically connected bottom electrodes and the second group. The p-type and n-type nanowires are then connected by top electrodes. A first set of holes in the substrate is formed to remove the first set of connections. A second set of holes to allow for electrical access to the bottom electrodes, and a second set of connections are formed, so as to result in an array of thermocouples connected to each other in parallel banks of series-connected thermocouples.
    • 在制造纳米线热电装置的方法中,在基板上形成第一电极图案,其中第一电极图案包括底部电极和连接底部电极的第一组连接,以形成第一和第二组电气连接的底部电极 。 通过选择性地激活第一组电连接的底部电极和第二组,选择性地在衬底上形成P型纳米线和n型纳米线。 p型和n型纳米线然后通过顶部电极连接。 形成衬底中的第一组孔以去除第一组连接。 形成第二组孔,以允许电接入底部电极,并且形成第二组连接,以便导致串联连接的热电偶并联的彼此连接的热电偶阵列。