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    • 1. 发明授权
    • Flat panel display with spaced apart gate emitter openings
    • 具有间隔开的栅极发射极开口的平板显示器
    • US06379572B1
    • 2002-04-30
    • US09585984
    • 2000-06-02
    • Kazuo KikuchiShinji Kubota
    • Kazuo KikuchiShinji Kubota
    • H01J900
    • H01J9/025
    • A method is provided for manufacturing a flat panel display in which a baseplate has a conductive row electrode deposited on it followed by an insulator. A conductive gate electrode is deposited over the insulator and a soft mask material is deposited over the conductive gate electrode. Microspheres are deposited on the soft mask material and an isotropic etch uses the microspheres as a mask to etch the soft mask material to form soft mask portions under the microspheres. The microspheres are removed and a hard mask material is deposited over the soft mask portions. The hard mask material is processed and chemical mechanical polished down to the soft mask portions which are removed by etching to leave a hard mask which is used by anisotropic etch process to form gate holes in the gate electrode. The gate holes are used to form emitter cavities into which emitters are deposited.
    • 提供了一种用于制造平板显示器的方法,其中底板具有沉积在其上的导电行电极,随后是绝缘体。 在绝缘体上沉积导电栅电极,并且在导电栅电极上沉积软掩模材料。 微球沉积在软掩模材料上,并且各向同性蚀刻使用微球作为掩模来蚀刻软掩模材料以在微球下形成软掩模部分。 去除微球,并在软掩模部分上沉积硬掩模材料。 硬掩模材料被处理并化学机械抛光到软掩模部分,其通过蚀刻去除以留下通过各向异性蚀刻工艺用于在栅电极中形成栅极孔的硬掩模。 栅极孔用于形成放射器沉积到其中的发射器腔。
    • 2. 发明授权
    • Color cathode field emission device, cold cathode field emission display, and process for the production thereof
    • 彩色阴极场发射装置,冷阴极场发射显示器及其制造方法
    • US06297587B1
    • 2001-10-02
    • US09357367
    • 1999-07-20
    • Kazuo KikuchiShinji Kubota
    • Kazuo KikuchiShinji Kubota
    • H01J902
    • H01J9/025H01J1/3042
    • A process for the production of a cold cathode field emission device comprising the steps of; (A) forming a patterned electrode layer on a dielectric supporting substrate, (B) forming an insulating interlayer on the dielectric supporting substrate and the electrode layer, (C) forming a gate electrode constituted of a first conductive layer on the insulating interlayer, (D) forming an opening portion which penetrates through at least the insulating interlayer and has a bottom portion where the electrode layer is exposed, (E) forming a side-wall of an insulating material on the side wall of the opening portion, to decrease the opening portion in diameter, (F) forming a second conductive layer on the entire surface including the inside of the opening portion by a physical or chemical vapor deposition method, (G) etching back the second conductive layer to form an emitter electrode shaped in the form of a column and constituted of the second conductive layer in the opening portion, and (H) removing at least an upper portion of the side-wall.
    • 一种制造冷阴极场致发射器件的方法,包括以下步骤: (A)在电介质支撑基板上形成图案化电极层,(B)在电介质支撑基板和电极层上形成绝缘中间层,(C)形成由绝缘中间层上的第一导电层构成的栅电极( D)形成至少穿过绝缘中间层并具有露出电极层的底部的开口部分,(E)在开口部分的侧壁上形成绝缘材料的侧壁,以减少 (F)通过物理或化学气相沉积方法在包括开口部分的内部的整个表面上形成第二导电层,(G)蚀刻回第二导电层以形成形成在第二导电层中的发射极电极 并且由开口部分中的第二导电层构成的列的形式,和(H)至少去除侧壁的上部。
    • 9. 发明授权
    • Electrophotography apparatus
    • 电子照相设备
    • US06308025B1
    • 2001-10-23
    • US09633821
    • 2000-08-07
    • Tadashi OkanoTetsuji TakegoshiKazuo KikuchiToru HanashimaKazuhiro Wakamatsu
    • Tadashi OkanoTetsuji TakegoshiKazuo KikuchiToru HanashimaKazuhiro Wakamatsu
    • G03F1500
    • G03G15/00
    • Two pairs of legs are fitted under two side plates of an electrophotography apparatus, respectively. The two legs in one pair fitted under one of the side plates are disposed on either side of and are spaced from a point which is a cross point of a line joining these two legs, and a line perpendicular to this line, which perpendicular line passes through a projected point obtained by projecting the center of gravity of the electrophotography apparatus onto a horizontal plane on which the apparatus is set up. The two legs in the pair fitted under the other one of the side plates are disposed on either side of and are spaced from a point which is a cross point of a line passing these two legs and a line perpendicular to this line, which perpendicular line passes through the projected point of the center of gravity. The ratio of a shorter distance to a longer distance, of two distances: one between the two legs in a pair and the other between the two legs in the other pair is set to a value of 1/5 to 1/3. With such a arrangement, a defect in an image caused by a distortion in said side plates, due to a position change in the center of gravity of the electrophotography apparatus can be prevented.
    • 两对腿分别安装在电子照相设备的两个侧板下方。 安装在一个侧板之下的一对中的两条腿设置在与连接这两条腿的线的交叉点的一侧上的一侧上,并且与垂直于该直线的线垂直的线 通过将电子照相设备的重心投影到设置有该设备的水平平面上而获得的投影点。 配对在另一个侧板下方的两条腿设置在通过这两条腿的线的交叉点和垂直于该线的一条线的任一侧上并与之隔开,该垂直线 穿过重心的投影点。 两个距离之间的较短距离与较长距离的比例:一对中的两条腿之间的比例和另一对中的两条腿之间的比例设置为1/5至1/3的值。 通过这样的布置,可以防止由于电子照相设备的重心位置变化而导致的所述侧板的变形引起的图像缺陷。