专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US09236246B2 Substrate processing apparatus and a method of manufacturing a semiconductor device 有权
公开(公告)号：US09236246B2
公开(公告)日：2016-01-12
申请号：US13409783
申请日：2012-03-01
申请人： Katsuyoshi Hamano , Yasutoshi Tsubota , Masayuki Tomita , Teruo Yoshino
发明人： Katsuyoshi Hamano , Yasutoshi Tsubota , Masayuki Tomita , Teruo Yoshino
IPC分类号： C23C16/00 , H01L21/02 , C23C16/46 , C23C16/52 , H01J37/32 , H01L21/67 , H01L21/687
CPC分类号： H01L21/324 , C23C16/46 , C23C16/52 , H01J37/32669 , H01J37/32724 , H01L21/02247 , H01L21/02301 , H01L21/0262 , H01L21/30604 , H01L21/67115 , H01L21/67253 , H01L21/68742
摘要： The temperature of a substrate is elevated rapidly while improving the temperature uniformity of the substrate.The substrate is loaded into a process chamber, the loaded substrate is supported on a first substrate support unit, a gas is supplied to the process chamber, the temperature of the substrate supported on the first substrate support unit is elevated in a state of increasing the pressure in the process chamber to higher than the pressure during loading of the substrate or in a state of increasing the pressure in the process chamber to higher than the pressure during processing for the surface of the substrate, the substrate supported on the first substrate support unit is transferred to the second substrate support unit and supported thereon after lapse of a predetermined time, and the surface of substrate is processed while heating the substrate supported on the second substrate support unit.

2. 发明申请

US20120225566A1 SUBSTRATE PROCESSING APPARATUS AND A METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE 有权
标题翻译：基板加工装置及制造半导体装置的方法
公开(公告)号：US20120225566A1
公开(公告)日：2012-09-06
申请号：US13409783
申请日：2012-03-01
申请人： Katsuyoshi Hamano , Yasutoshi Tsubota , Masayuki Tomita , Teruo Yoshino
发明人： Katsuyoshi Hamano , Yasutoshi Tsubota , Masayuki Tomita , Teruo Yoshino
IPC分类号： H01L21/31 , C23C16/455 , C23C16/40 , C23C16/52 , C23C16/46
CPC分类号： H01L21/324 , C23C16/46 , C23C16/52 , H01J37/32669 , H01J37/32724 , H01L21/02247 , H01L21/02301 , H01L21/0262 , H01L21/30604 , H01L21/67115 , H01L21/67253 , H01L21/68742
摘要： The temperature of a substrate is elevated rapidly while improving the temperature uniformity of the substrate. The substrate is loaded into a process chamber, the loaded substrate is supported on a first substrate support unit, a gas is supplied to the process chamber, the temperature of the substrate supported on the first substrate support unit is elevated in a state of increasing the pressure in the process chamber to higher than the pressure during loading of the substrate or in a state of increasing the pressure in the process chamber to higher than the pressure during processing for the surface of the substrate, the substrate supported on the first substrate support unit is transferred to the second substrate support unit and supported thereon after lapse of a predetermined time, and the surface of substrate is processed while heating the substrate supported on the second substrate support unit.
摘要翻译：衬底的温度快速升高，同时提高衬底的温度均匀性。将基板装载到处理室中，将负载的基板支撑在第一基板支撑单元上，向处理室供应气体，在第一基板支撑单元上支撑的基板的温度升高，处理室中的压力高于衬底加载期间的压力或处理室中的压力升高至高于衬底表面处理期间的压力的状态，所述衬底支撑在第一衬底支撑单元上转移到第二基板支撑单元并在经过预定时间之后被支撑在其上，并且在加热支撑在第二基板支撑单元上的基板的同时对基板的表面进行加工。

3. 发明授权

US08179123B2 Measurement apparatus and recording medium 失效
标题翻译：测量装置和记录介质
公开(公告)号：US08179123B2
公开(公告)日：2012-05-15
申请号：US12614728
申请日：2009-11-09
申请人： Masayuki Tomita , Masahiko Muto , Takeshi Takahashi
发明人： Masayuki Tomita , Masahiko Muto , Takeshi Takahashi
IPC分类号： G01R11/32
CPC分类号： H04L25/03159 , G01R23/16 , H04B17/318 , H04L1/206
摘要： Provided is a measurement apparatus that measures power of a modulated signal that is modulated with a carrier signal having a prescribed frequency, comprising an AD converting section that outputs a digital modulated signal obtained by AD converting the modulated signal; a frequency converting section that converts the digital modulated signal into a frequency component signal representing a plurality of signal components at respective frequencies; a correction coefficient output section that outputs, for each frequency, a correction coefficient corresponding to a frequency characteristic of a transmission path on which the modulated signal is transmitted; a correcting section that corrects the signal component of each frequency in the frequency component signal using the correction coefficient of the corresponding frequency; and a power calculating section that calculates the power of the modulated signal based on the signal component of each frequency in the corrected frequency component signal.
摘要翻译：提供一种测量装置，其测量利用具有规定频率的载波信号进行调制的调制信号的功率，包括：AD转换部，其输出通过AD转换所获得的调制信号而获得的数字调制信号; 频率转换部分，其将数字调制信号转换成表示各个频率的多个信号分量的频率分量信号; 校正系数输出部，对于每个频率，输出与发送所述调制信号的传输路径的频率特性相对应的校正系数; 校正部，其使用相应频率的校正系数校正频率分量信号中的每个频率的信号分量; 以及功率计算部，其基于所述校正后的频率分量信号中的各频率的信号分量来计算所述调制信号的功率。

4. 发明授权

US07958720B2 Combustion control apparatus for direct-injection spark-ignition internal combustion engine 有权
标题翻译：直喷式火花点火内燃机燃烧控制装置
公开(公告)号：US07958720B2
公开(公告)日：2011-06-14
申请号：US11443179
申请日：2006-05-31
申请人： Shinichi Okamoto , Masayuki Tomita , Taizo Horikomi , Taro Sakai , Akira Nakajima , Hitoshi Ishii , Mitsuhiro Akagi , Takao Maitani , Tomoyuki Takeda , Masatoshi Hidaka , Tomoyuki Shigefuji
发明人： Shinichi Okamoto , Masayuki Tomita , Taizo Horikomi , Taro Sakai , Akira Nakajima , Hitoshi Ishii , Mitsuhiro Akagi , Takao Maitani , Tomoyuki Takeda , Masatoshi Hidaka , Tomoyuki Shigefuji
IPC分类号： F01N3/00 , F01N3/10
CPC分类号： F02D37/02 , F02D41/0255 , F02D41/068 , F02D41/086 , F02D41/1446 , F02D41/401 , F02D41/402 , F02D2041/389 , F02D2200/0802 , F02D2200/0804 , F02D2200/0816 , Y02T10/26 , Y02T10/44
摘要： A combustion control apparatus is configured for a direct-injection spark-ignition internal combustion engine. The combustion control apparatus selects an extremely retarded combustion mode while the internal combustion engine is in a predetermined operating state. In the extremely retarded combustion mode, the combustion control apparatus sets ignition timing to be after compression top dead center, and sets fuel injection timing to be before the ignition timing and after compression top dead center. The combustion control apparatus inhibits the extremely retarded combustion mode while an exhaust purifier of the internal combustion engine is in a predetermined cold state.
摘要翻译：燃烧控制装置构造成用于直接喷射火花点火内燃机。燃烧控制装置在内燃机处于预定运行状态时选择极度延迟的燃烧模式。在极度延迟燃烧模式中，燃烧控制装置将点火正时设定为压缩上止点之后，并将燃料喷射正时设定为点火正时之前和压缩上止点之后。当内燃机的排气净化器处于预定的冷态时，燃烧控制装置抑制极度延迟的燃烧模式。

5. 发明授权

US07350504B2 Control apparatus and method for inner cylinder direct injection spark ignited internal combustion engine 失效
标题翻译：内筒直喷火花点火内燃机控制装置及方法
公开(公告)号：US07350504B2
公开(公告)日：2008-04-01
申请号：US11443178
申请日：2006-05-31
申请人： Makoto Yasunaga , Tomoyuki Takeda , Akira Nakajima , Taizo Horikomi , Daisuke Takaki , Katsuaki Uchiyama , Masatoshi Hidaka , Hitoshi Ishii , Tomoyuki Shigefuji , Masayuki Tomita , Mitsuhiro Akagi
发明人： Makoto Yasunaga , Tomoyuki Takeda , Akira Nakajima , Taizo Horikomi , Daisuke Takaki , Katsuaki Uchiyama , Masatoshi Hidaka , Hitoshi Ishii , Tomoyuki Shigefuji , Masayuki Tomita , Mitsuhiro Akagi
IPC分类号： F02P5/00 , F02P5/04
CPC分类号： F02D41/0255 , F02D37/02 , F02D41/3836 , F02D41/401 , F02D41/402 , F02D2041/389 , F02D2200/0602 , F02D2200/0606 , Y02T10/26 , Y02T10/44
摘要： In control apparatus and method for an inner cylinder spark ignited internal combustion engine having a fuel injection valve configured to directly inject fuel into an inside of an engine cylinder and a spark plug, a super retard combustion is executed to set an ignition timing after a compression stroke top dead center and to inject fuel before the ignition timing and after the compression stroke top dead center during a predetermined engine driving condition and at least part of fuel is injected before the compression stroke top dead center to decrease a fuel injection quantity after the compression stroke top dead center during an interval which is immediately after an engine start and in which a pressure of fuel is relatively low.
摘要翻译：在具有配置成将燃料直接喷射到发动机气缸和火花塞内部的燃料喷射阀的内筒火花点火内燃机的控制装置和方法中，执行超级燃烧以在压缩之后设定点火正时并且在预定的发动机驱动条件之前，在点火正时之前和压缩冲程中止点之后喷射燃料，并且在压缩冲程上死点之前喷射至少一部分燃料以减少压缩后的燃料喷射量在发动机启动之后的时间间隔内的行程上止点，其中燃料的压力相对较低。

6. 发明申请

US20070023006A1 COMBUSTION CONTROL SYSTEM AND METHOD FOR DIRECT-INJECTION SPARK-IGNITION INTERNAL COMBUSTION ENGINE 有权
标题翻译：燃油喷射控制系统及方法燃油喷射内燃机
公开(公告)号：US20070023006A1
公开(公告)日：2007-02-01
申请号：US11246189
申请日：2005-10-11
申请人： Tomoyuki Takeda , Masayuki Tomita , Taro Sakai , Akira Nakajima , Takao Maitani
发明人： Tomoyuki Takeda , Masayuki Tomita , Taro Sakai , Akira Nakajima , Takao Maitani
IPC分类号： F02D43/00
CPC分类号： F02D41/0255 , F02D35/026 , F02D37/02 , F02D41/061 , F02D41/064 , F02D41/068 , F02D41/1446 , F02D41/3029 , F02D41/401 , F02D41/402 , F02D2041/389 , Y02T10/26 , Y02T10/44
摘要： There is provided a combustion control system for a direct-injection spark-ignition internal combustion engine, including a fuel injection valve that injects fuel directly into a cylinder of the engine to form an air-fuel mixture in a combustion chamber of the engine cylinder, a spark plug that ignites the air-fuel mixture, and a control unit that performs combustion retard control to set an ignition timing of the spark plug at a point after compression top dead center and set an injection period of the fuel injection valve at a time after compression top dead center and before the ignition timing in such a manner that a time interval from a start point of the injection period to the ignition timing increases with decrease in a temperature in the engine cylinder at a cold start of the engine.
摘要翻译：提供了一种用于直喷式火花点火内燃机的燃烧控制系统，其包括燃料喷射阀，其将燃料直接喷射到发动机的气缸中，以在发动机气缸的燃烧室中形成空气 - 燃料混合物，点燃空燃混合物的火花塞，以及控制单元，其进行燃烧延迟控制，将火花塞的点火正时设定在压缩上止点之后的点，并设定燃料喷射阀的喷射时间在压缩上止点之后和点火正时之前，使得从喷射周期的起始点到点火正时的时间间隔随着发动机冷启动时发动机气缸中的温度的降低而增加。

7. 发明授权

US07024851B2 Direct fuel injection/spark ignition engine control device 有权
标题翻译：直接燃油喷射/火花点火发动机控制装置
公开(公告)号：US07024851B2
公开(公告)日：2006-04-11
申请号：US10960693
申请日：2004-10-08
申请人： Mitsuhiro Akagi , Tsutomu Kikuchi , Yuichi Iriya , Hitoshi Ishii , Masahiro Fukuzumi , Katsuaki Uchiyama , Masahiko Yuya , Takao Maitani , Masayuki Tomita
发明人： Mitsuhiro Akagi , Tsutomu Kikuchi , Yuichi Iriya , Hitoshi Ishii , Masahiro Fukuzumi , Katsuaki Uchiyama , Masahiko Yuya , Takao Maitani , Masayuki Tomita
IPC分类号： F01N3/00
CPC分类号： F02D41/3076 , F02D41/0235 , F02D41/064 , F02D41/3029 , F02D2200/0414 , F02D2200/703
摘要： An engine control device is configured to perform optimum combustion control according to environmental conditions when warming up of a catalyst for emission purification is required. The engine control device performs stratified combustion by the compression stroke injection at the time of startup, when warming up of the catalyst is required. However, under conditions of low air density, stratified combustion by compression stroke injection is prevented, and either homogenous combustion by intake stroke injection is performed, or double injection combustion by intake stroke injection and compression stroke injection is performed. Thus, the engine control device maintains starting properties and prevents adverse effects on engine operability.
摘要翻译：发动机控制装置被配置为在需要用于排放净化的催化剂的预热时根据环境条件执行最佳燃烧控制。发动机控制装置在起动时通过压缩冲程喷射进行分层燃烧，需要催化剂的预热。然而，在低空气密度的条件下，防止了压缩冲程喷射的分层燃烧，进行进气冲程喷射的均质燃烧，或者进行进气冲程喷射和压缩冲程喷射的双重喷射燃烧。因此，发动机控制装置保持启动特性并防止对发动机可操作性的不利影响。

8. 发明申请

US20050086930A1 Direct fuel injection/spark ignition engine control device 有权
标题翻译：直接燃油喷射/火花点火发动机控制装置
公开(公告)号：US20050086930A1
公开(公告)日：2005-04-28
申请号：US10960693
申请日：2004-10-08
申请人： Mitsuhiro Akagi , Tsutomu Kikuchi , Yuichi Iriya , Hitoshi Ishii , Masahiro Fukuzumi , Katsuaki Uchiyama , Masahiko Yuya , Takao Maitani , Masayuki Tomita
发明人： Mitsuhiro Akagi , Tsutomu Kikuchi , Yuichi Iriya , Hitoshi Ishii , Masahiro Fukuzumi , Katsuaki Uchiyama , Masahiko Yuya , Takao Maitani , Masayuki Tomita
IPC分类号： F02D45/00 , F02D41/02 , F02D41/04 , F02D41/06 , F02D41/30 , F02D41/34 , F01N3/00
CPC分类号： F02D41/3076 , F02D41/0235 , F02D41/064 , F02D41/3029 , F02D2200/0414 , F02D2200/703
摘要： An engine control device is configured to perform optimum combustion control according to environmental conditions when warming up of a catalyst for emission purification is required. The engine control device performs stratified combustion by the compression stroke injection at the time of startup, when warming up of the catalyst is required. However, under conditions of low air density, stratified combustion by compression stroke injection is prevented, and either homogenous combustion by intake stroke injection is performed, or double injection combustion by intake stroke injection and compression stroke injection is performed. Thus, the engine control device maintains starting properties and prevents adverse effects on engine operability.
摘要翻译：发动机控制装置被配置为在需要用于排放净化的催化剂的预热时根据环境条件执行最佳燃烧控制。发动机控制装置在起动时通过压缩冲程喷射进行分层燃烧，需要催化剂的预热。然而，在低空气密度的条件下，防止了压缩冲程喷射的分层燃烧，进行进气冲程喷射的均质燃烧，或者进行进气冲程喷射和压缩冲程喷射的双重喷射燃烧。因此，发动机控制装置保持启动特性并防止对发动机可操作性的不利影响。

9. 发明授权

US08100098B2 Multi-link engine 有权
标题翻译：多链路引擎
公开(公告)号：US08100098B2
公开(公告)日：2012-01-24
申请号：US12255390
申请日：2008-10-21
申请人： Naoki Takahashi , Masayuki Tomita , Kenshi Ushijima , Koji Hiraya , Hirofumi Tsuchida , Shunichi Aoyama
发明人： Naoki Takahashi , Masayuki Tomita , Kenshi Ushijima , Koji Hiraya , Hirofumi Tsuchida , Shunichi Aoyama
IPC分类号： F02B75/04 , F02B75/32 , F02D15/02 , F16C7/00
CPC分类号： F02B75/048
摘要： A multi-link engine has a piston coupled to a crankshaft to move inside an engine cylinder. A piston pin connects the piston to an upper link, which is connected to a lower link by an upper link pin. A crank pin of the crankshaft rotatably supports the lower link thereon. A control link pin connects the lower link to one end of a control link, which is connected at another end to the engine block body by a control shaft. The upper link has an upper link axis that forms an angle with the cylinder axis, as viewed along a crank axis direction of the crankshaft, such that the angle reaches a minimum when a crank angle of the engine is within a range where the bottom end of a piston skirt is positioned below a topmost part of the bottom end of the cylinder liner.
摘要翻译：多连杆发动机具有联接到曲轴以在发动机气缸内移动的活塞。活塞销将活塞连接到上连杆，上连杆通过上连杆销连接到下连杆。曲轴的曲柄销可旋转地支撑其上的下连杆。控制连杆销将下连杆连接到控制链节的另一端，控制链通过控制轴连接到发动机机体。上部连杆具有与曲轴的曲柄轴方向观察时与气缸轴线形成角度的上连杆轴，使得当发动机的曲轴角度在下端活塞裙部位于气缸套的底端的最上部的下方。

10. 发明授权

US08100097B2 Multi-link engine 有权
标题翻译：多链路引擎
公开(公告)号：US08100097B2
公开(公告)日：2012-01-24
申请号：US12255336
申请日：2008-10-21
申请人： Naoki Takahashi , Masayuki Tomita , Kenshi Ushijima , Koji Hiraya , Hirofumi Tsuchida , Shunichi Aoyama
发明人： Naoki Takahashi , Masayuki Tomita , Kenshi Ushijima , Koji Hiraya , Hirofumi Tsuchida , Shunichi Aoyama
IPC分类号： F02B75/04
CPC分类号： F02B75/048
摘要： A multi-link engine has a piston coupled to a crankshaft to move inside an engine cylinder. A piston pin connects the piston to an upper link, which is connected to a lower link by an upper link pin. A crank pin of the crankshaft rotatably supports the lower link thereon. A control link pin connects the lower link to one end of a control link, which is connected at another end to the engine block body by a control shaft. The crank pin has a center arranged on a straight line joining centers of the upper link pin and the control link pin such that an angle formed between the straight line and a horizontal axis that is perpendicular to a center axis of the cylinder and that passes through an axial center of a crank journal is the same for at top dead center and at bottom dead center.
摘要翻译：多连杆发动机具有联接到曲轴以在发动机气缸内移动的活塞。活塞销将活塞连接到上连杆，上连杆通过上连杆销连接到下连杆。曲轴的曲柄销可旋转地支撑其上的下连杆。控制连杆销将下连杆连接到控制链节的另一端，控制链通过控制轴连接到发动机机体。曲柄销的中心设置在与上连杆销和控制连杆销的中心连接的直线上，使得在直线与水平轴线之间形成的角度垂直于气缸的中心轴线并穿过曲柄轴颈的轴心在上止点和下止点处是相同的。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式