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1. 发明授权

US07164179B2 Angular-velocity sensor 有权
标题翻译：角速度传感器
公开(公告)号：US07164179B2
公开(公告)日：2007-01-16
申请号：US10495926
申请日：2003-08-06
申请人： Tsutomu Nakanishi , Hirofumi Tajika , Michihiko Hayashi , Satoshi Ouchi
发明人： Tsutomu Nakanishi , Hirofumi Tajika , Michihiko Hayashi , Satoshi Ouchi
IPC分类号： H01L27/14
CPC分类号： G01C19/5607
摘要： An angular velocity sensor includes a tuning-fork-shaped substrate (1), drivers (110) that are provided on the arms forming a tuning fork and vibrate the arms; monitors (150) for detecting vibrations generated by the drivers (110); and detectors (120) for detecting displacement of vibrations made in application of an angular velocity. The drivers (110), the monitors (150), and the detectors (120) are made of a lower electrode layer, a piezoelectric thin film, and an upper electrode layer formed on the arms. The outer peripheral edge of the piezoelectric thin film is shaped like a step having at least one flat portion. The flat portion along the outer peripheral edge has no upper electrode layer formed thereon. This structure prevents short circuits between the lower electrode layer and the upper electrode layer.
摘要翻译：角速度传感器包括音叉形基板（1），驱动器（110），其设置在形成音叉的臂上并使臂振动; 监视器（150），用于检测由驾驶员（110）产生的振动; 以及用于检测施加角速度的振动的位移的检测器（120）。驱动器（110），监视器（150）和检测器（120）由形成在臂上的下电极层，压电薄膜和上电极层制成。压电薄膜的外周缘成形为具有至少一个平坦部分的台阶。沿着外周边缘的平坦部分没有形成上电极层。这种结构防止了下电极层和上电极层之间的短路。

2. 发明授权

US06984572B2 Method for manufacturing electronic component 有权
标题翻译：电子元件制造方法
公开(公告)号：US06984572B2
公开(公告)日：2006-01-10
申请号：US10473980
申请日：2003-01-24
申请人： Masaya Nakatani , Michihiko Hayashi , Hirofumi Tajika
发明人： Masaya Nakatani , Michihiko Hayashi , Hirofumi Tajika
IPC分类号： H01L21/301
CPC分类号： G01C19/5607 , H01L21/3043
摘要： An electronic circuit is manufactured by the following method. Elements are formed on a front surface of a substrate, and then, a recess is formed around each of the elements in the front surface of the substrate. Then, a portion of the substrate is removed from a back surface of the substrate until reaching the bottom of the recess. In the method, the elements are separated at once by removing the portion of the substrate from the back surface, and thus, the elements are manufactured efficiently.
摘要翻译：通过以下方法制造电子电路。元件形成在基板的前表面上，然后在基板的前表面中的每个元件周围形成凹部。然后，将基板的一部分从基板的背面去除，直至到达凹部的底部。在该方法中，通过从背面去除基板的一部分，元件被分开，因此有效地制造元件。

3. 发明申请

US20050000934A1 Method for manufacturing resonant device 失效
标题翻译：制造谐振装置的方法
公开(公告)号：US20050000934A1
公开(公告)日：2005-01-06
申请号：US10494640
申请日：2003-08-20
申请人： Masaya Nakatani , Hirofumi Tajika
发明人： Masaya Nakatani , Hirofumi Tajika
IPC分类号： G01C19/56 , G01C19/5628 , H01L41/08 , H01L41/22 , H01L41/23 , H01L41/332 , H03H3/02 , H03H9/21 , H01B13/00
CPC分类号： G01C19/5628 , G01C19/5621 , H03H9/21 , H03H2003/026
摘要： A piezoelectric member and an electrode are formed over a silicon substrate. The piezoelectric member and the electrode are patterned by photolithography. The silicon substrate is etched to form a body. A protective film is formed on at least one surface of the body. Another surface having no protective film thereon is etched to obtain a resonant device. The body is etched in its thickness direction accurately while a resonance frequency of the body is measured. The manufacturing processes allow the resonance frequency and a gap frequency of the resonant device to be adjusted to predetermined values.
摘要翻译：在硅衬底上形成压电元件和电极。压电元件和电极通过光刻图案化。硅衬底被蚀刻以形成体。在身体的至少一个表面上形成保护膜。在其上没有保护膜的另一表面被蚀刻以获得谐振装置。在测量身体的共振频率的同时，精确地蚀刻身体的厚度方向。制造过程允许共振频率和谐振装置的间隙频率被调节到预定值。

4. 发明授权

US06530276B2 Acceleration sensor and acceleration apparatus using acceleration sensor 失效
公开(公告)号：US06530276B2
公开(公告)日：2003-03-11
申请号：US10081635
申请日：2002-02-22
申请人： Hirofumi Tajika , Kazunari Nishihara , Koji Nomura , Motoyuki Taji , Yoshihiro Tomita
发明人： Hirofumi Tajika , Kazunari Nishihara , Koji Nomura , Motoyuki Taji , Yoshihiro Tomita
IPC分类号： G01P1509
CPC分类号： G01P1/023 , G01P1/02 , G01P15/0922
摘要： An acceleration sensor having a well controlled dispersion in the detection characteristics and improved detection characteristics in the low frequency detection comprises a first piezoelectric plate (11), a second piezoelectric plate (12) bonded to the first piezoelectric plate (11) by direct bonding, a first external electrode (13) provided on the main surface of the first piezoelectric plate (11) and a second external electrode (14) provided on the main surface of the second piezoelectric plate (12). The first piezoelectric plate (11) and the second piezoelectric plate (12) are bonded together with their polarization axes reversed to each other. Appearance of the acceleration sensor resembles to a letter “L” in the cross section; thickness of the supporting section (15) is greater than that of the rest part (free vibration section).

5. 发明授权

US06382026B1 Acceleration sensor and acceleration apparatus using acceleration sensor 有权
标题翻译：加速度传感器和使用加速度传感器的加速装置
公开(公告)号：US06382026B1
公开(公告)日：2002-05-07
申请号：US09463140
申请日：2000-04-12
申请人： Hirofumi Tajika , Kazunari Nishihara , Koji Nomura , Motoyuki Taji , Yoshihiro Tomita
发明人： Hirofumi Tajika , Kazunari Nishihara , Koji Nomura , Motoyuki Taji , Yoshihiro Tomita
IPC分类号： G01P1509
CPC分类号： G01P1/023 , G01P1/02 , G01P15/0922
摘要： An acceleration sensor having a well controlled dispersion in the detection, characteristics and improved detection characteristics in the low frequency detection comprises a first piezoelectric plate (11), a second piezoelectric plate (12) bonded to the first piezoelectric plate (11) by direct bonding, a first external electrode (13) provided on the main surface of the first piezoelectric plate (11) and a second external electrode (14) provided on the main surface of the second piezoelectric plate (12). The first piezoelectric plate (11) and the second piezoelectric plate (12) are bonded together with their polarization axes reversed to each other. Appearance of the acceleration sensor resembles to a letter “L” in the cross section; thickness of the supporting section (15) is greater than that of the rest part (free vibration section).
摘要翻译：具有在低频检测中的检测，特性和改进的检测特性中良好控制的色散的加速度传感器包括：第一压电板（11），通过直接接合结合到第一压电板（11）的第二压电板（12），设置在第一压电板（11）的主表面上的第一外部电极（13）和设置在第二压电板（12）的主表面上的第二外部电极（14）。第一压电板（11）和第二压电板（12）以它们的偏振轴彼此相反地接合在一起。加速度传感器的外观类似于截面中的字母“L”; 支撑部分（15）的厚度大于其余部分（自由振动部分）的厚度。

6. 发明授权

US07493818B2 Drop shock measurement system and acceleration sensor element used in the same 失效
标题翻译：跌落震动测量系统和加速度传感器元件相同
公开(公告)号：US07493818B2
公开(公告)日：2009-02-24
申请号：US10769263
申请日：2004-01-30
申请人： Kazunari Nishihara , Hirofumi Tajika , Koji Nomura , Motoyuki Toji
发明人： Kazunari Nishihara , Hirofumi Tajika , Koji Nomura , Motoyuki Toji
IPC分类号： G01D21/00
CPC分类号： G01P15/0891 , G01N2291/02827 , G01P15/0922 , G01P15/097
摘要： The drop impact measuring system has i) a plurality of bimorph-type acceleration sensor containing a plurality of free vibrating sections each of which has individual draw-out electrodes; ii) a switch section for selecting output from the bimorph-type acceleration sensors; iii) an amplifying circuit for amplifying a signal applied via the switch section from the acceleration sensors; and iv) a logic circuit for logically evaluating the output from the amplifying circuit and controlling the switch section according to the result acquired from the logical evaluation.
摘要翻译：跌落冲击测量系统具有i）多个双压电晶片式加速度传感器，其包含多个自由振动部分，每个自由振动部分具有各自的引出电极; ii）用于选择双压电晶片式加速度传感器的输出的开关部分; iii）放大电路，用于放大从加速度传感器经由开关部分施加的信号; 以及iv）用于逻辑地评估来自放大电路的输出并根据从逻辑评估获得的结果来控制开关部分的逻辑电路。

7. 发明授权

US07275412B2 Drop shock measurement system and acceleration sensor element used in the same 失效
标题翻译：跌落震动测量系统和加速度传感器元件相同
公开(公告)号：US07275412B2
公开(公告)日：2007-10-02
申请号：US11170333
申请日：2005-06-29
申请人： Kazunari Nishihara , Hirofumi Tajika , Koji Nomura , Motoyuki Toji
发明人： Kazunari Nishihara , Hirofumi Tajika , Koji Nomura , Motoyuki Toji
IPC分类号： G01N19/00
CPC分类号： G01P15/0891 , G01N2291/02827 , G01P15/0922 , G01P15/097
摘要： The drop impact measuring system has i) a plurality of bimorph-type acceleration sensor containing a plurality of free vibrating sections each of which has individual draw-out electrodes; ii) a switch section for selecting output from the bimorph-type acceleration sensors; iii) an amplifying circuit for amplifying a signal applied via the switch section from the acceleration sensors; and iv) a logic circuit for logically evaluating the output from the amplifying circuit and controlling the switch section according to the result acquired from the logical evaluation.
摘要翻译：跌落冲击测量系统具有i）多个双压电晶片式加速度传感器，其包含多个自由振动部分，每个自由振动部分具有各自的引出电极; ii）用于选择双压电晶片式加速度传感器的输出的开关部分; iii）放大电路，用于放大从加速度传感器经由开关部分施加的信号; 以及iv）用于逻辑地评估来自放大电路的输出并根据从逻辑评估获得的结果来控制开关部分的逻辑电路。

8. 发明授权

US07083740B2 Method for manufacturing resonant device 失效
标题翻译：制造谐振装置的方法
公开(公告)号：US07083740B2
公开(公告)日：2006-08-01
申请号：US10494640
申请日：2003-08-20
申请人： Masaya Nakatani , Hirofumi Tajika
发明人： Masaya Nakatani , Hirofumi Tajika
IPC分类号： B34C1/22
CPC分类号： G01C19/5628 , G01C19/5621 , H03H9/21 , H03H2003/026
摘要： A piezoelectric member and an electrode are formed over a silicon substrate. The piezoelectric member and the electrode are patterned by photolithography. The silicon substrate is etched to form a body. A protective film is formed on at least one surface of the body. Another surface having no protective film thereon is etched to obtain a resonant device. The body is etched in its thickness direction accurately while a resonance frequency of the body is measured. The manufacturing processes allow the resonance frequency and a gap frequency of the resonant device to be adjusted to predetermined values.
摘要翻译：在硅衬底上形成压电元件和电极。压电元件和电极通过光刻图案化。硅衬底被蚀刻以形成体。在身体的至少一个表面上形成保护膜。在其上没有保护膜的另一表面被蚀刻以获得谐振装置。在测量身体的共振频率的同时，精确地蚀刻身体的厚度方向。制造过程允许共振频率和谐振装置的间隙频率被调节到预定值。

9. 发明授权

US07005304B2 Micro-moving device and its manufacturing method 有权
标题翻译：微动装置及其制造方法
公开(公告)号：US07005304B2
公开(公告)日：2006-02-28
申请号：US10362913
申请日：2002-06-26
申请人： Masaya Nakatani , Katsuya Morinaka , Katsumasa Miki , Hirofumi Tajika
发明人： Masaya Nakatani , Katsuya Morinaka , Katsumasa Miki , Hirofumi Tajika
IPC分类号： H01L21/00
CPC分类号： G11B5/5552 , Y10S438/928
摘要： A micro-transfer device for fine positioning is employed typically in recording and playback apparatus for recording disks. Voltage is stably supplied to an expandable element which displaces the position of a recording head by applying voltage. An end different from one end connected to a base, where the recording head is mounted, is fixed to a fixing substrate for preventing changes in dimensions of the expandable element. An external electrode connection for supplying voltage to the expandable element is provided in an area on the fixing substrate.
摘要翻译：用于精细定位的微转移装置通常用于记录盘的记录和重放装置。电压被稳定地供给到通过施加电压来移位记录头的位置的可扩展元件。与安装有记录头的底座连接的一端不同的端部固定到固定基板上，以防止可扩张元件的尺寸变化。用于向可膨胀元件提供电压的外部电极连接设置在固定基板上的区域中。

10. 发明申请

US20050284240A1 Drop shock measurement system and acceleration sensor element used in the same 失效
标题翻译：跌落震动测量系统和加速度传感器元件相同
公开(公告)号：US20050284240A1
公开(公告)日：2005-12-29
申请号：US11170333
申请日：2005-06-29
申请人： Kazunari Nishihara , Hirofumi Tajika , Koji Nomura , Motoyuki Toji
发明人： Kazunari Nishihara , Hirofumi Tajika , Koji Nomura , Motoyuki Toji
IPC分类号： G01N21/00 , G01P15/08 , G01P15/09 , G01P15/097
CPC分类号： G01P15/0891 , G01N2291/02827 , G01P15/0922 , G01P15/097
摘要： The drop impact measuring system has i) a plurality of bimorph-type acceleration sensor containing a plurality of free vibrating sections each of which has individual draw-out electrodes; ii) a switch section for selecting output from the bimorph-type acceleration sensors; iii) an amplifying circuit for amplifying a signal applied via the switch section from the acceleration sensors; and iv) a logic circuit for logically evaluating the output from the amplifying circuit and controlling the switch section according to the result acquired from the logical evaluation.
摘要翻译：跌落冲击测量系统具有i）多个双压电晶片式加速度传感器，其包含多个自由振动部分，每个自由振动部分具有各自的引出电极; ii）用于选择双压电晶片式加速度传感器的输出的开关部分; iii）放大电路，用于放大从加速度传感器经由开关部分施加的信号; 以及iv）用于逻辑地评估来自放大电路的输出并根据从逻辑评估获得的结果来控制开关部分的逻辑电路。

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