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1. 发明授权

US07379172B2 Method and apparatus for inspection of optical component 失效
标题翻译：光学部件检查方法和装置
公开(公告)号：US07379172B2
公开(公告)日：2008-05-27
申请号：US11319172
申请日：2005-12-28
申请人： Kazumasa Takata , Hidetoshi Utsuro , Tomotaka Furuta , Takashi Urashima
发明人： Kazumasa Takata , Hidetoshi Utsuro , Tomotaka Furuta , Takashi Urashima
IPC分类号： G01N21/00
CPC分类号： G01M11/0271
摘要： An inspection method for evaluating the performance of an optical component at high precision is provided. According to the inspection method, a first light beam 24 and a second light beam 26 both having different phases are generated from light which has passed through an optical component 18, and are interfered with each other to form an interference region 30. A linear line 66, a linear line 70 and linear lines 72 are set within the interference region 30 so as to determine a distribution of light intensities on each of the linear lines 72. Then, a frequency corresponding to the maximal light intensity is determined. Further, an approximated liner line or an approximated curved line is determined from a plurality of frequencies determined for each of the linear line 72. Then, the aberration of the optical component is evaluated based on the coefficient of the approximated linear or curved line.
摘要翻译：提供了一种用于高精度地评估光学部件的性能的检查方法。根据检查方法，由已经通过光学部件18的光产生具有不同相位的第一光束24和第二光束26，并且彼此干涉以形成干涉区域30。线性线66，线性线70和线性线72设置在干涉区域30内，以便确定每个线性线72上的光强度的分布。然后，确定与最大光强度对应的频率。此外，根据为每个线性线72确定的多个频率来确定近似线性线或近似曲线。然后，基于近似线性或曲线的系数来评价光学部件的像差。

2. 发明授权

US07821626B2 Angle measuring device and method 有权
标题翻译：角度测量装置及方法
公开(公告)号：US07821626B2
公开(公告)日：2010-10-26
申请号：US11994077
申请日：2006-09-20
申请人： Takashi Urashima , Kazumasa Takata , Tomotaka Furuta , Hidetoshi Utsuro
发明人： Takashi Urashima , Kazumasa Takata , Tomotaka Furuta , Hidetoshi Utsuro
IPC分类号： G01C1/00
CPC分类号： G01B11/26
摘要： By diffracting light emitted from a collimator lens into lights of different orders by a transmission diffraction grating, applying the diffracted lights to a flat surface of an object, forming the light that has been reflected on the flat surface of the object and thereafter retransmitted through the transmission diffraction grating into an image in a position located apart from the optical axis of the outgoing light and measuring the angle of the object with respect to the optical axis of the collimator lens using the image location and the order of the light formed as the image, the angle in a wide range can be measured with a high resolving power.
摘要翻译：通过透射衍射光栅将从准直透镜发射的光衍射成不同顺序的光，将衍射光施加到物体的平坦表面，形成已被反射在物体的平坦表面上的光，然后通过透射衍射光栅转换成位于远离出射光的光轴的位置的图像，并使用图像位置和形成为图像的光的顺序来测量物体相对于准直透镜的光轴的角度，可以以高分辨能力测量宽范围内的角度。

3. 发明申请

US20090231573A1 ANGLE MEASURING DEVICE AND METHOD 有权
标题翻译：角度测量装置和方法
公开(公告)号：US20090231573A1
公开(公告)日：2009-09-17
申请号：US11994077
申请日：2006-09-20
申请人： Takashi Urashima , Kazumasa Takata , Tomotaka Furuta , Hidetoshi Utsuro
发明人： Takashi Urashima , Kazumasa Takata , Tomotaka Furuta , Hidetoshi Utsuro
IPC分类号： G01B11/26
CPC分类号： G01B11/26
摘要： By diffracting light emitted from a collimator lens into lights of different orders by a transmission diffraction grating, applying the diffracted lights to a flat surface of an object, forming the light that has been reflected on the flat surface of the object and thereafter retransmitted through the transmission diffraction grating into an image in a position located apart from the optical axis of the outgoing light and measuring the angle of the object with respect to the optical axis of the collimator lens using the image location and the order of the light formed as the image, the angle in a wide range can be measured with a high resolving power.
摘要翻译：通过透射衍射光栅将从准直透镜发射的光衍射成不同顺序的光，将衍射光施加到物体的平坦表面，形成已被反射在物体的平坦表面上的光，然后通过透射衍射光栅转换成位于远离出射光的光轴的位置的图像，并使用图像位置和形成为图像的光的顺序来测量物体相对于准直透镜的光轴的角度，可以以高分辨能力测量宽范围内的角度。

4. 发明申请

US20060192977A1 Method and apparatus for inspection of optical component 失效
标题翻译：光学部件检查方法和装置
公开(公告)号：US20060192977A1
公开(公告)日：2006-08-31
申请号：US11319172
申请日：2005-12-28
申请人： Kazumasa Takata , Hidetoshi Utsuro , Tomotaka Furuta , Takashi Urashima
发明人： Kazumasa Takata , Hidetoshi Utsuro , Tomotaka Furuta , Takashi Urashima
IPC分类号： G01B11/02 , G01B9/02
CPC分类号： G01M11/0271
摘要： An inspection method for evaluating the performance of an optical component at high precision is provided. According to the inspection method, a first light beam 24 and a second light beam 26 both having different phases are generated from light which has passed through an optical component 18, and are interfered with each other to form an interference region 30. A linear line 66, a linear line 70 and linear lines 72 are set within the interference region 30 so as to determine a distribution of light intensities on each of the linear lines 72. Then, a frequency corresponding to the maximal light intensity is determined. Further, an approximated liner line or an approximated curved line is determined from a plurality of frequencies determined for each of the linear line 72. Then, the aberration of the optical component is evaluated based on the coefficient of the approximated linear or curved line.
摘要翻译：提供了一种用于高精度地评估光学部件的性能的检查方法。根据检查方法，由已经通过光学部件18的光产生具有不同相位的第一光束24和第二光束26，并且彼此干涉以形成干涉区域30。线性线66，线性线70和线性线72设置在干涉区域30内，以便确定每个线性线72上的光强度的分布。然后，确定与最大光强度对应的频率。此外，根据为每个线性线72确定的多个频率来确定近似线性线或近似曲线。然后，基于近似线性或曲线的系数来评价光学部件的像差。

5. 发明申请

US20120044501A1 FILM THICKNESS MEASURING APPARATUS USING INTERFERENCE AND FILM THICKNESS MEASURING METHOD USING INTERFERENCE 有权
标题翻译：使用干涉的薄膜厚度测量装置和使用干涉的薄膜厚度测量方法
公开(公告)号：US20120044501A1
公开(公告)日：2012-02-23
申请号：US13266832
申请日：2010-12-22
申请人： Hirotoshi Oikaze , Takashi Urashima
发明人： Hirotoshi Oikaze , Takashi Urashima
IPC分类号： G01B11/06
CPC分类号： G01B11/0625 , G01B9/02025 , G01B9/02088 , G01B9/0209 , G01B11/0675
摘要： With a film thickness measuring apparatus of the present invention, a substrate having a transparent film formed on its front surface is placed on a placement unit. A half mirror divides light from a light source such that divided light beams are emitted to the front surface of the substrate and to a reference plane, and overlays reflected light from the front surface of the substrate and reflected light from the reference plane on each other to form interfering light. The interfering light is imaged by an imager. Based on the imaging result, the film thickness of the transparent film is calculated by an arithmetic unit. An optical filter with which an intensity spectrum of transmitted light exhibits a plurality of peaks, the optical filter is disposed between the light source and the half mirror.
摘要翻译：利用本发明的膜厚测量装置，将在其表面上形成有透明膜的基板放置在放置单元上。半反射镜将来自光源的光分开，使得分离的光束被发射到基板的前表面和参考平面，并且覆盖来自基板的前表面的反射光和彼此相对于参考平面的反射光以形成干扰光。干涉光被成像仪成像。基于成像结果，通过运算单元计算透明膜的膜厚。一种滤光器，透射光的强度谱具有多个峰，滤光器设置在光源和半反射镜之间。

6. 发明授权

US08294903B2 Surface shape measurement apparatus and method 有权
标题翻译：表面形状测量装置及方法
公开(公告)号：US08294903B2
公开(公告)日：2012-10-23
申请号：US12864760
申请日：2009-09-29
申请人： Hirotoshi Oikaze , Takashi Urashima
发明人： Hirotoshi Oikaze , Takashi Urashima
IPC分类号： G01B11/02
CPC分类号： G01B11/2441 , G01B9/02007 , G01B9/02069 , G01B9/02083 , G01B9/0209 , G01J2009/0234
摘要： The measurement accuracy of an apparatus for measuring the surface shape of an object utilizing a two-wavelength phase-shift interferometry is improved. A low-coherence light source, a plurality of wavelength filters with different transmission wavelengths, an angle control unit and an analysis unit are provided. When performing a two-wavelength phase shift method, the analysis unit detects the wavelength difference between two wavelengths, and corrects a calculated wavelength value and a calculated phase value of one of the wavelengths for preventing a fringe-order calculation error. Next, the angle of the wavelength filters is controlled for making the actual wavelength difference coincident with a designed value. Thus, the wavelength difference between the two wavelengths is continuously controlled to be constant, which enables measurements of surface shapes with high accuracy, even when there are wavelength fluctuations due to the temperature change or the time elapse.
摘要翻译：提高了利用双波长相移干涉法测量物体的表面形状的装置的测量精度。提供了低相干光源，具有不同透射波长的多个波长滤光器，角度控制单元和分析单元。当执行双波长相移方法时，分析单元检测两个波长之间的波长差，并校正计算的波长值和计算出的波长之一的相位值，以防止边缘阶计算误差。接下来，控制波长滤波器的角度，使实际波长差与设计值一致。因此，即使当由于温度变化或时间经过而导致波长波动时，两个波长之间的波长差被连续地控制为恒定，这使得能够高精度地测量表面形状。

7. 发明授权

US08735768B2 Laser welding apparatus 有权
标题翻译：激光焊接设备
公开(公告)号：US08735768B2
公开(公告)日：2014-05-27
申请号：US13466689
申请日：2012-05-08
申请人： Takashi Urashima , Shohei Aoki , Yasuhiro Kabetani
发明人： Takashi Urashima , Shohei Aoki , Yasuhiro Kabetani
IPC分类号： B23K26/00 , B23K26/06
CPC分类号： B23K26/26 , B23K26/032 , B23K26/083 , B23K31/125 , B23K2101/18 , G01B9/02004 , G01B9/02069 , G01B9/02091 , G01B11/22
摘要： A laser welding apparatus includes: a first optical element that coaxially emits, to a welded part, a laser beam emitted from a laser light source and an object beam having a different wavelength from the laser beam; a second optical element that causes the spot diameter of the object beam to be larger than the spot diameter of the laser beam on the welded part; an optical interferometer that emits the object beam to the first optical element, detects through the first optical element the object beam reflected on the welded part, and generates an electric signal based on the detected object beam; and a measuring unit that measures a penetration depth of the welded part based on the electric signal.
摘要翻译：激光焊接装置包括：第一光学元件，其同时向焊接部分发射从激光光源发射的激光束和与激光束具有不同波长的物体光束; 第二光学元件，其使物体光束的光斑直径大于焊接部分上的激光束的光斑直径; 向第一光学元件发射物体光束的光学干涉仪通过第一光学元件检测在焊接部分上反射的物体光束，并且基于检测到的物体光束产生电信号; 以及测量单元，其基于电信号测量焊接部件的穿透深度。

8. 发明授权

US08619263B2 Film thickness measuring apparatus using interference and film thickness measuring method using interference 有权
标题翻译：使用干涉的膜厚测量装置和使用干涉的膜厚测量方法
公开(公告)号：US08619263B2
公开(公告)日：2013-12-31
申请号：US13266832
申请日：2010-12-22
申请人： Hirotoshi Oikaze , Takashi Urashima
发明人： Hirotoshi Oikaze , Takashi Urashima
IPC分类号： G01B11/02
CPC分类号： G01B11/0625 , G01B9/02025 , G01B9/02088 , G01B9/0209 , G01B11/0675
摘要： With a film thickness measuring apparatus of the present invention, a substrate having a transparent film formed on its front surface is placed on a placement unit. A half mirror divides light from a light source such that divided light beams are emitted to the front surface of the substrate and to a reference plane, and overlays reflected light from the front surface of the substrate and reflected light from the reference plane on each other to form interfering light. The interfering light is imaged by an imager. Based on the imaging result, the film thickness of the transparent film is calculated by an arithmetic unit. An optical filter with which an intensity spectrum of transmitted light exhibits a plurality of peaks, the optical filter is disposed between the light source and the half mirror.
摘要翻译：利用本发明的膜厚测量装置，将在其表面上形成有透明膜的基板放置在放置单元上。半反射镜将来自光源的光分开，使得分离的光束被发射到基板的前表面和参考平面，并且覆盖来自基板的前表面的反射光和彼此相对于参考平面的反射光以形成干扰光。干涉光被成像仪成像。基于成像结果，通过运算单元计算透明膜的膜厚。一种滤光器，透射光的强度谱具有多个峰，滤光器设置在光源和半反射镜之间。

9. 发明申请

US20100309482A1 SURFACE SHAPE MEASUREMENT APPARATUS AND METHOD 有权
标题翻译：表面形状测量装置和方法
公开(公告)号：US20100309482A1
公开(公告)日：2010-12-09
申请号：US12864760
申请日：2009-09-29
申请人： Hirotoshi Oikaze , Takashi Urashima
发明人： Hirotoshi Oikaze , Takashi Urashima
IPC分类号： G01B11/30
CPC分类号： G01B11/2441 , G01B9/02007 , G01B9/02069 , G01B9/02083 , G01B9/0209 , G01J2009/0234
摘要： The measurement accuracy of an apparatus for measuring the surface shape of an object utilizing a two-wavelength phase-shift interferometry is improved. A low-coherence light source, a plurality of wavelength filters with different transmission wavelengths, an angle control unit and an analysis unit are provided. When performing a two-wavelength phase shift method, the analysis unit detects the wavelength difference between two wavelengths, and corrects a calculated wavelength value and a calculated phase value of one of the wavelengths for preventing a fringe-order calculation error. Next, the angle of the wavelength filters is controlled for making the actual wavelength difference coincident with a designed value. Thus, the wavelength difference between the two wavelengths is continuously controlled to be constant, which enables measurements of surface shapes with high accuracy, even when there are wavelength fluctuations due to the temperature change or the time elapse.
摘要翻译：提高了利用双波长相移干涉法测量物体的表面形状的装置的测量精度。提供了低相干光源，具有不同透射波长的多个波长滤光器，角度控制单元和分析单元。当执行双波长相移方法时，分析单元检测两个波长之间的波长差，并校正计算的波长值和计算出的波长之一的相位值，以防止边缘阶计算误差。接下来，控制波长滤波器的角度，使实际波长差与设计值一致。因此，即使当由于温度变化或时间经过而导致波长波动时，两个波长之间的波长差被连续地控制为恒定，这使得能够高精度地测量表面形状。

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