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    • 1. 发明申请
    • ULTRASONIC CLEANING APPARATUS AND ULTRASONIC CLEANING METHOD
    • 超声波清洗装置和超声波清洗方法
    • US20130312787A1
    • 2013-11-28
    • US13991596
    • 2012-05-28
    • Kazunari Suzuki
    • Kazunari Suzuki
    • B08B3/12H01L21/67
    • B08B3/12H01L21/02052H01L21/02057H01L21/67057
    • There are provided an ultrasonic cleaning apparatus and an ultrasonic cleaning method capable of suppressing occurrence of damage on a substrate to be cleaned and capable of performing cleaning at a high cleaning level for highly precise substrates and the like used in an electronics industry. Occurrence of damage on the substrate to be cleaned is suppressed by holding an object to be cleaned so as to be positioned out of a region where perpendiculars extend from an oscillating surface of an ultrasonic transducer to a liquid surface (an ultrasonic-irradiated region) under and in the vicinity of the liquid surface of a cleaning solution, exciting a capillary wave on a surface of the cleaning solution by an ultrasonic wave, and separating particulate contamination of the object to be cleaned by an acoustic pressure generated by the capillary wave without irradiating the object to be cleaned directly with the ultrasonic wave.
    • 提供了一种超声波清洗装置和超声波清洗方法,其能够抑制要清洗的基板上的损坏的发生,并且能够以高清洁水平执行用于电子工业中使用的高精度基板等的清洁。 通过保持要清洁的物体以使其位于垂直于超声波换能器的振动面向液面(超声波照射区域)的垂直方向延伸的区域以外,可以抑制被清洗基板上的损伤的发生 并且在清洗液的液面附近,通过超声波在清洗液的表面上激发毛细管波,并用毛细管波形产生的声压分离待清洁物体的微粒污染物,而不照射 用超声波直接清洗的物体。
    • 2. 发明授权
    • Ultrasonic cleaning device
    • 超声波清洗装置
    • US08448655B2
    • 2013-05-28
    • US12451568
    • 2009-08-19
    • Kazunari SuzukiKi Han
    • Kazunari SuzukiKi Han
    • B08B3/12
    • H01L21/67057B08B3/12H01L21/67017H01L21/67051Y10S134/902
    • An ultrasonic cleaning device is provided which can easily cope with an increase in a diameter of a cleaning surface of an object to be cleaned. An ultrasonic cleaning device according to the present invention includes an ultrasonic transducer 13 for providing ultrasonic energy to a propagation liquid 15, an ultrasonic propagation tube 12 for flowing the propagation liquid provided with the ultrasonic energy by the ultrasonic transducer, a holding mechanism disposed below the ultrasonic propagation tube for holding an object to be cleaned 21, and a cleaning liquid supply mechanism for supplying a cleaning liquid to a cleaning surface of the object to be cleaned held by the holding mechanism, and the ultrasonic propagation tube 12 is disposed so that a side surface thereof may contact a liquid film 19 of the cleaning liquid formed on the cleaning surface by supplying the cleaning liquid to the cleaning surface by the cleaning liquid supply mechanism.
    • 提供一种可以容易地应对待清洁物体的清洁表面的直径增加的超声波清洗装置。 根据本发明的超声波清洗装置包括用于向传播液体15提供超声能量的超声波换能器13,用于使由超声波换能器提供超声能量的传播液体流过的超声波传播管12, 用于保持待清洁物体21的超声波传播管,以及用于将洗涤液供给到由保持机构保持的待清洁物体的清洁面的清洗液供给机构,超声波传播管12配置成 其侧表面可以通过由清洗液供给机构向清洗表面供给清洗液体而与形成在清洁表面上的清洗液体的液膜19接触。
    • 4. 发明申请
    • ETHERNET LINK AGGREGATION
    • 以太网链路聚合
    • US20100215042A1
    • 2010-08-26
    • US12393727
    • 2009-02-26
    • Masakazu SatoSatoshi NakajimaKazunari Suzuki
    • Masakazu SatoSatoshi NakajimaKazunari Suzuki
    • H04L12/56
    • H04L45/245H04L12/413H04L45/745H04L49/351H04L61/2092H04L69/22H04W84/18Y02D50/30
    • A system and method of transmitting data across a link aggregation group, the method comprises: receiving a packet sourced from a client having a MAC header and an IP header at an input port of a first upstream switch for transmission from the first upstream switch along a link aggregation and at least two down stream switches to a server, said MAC header having a Destination MAC address and a Source MAC address, and the IP header having a Source IP address and a Destination IP address; changing the destination MAC address from a down stream destination to another down stream destination; sending the packet through a first link aggregation to a first down stream switch; using a hash calculation for changing the Source MAC address of the packet in the first down stream switch to a new address; sending the packet through a second link aggregation to a second down stream switch having an address; and sending the packet from the second down stream switch to a server having a server address.
    • 一种通过链路聚合组发送数据的系统和方法,所述方法包括:从第一上游交换机的输入端口接收来自具有MAC报头和IP报头的客户端的分组,以从第一上游交换机沿着 链路聚合和至少两个下行切换到服务器,所述MAC报头具有目的地MAC地址和源MAC地址,所述IP报头具有源IP地址和目的地IP地址; 将目的MAC地址从下行目的地改变到另一下行目的地; 通过第一链路聚合将分组发送到第一下行链路交换机; 使用哈希计算来将第一下行切换中的分组的源MAC地址改变为新的地址; 通过第二链路聚合将分组发送到具有地址的第二下行交换机; 并将分组从第二下行交换机发送到具有服务器地址的服务器。