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    • 6. 发明申请
    • FABRICATION OF NANOSCALE THERMOELECTRIC DEVICES
    • 纳米热电装置的制造
    • US20050112872A1
    • 2005-05-26
    • US10720269
    • 2003-11-25
    • Yoshimasa OkamuraTimothy Kohler
    • Yoshimasa OkamuraTimothy Kohler
    • H01L21/44H01L35/32H01L35/34
    • H01L35/34H01L35/32Y10S977/833
    • In a method for fabricating a nanowire thermoelectric device, a first electrode pattern is formed on a substrate, wherein the first electrode pattern includes bottom electrodes and a first set of connections which connects the bottom electrodes to form first and second groups of electrically connected bottom electrodes. P-type nanowires and n-type nanowires are selectively formed on the substrate by selectively activating either the first group of electrically connected bottom electrodes and the second group. The p-type and n-type nanowires are then connected by top electrodes. A first set of holes in the substrate is formed to remove the first set of connections. A second set of holes to allow for electrical access to the bottom electrodes, and a second set of connections are formed, so as to result in an array of thermocouples connected to each other in parallel banks of series-connected thermocouples.
    • 在制造纳米线热电装置的方法中,在基板上形成第一电极图案,其中第一电极图案包括底部电极和连接底部电极的第一组连接,以形成第一和第二组电气连接的底部电极 。 通过选择性地激活第一组电连接的底部电极和第二组,选择性地在衬底上形成P型纳米线和n型纳米线。 p型和n型纳米线然后通过顶部电极连接。 形成衬底中的第一组孔以去除第一组连接。 形成第二组孔,以允许电接入底部电极,并且形成第二组连接,以便导致串联连接的热电偶并联的彼此连接的热电偶阵列。
    • 8. 发明授权
    • Non-wetting coating on a fluid ejector
    • 流体喷射器上的非润湿涂层
    • US08733897B2
    • 2014-05-27
    • US13125474
    • 2009-10-27
    • Yoshimasa Okamura
    • Yoshimasa Okamura
    • B41J2/135B05D1/38
    • B41J2/165B41J2/14233B41J2/1606
    • A fluid ejector includes a substrate having an exterior surface and an interior surface. A non-wetting coating can cover at least a portion of the exterior surface and can be substantially absent from the flow path. A non-wetting coating can be formed of a molecular aggregation. A precursor of a non-wetting coating may flow into a chamber at a higher temperature higher than the substrate. A non-wetting coating can be over a seed layer. An outer portion of the seed layer can have a higher concentration of water molecules or a greater density than an inner portion. The outer portion can be deposited at a ratio of partial pressure water to partial pressure matrix precursor that is higher than the ratio for the inner portion. An oxygen plasma can be applied to a seed layer on the exterior surface, and the non-wetting coating can be applied on the seed layer.
    • 流体喷射器包括具有外表面和内表面的基底。 非润湿涂层可以覆盖外表面的至少一部分,并且可以基本上不存在于流动路径中。 非润湿涂层可由分子聚集体形成。 非润湿涂层的前体可以在高于衬底的较高温度下流入室中。 非润湿涂层可以在种子层上。 种子层的外部可以具有比内部更高浓度的水分子或更大的密度。 外部部分可以以高于内部部分的比例的分压水与分压基质前体的比例沉积。 氧等离子体可以施加到外表面上的种子层,并且非润湿涂层可以施加在种子层上。
    • 10. 发明申请
    • Fabrication of nanoscale thermoelectric devices
    • 纳米级热电装置的制造
    • US20050060884A1
    • 2005-03-24
    • US10666787
    • 2003-09-19
    • Yoshimasa OkamuraTimothy KohlerMamoru Miyawaki
    • Yoshimasa OkamuraTimothy KohlerMamoru Miyawaki
    • H01L35/32H01L35/34H05K3/02H05K3/20
    • H01L35/34H01L35/32Y10T29/49128Y10T29/49155Y10T29/49194
    • The present invention concerns a method for fabricating a nanowire thermoelectric device comprising the step of providing a substrate upon which to form nanowires. The substrate comprises substrate electrodes passing from a top exposed surface of the substrate to a bottom exposed surface of the substrate. Another step involves forming a first electrode pattern, which forms first and second electrically connected groups of substrate electrodes, on the bottom surface of the substrate. A p-type nanowire is then formed on the substrate by activating the first group of substrate electrodes during p-type material deposition. Similarly, a n-type nanowire is formed by activating the second group of substrate electrodes during n-type material deposition. And top electrodes are formed to connect the p-type and the n-type nanowires and a second electrode pattern is formed on the bottom side of the substrate to replace the first electrode pattern to form a thermocouple.
    • 本发明涉及一种制造纳米线热电装置的方法,包括提供形成纳米线的基底的步骤。 衬底包括从衬底的顶部暴露表面通过衬底的底部暴露表面的衬底电极。 另一步骤包括形成在衬底的底表面上形成第一和第二电连接的衬底电极组的第一电极图案。 然后通过在p型材料沉积期间激活第一组衬底电极在衬底上形成p型纳米线。 类似地,在n型材料沉积期间通过激活第二组衬底电极形成n型纳米线。 并且形成顶电极以连接p型和n型纳米线,并且在衬底的底侧上形成第二电极图案以替换第一电极图案以形成热电偶。