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    • 1. 发明授权
    • Method and apparatus for inspection of optical component
    • 光学部件检查方法和装置
    • US07379172B2
    • 2008-05-27
    • US11319172
    • 2005-12-28
    • Kazumasa TakataHidetoshi UtsuroTomotaka FurutaTakashi Urashima
    • Kazumasa TakataHidetoshi UtsuroTomotaka FurutaTakashi Urashima
    • G01N21/00
    • G01M11/0271
    • An inspection method for evaluating the performance of an optical component at high precision is provided. According to the inspection method, a first light beam 24 and a second light beam 26 both having different phases are generated from light which has passed through an optical component 18, and are interfered with each other to form an interference region 30. A linear line 66, a linear line 70 and linear lines 72 are set within the interference region 30 so as to determine a distribution of light intensities on each of the linear lines 72. Then, a frequency corresponding to the maximal light intensity is determined. Further, an approximated liner line or an approximated curved line is determined from a plurality of frequencies determined for each of the linear line 72. Then, the aberration of the optical component is evaluated based on the coefficient of the approximated linear or curved line.
    • 提供了一种用于高精度地评估光学部件的性能的检查方法。 根据检查方法,由已经通过光学部件18的光产生具有不同相位的第一光束24和第二光束26,并且彼此干涉以形成干涉区域30。 线性线66,线性线70和线性线72设置在干涉区域30内,以便确定每个线性线72上的光强度的分布。 然后,确定与最大光强度对应的频率。 此外,根据为每个线性线72确定的多个频率来确定近似线性线或近似曲线。 然后,基于近似线性或曲线的系数来评价光学部件的像差。
    • 6. 发明申请
    • Method and apparatus for inspection of optical component
    • 光学部件检查方法和装置
    • US20060192977A1
    • 2006-08-31
    • US11319172
    • 2005-12-28
    • Kazumasa TakataHidetoshi UtsuroTomotaka FurutaTakashi Urashima
    • Kazumasa TakataHidetoshi UtsuroTomotaka FurutaTakashi Urashima
    • G01B11/02G01B9/02
    • G01M11/0271
    • An inspection method for evaluating the performance of an optical component at high precision is provided. According to the inspection method, a first light beam 24 and a second light beam 26 both having different phases are generated from light which has passed through an optical component 18, and are interfered with each other to form an interference region 30. A linear line 66, a linear line 70 and linear lines 72 are set within the interference region 30 so as to determine a distribution of light intensities on each of the linear lines 72. Then, a frequency corresponding to the maximal light intensity is determined. Further, an approximated liner line or an approximated curved line is determined from a plurality of frequencies determined for each of the linear line 72. Then, the aberration of the optical component is evaluated based on the coefficient of the approximated linear or curved line.
    • 提供了一种用于高精度地评估光学部件的性能的检查方法。 根据检查方法,由已经通过光学部件18的光产生具有不同相位的第一光束24和第二光束26,并且彼此干涉以形成干涉区域30。 线性线66,线性线70和线性线72设置在干涉区域30内,以便确定每个线性线72上的光强度的分布。 然后,确定与最大光强度对应的频率。 此外,根据为每个线性线72确定的多个频率来确定近似线性线或近似曲线。 然后,基于近似线性或曲线的系数来评价光学部件的像差。