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    • 5. 发明授权
    • Sensing element used in sensing device for sensing target substance in specimen by using plasmon resonance
    • 用于感测装置中的感测元件,用于通过使用等离子体共振来感测样品中的目标物质
    • US07403287B2
    • 2008-07-22
    • US11448070
    • 2006-06-07
    • Miki OgawaNorihiko Utsunomiya
    • Miki OgawaNorihiko Utsunomiya
    • G01N21/55
    • G01N21/554
    • A method of producing a sensing element used in a detecting device for detecting a target substance in a specimen with the use of plasmon resonance. The method includes the steps of forming an insulating layer on a substrate, the surface of the substrate having an electroconductive layer including a first electroconductive material, forming a plurality of holes through the insulating layer to form an insulating pattern, filling up the holes with a second electroconductive material to form a metallic pattern, removing the insulating pattern, and removing a region other than the region sandwiched by the metallic pattern and the substrate in the electroconductive layer, using the metallic pattern as a mask.
    • 一种用于检测装置中用于使用等离子体共振来检测样品中的目标物质的感测元件的方法。 该方法包括在衬底上形成绝缘层的步骤,衬底的表面具有包括第一导电材料的导电层,通过绝缘层形成多个孔以形成绝缘图案,用一个 第二导电材料以形成金属图案,去除绝缘图案,并且使用金属图案作为掩模,除去导电层中被金属图案和基板夹持的区域以外的区域。