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    • 2. 发明授权
    • Ion implantation apparatus
    • 离子注入装置
    • US5025167A
    • 1991-06-18
    • US533769
    • 1990-06-06
    • Soichiro OkudaTetsuya NakanishiShigeo SasakiKazuhiko Noguchi
    • Soichiro OkudaTetsuya NakanishiShigeo SasakiKazuhiko Noguchi
    • H01J37/09H01J37/304H01J37/317
    • H01J37/09H01J37/304H01J37/3171
    • An ion implantation apparatus comprises an ion beam measuring device to measure and analyze the shape of a beam projected on a substrate for ion implantation and the quantity of current obtained by the ion beam, an analyzing slit member having an opening whose width is changeable, which is located in the ion beam track to extract only implantation ions, and a shaping slit member having an opening whose width is changeable, which is located behind the analyzing slit member to determine the shape of the beam to be projected on the substrate for ion implantation, wherein the widths of the openings of the analyzing slit member and the shaping slit member are changed on the basis of the shape of the beam and the quantity of current obtained as a result of the measurement by the ion beam measuring device.
    • 离子注入装置包括离子束测量装置,用于测量和分析投影在用于离子注入的基板上的光束的形状和由离子束获得的电流量,分析狭缝部件,其具有宽度可变的开口, 位于离子束轨道中以仅提取注入离子;以及成形狭缝构件,其具有位于分析狭缝构件后面的宽度可变的开口,以确定要投影到用于离子注入的衬底上的光束的形状 其中分析狭缝部件和成形狭缝部件的开口的宽度基于由离子束测量装置测量的结果获得的光束形状和电流量而改变。
    • 4. 发明授权
    • Cutoff wavelength measuring method and optical communication system
    • 截止波长测量方法和光通信系统
    • US08223323B2
    • 2012-07-17
    • US12750029
    • 2010-03-30
    • Tetsuya NakanishiMasaaki HiranoTakashi Sasaki
    • Tetsuya NakanishiMasaaki HiranoTakashi Sasaki
    • G01N21/00
    • G01M11/33
    • A method includes a first step of joining a multimode fiber to a first end of an optical fiber being a specimen, allowing light to propagate from the multimode fiber to the specimen, measuring an intensity of light from a second end of the specimen, and determining a first power spectrum; a second step of joining the multimode fiber to a first end of a reference fiber having bending loss higher than that of the specimen, allowing light to propagate from the multimode fiber to the reference fiber, measuring an intensity of light from a second end of the reference fiber, and determining a second power spectrum; a third step of determining a difference spectrum by subtracting the second power spectrum from the first power spectrum; and a fourth step of determining a higher-order mode cutoff wavelength of the specimen on the basis of a shape of the difference spectrum.
    • 一种方法包括将多模光纤连接到作为样本的光纤的第一端的第一步骤,允许光从多模光纤传播到样品,测量来自样品的第二端的光的强度,以及确定 第一功率谱; 将多模光纤连接到具有高于样品的弯曲损耗的参考光纤的第一端的第二步骤,允许光从多模光纤传播到参考光纤,测量来自第二端的光的强度 参考光纤,并确定第二功率谱; 第三步骤,通过从第一功率谱中减去第二功率谱来确定差分谱; 以及基于差分光谱的形状来确定样本的高次模截止波长的第四步骤。
    • 5. 发明申请
    • CUTOFF WAVELENGTH MEASURING METHOD AND OPTICAL COMMUNICATION SYSTEM
    • 切割波长测量方法和光通信系统
    • US20100247093A1
    • 2010-09-30
    • US12750029
    • 2010-03-30
    • Tetsuya NakanishiMasaaki HiranoTakashi Sasaki
    • Tetsuya NakanishiMasaaki HiranoTakashi Sasaki
    • H04B10/08G01N21/00
    • G01M11/33
    • A method includes a first step of joining a multimode fiber to a first end of an optical fiber being a specimen, allowing light to propagate from the multimode fiber to the specimen, measuring an intensity of light from a second end of the specimen, and determining a first power spectrum; a second step of joining the multimode fiber to a first end of a reference fiber having bending loss higher than that of the specimen, allowing light to propagate from the multimode fiber to the reference fiber, measuring an intensity of light from a second end of the reference fiber, and determining a second power spectrum; a third step of determining a difference spectrum by subtracting the second power spectrum from the first power spectrum; and a fourth step of determining a higher-order mode cutoff wavelength of the specimen on the basis of a shape of the difference spectrum.
    • 一种方法包括将多模光纤连接到作为样本的光纤的第一端的第一步骤,允许光从多模光纤传播到样品,测量来自样品的第二端的光的强度,以及确定 第一功率谱; 将多模光纤连接到具有高于样品的弯曲损耗的参考光纤的第一端的第二步骤,允许光从多模光纤传播到参考光纤,测量来自第二端的光的强度 参考光纤,并确定第二功率谱; 第三步骤,通过从第一功率谱中减去第二功率谱来确定差分谱; 以及基于差分光谱的形状来确定样本的高次模截止波长的第四步骤。
    • 8. 发明申请
    • Device for inspecting hollow-body cavity
    • 中空体腔检查装置
    • US20080252880A1
    • 2008-10-16
    • US12081241
    • 2008-04-11
    • Masato TanakaToshiaki OkunoMasaaki HiranoTetsuya Nakanishi
    • Masato TanakaToshiaki OkunoMasaaki HiranoTetsuya Nakanishi
    • G01N21/84
    • A61B5/0075A61B5/0066A61B5/0084A61B5/0086A61B5/02007H04N5/2354H04N2005/2255
    • Provided is a hollow-body cavity inspection device for inspecting a hollow-body cavity filled with a limited-wavelength transparent medium. The hollow-body cavity inspection device is capable of multifunction in addition to acquisition of an image and comprises: (1) one or more light sources for emitting two or more inspection light beams of different characteristics; (2) a light transmitting member for transmitting the two or more inspection light beams to an inspection objective in a hollow-body cavity and transmitting the reflected/scattered light from the inspection objective to the outside of the hollow-body; and (3) an inspection data formation means for receiving the reflected/scattered light and forming inspection information therefrom, wherein the two or more inspection light beams include first inspection light having its main wavelength bandwidth at the transmittable wavelength band, and the inspection data formation means comprises a plurality of means for outputting inspection information differing according to each of the two or more inspection light beams.
    • 提供一种用于检查填充有有限波长透明介质的中空体腔的中空体腔检查装置。 中空体腔检查装置除了获取图像之外还能够具有多功能,并且包括:(1)用于发射具有不同特性的两个或更多个检查光束的一个或多个光源; (2)一种透光构件,用于将两个或更多个检查光束传输到中空体腔中的检查物镜,并将来自检查物镜的反射/散射光传输到中空体的外部; (3)检查数据形成单元,其接收反射/散射光并形成检查信息,其中两个或更多个检查光束包括其可发射波长带的主波长带宽的第一检查光和检测数据形成 装置包括用于输出根据两个或更多个检查光束中的每一个不同的检查信息的多个装置。