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    • 5. 发明授权
    • Acceleration sensor and acceleration apparatus using acceleration sensor
    • 加速度传感器和使用加速度传感器的加速装置
    • US06382026B1
    • 2002-05-07
    • US09463140
    • 2000-04-12
    • Hirofumi TajikaKazunari NishiharaKoji NomuraMotoyuki TajiYoshihiro Tomita
    • Hirofumi TajikaKazunari NishiharaKoji NomuraMotoyuki TajiYoshihiro Tomita
    • G01P1509
    • G01P1/023G01P1/02G01P15/0922
    • An acceleration sensor having a well controlled dispersion in the detection, characteristics and improved detection characteristics in the low frequency detection comprises a first piezoelectric plate (11), a second piezoelectric plate (12) bonded to the first piezoelectric plate (11) by direct bonding, a first external electrode (13) provided on the main surface of the first piezoelectric plate (11) and a second external electrode (14) provided on the main surface of the second piezoelectric plate (12). The first piezoelectric plate (11) and the second piezoelectric plate (12) are bonded together with their polarization axes reversed to each other. Appearance of the acceleration sensor resembles to a letter “L” in the cross section; thickness of the supporting section (15) is greater than that of the rest part (free vibration section).
    • 具有在低频检测中的检测,特性和改进的检测特性中良好控制的色散的加速度传感器包括:第一压电板(11),通过直接接合结合到第一压电板(11)的第二压电板(12) ,设置在第一压电板(11)的主表面上的第一外部电极(13)和设置在第二压电板(12)的主表面上的第二外部电极(14)。 第一压电板(11)和第二压电板(12)以它们的偏振轴彼此相反地接合在一起。 加速度传感器的外观类似于截面中的字母“L”; 支撑部分(15)的厚度大于其余部分(自由振动部分)的厚度。