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    • 1. 发明授权
    • Fine contact hole forming method employing thermal flow process
    • 采用热流程的精细接触孔成型方法
    • US07344827B2
    • 2008-03-18
    • US10838955
    • 2004-05-04
    • Katsuya TakemuraAkihiro SekiEiji Fukuda
    • Katsuya TakemuraAkihiro SekiEiji Fukuda
    • G03F7/00
    • G03F7/40H01L21/76802
    • Provided is a contact hole forming method, wherein in a thermal flow step the contact hole size can be fixed after thermal flow even if the resist material lot changes, or, wherein at the same bake temperature the contracted size, namely the flow amount, can be fixed. More specifically, provided is a contact hole forming method comprising a step of coating a resist material onto a substrate, a step of heating the coated resist material, a step of exposing the heated resist material to light through a photo mask adapted for a contact hole pattern, a step of heating the exposed resist material, a step of forming the contact hole pattern subsequently by developing with a developing fluid and a step of thermal flow treatment for heating the obtained contact hole pattern, wherein the resist material comprises an organic compound which does not react with the other components within the resist material and does not change a resolution property, and wherein when the resist material lot is changed, an amount of the organic compound to be added is changed so as to keep the contact hole pattern identical before and after the lot change.
    • 提供一种接触孔形成方法,其中在热流动步骤中,即使抗蚀剂材料批次改变,接触孔尺寸也可以在热流动之后固定,或者其中在相同的烘烤温度下,收缩尺寸即流量可以 被固定。 更具体地,提供了一种接触孔形成方法,包括将抗蚀剂材料涂覆到基底上的步骤,加热涂覆的抗蚀剂材料的步骤,将经加热的抗蚀剂材料曝光到通过适于接触孔的光掩模的步骤 图案,加热曝光的抗蚀剂材料的步骤,随后通过用显影液显影形成接触孔图案的步骤和用于加热所获得的接触孔图案的热流动处理步骤,其中抗蚀剂材料包含有机化合物,其中 不与抗蚀剂材料内的其它成分反应,也不会改变分辨率,并且,当改变抗蚀剂材料批次时,改变添加的有机化合物的量,以便使接触孔图案保持在相同之前 经过多次变更。
    • 2. 发明申请
    • EXPANSION VALVE
    • 膨胀阀
    • US20100237270A1
    • 2010-09-23
    • US12680991
    • 2008-09-18
    • Kazuto KobayashiTakashi MogiEiji Fukuda
    • Kazuto KobayashiTakashi MogiEiji Fukuda
    • F16K1/00
    • F25B41/062F16K27/02F25B2341/0683F25B2500/01
    • An expansion valve for reducing the quantity of material required for the valve body by contriving the arrangement of bolt fitting grooves. In the expansion valve (20), displacement of a valve member driver (36) provided in the valve body (21) is transmitted to a valve member by a valve member drive rod (36f) and the valve opening is altered to control the flow rate of the refrigerant. The valve body (21) consists of a body upper portion (40) and a body lower portion (41) narrower than the body upper portion (40), and bolt fitting grooves (43, 43) opening in the flank of the valve body (21), preferably opening obliquely downward, are formed at the boundary (42) of the body upper portion (40) and the body lower portion (41). With such a layout, the material required at the boundary (42) can be reduced furthermore and the quantity of material required for the valve body (21) can be reduced furthermore, as a result. Since the opening width (minimum spatial dimension) w is smaller than the diameter of bolt, a seating surface is assured sufficiently around the bolt fitting groove (43) and the bolt does not drop off from the bolt fitting groove (43).
    • 一种膨胀阀,用于通过设计螺栓安装槽来减少阀体所需的材料的数量。 在膨胀阀(20)中,设置在阀体(21)中的阀构件驱动器(36)的位移通过阀构件驱动杆(36f)传递到阀构件,并且改变阀开度以控制流量 制冷剂的比例。 阀体(21)由主体上部(40)和比主体上部(40)窄的主体下部(41)构成,在阀体的侧面开口的螺栓嵌合槽(43,43) (21),优选地向下倾斜地开口,形成在主体上部(40)和主体下部(41)的边界(42)处。 通过这样的布局,可以进一步减少在边界(42)处所需的材料,并且可以进一步降低阀体(21)所需的材料量。 由于开口宽度(最小空间尺寸)w小于螺栓的直径,因此在螺栓配合槽(43)周围充分确保就座面,并且螺栓不会从螺栓配合槽(43)脱落。
    • 8. 发明授权
    • Stirling refrigerating system
    • 斯特林制冷系统
    • US5927079A
    • 1999-07-27
    • US969487
    • 1997-11-13
    • Hiroshi SekiyaEiji Fukuda
    • Hiroshi SekiyaEiji Fukuda
    • F25B9/14F25D17/02F25B9/00
    • F25D17/02F25B9/14
    • A Stirling refrigerating system comprising a freezing chamber, a Stirling refrigerator, and a heat carrying means including a pipe arrangement thermally connected to a cooling portion of the Stirling refrigerator so as to carry low temperature heat of the cooling portion to the freezing chamber by means of a refrigerant, wherein when the Stirling refrigerator is driven, the refrigerant circulates in the freezing chamber and the cooling portion through the pipe arrangement. Thus, it is possible to obtain a Stirling refrigerating system in which not only it can cope with the current flon regulation but also it can use ethyl alcohol or the like as a refrigerant other than HCFC or HFC which may be subjected to legal regulation in the future, and it can increase the refrigerating capacity and improve the coefficient of performance in comparison with the existing system.
    • 一种斯特林制冷系统,包括冷冻室,斯特林制冷机,以及包括与斯特林制冷机的冷却部分热连接的管道装置的热承载装置,以便通过冷却部分将冷却部分的低温热量运送到冷冻室 制冷剂,其中当斯特林制冷机被驱动时,制冷剂通过管道装置在冷冻室和冷却部分中循环。 因此,可以获得斯特林制冷系统,其不仅可以应付目前的氟利昂调节,而且可以使用乙醇等作为除了氟化氢或氢氟酸的制冷剂,其可以在 未来,与现有系统相比,可以提高制冷能力,提高性能系数。
    • 9. 发明授权
    • Connector checking device
    • 连接器检查装置
    • US5512833A
    • 1996-04-30
    • US294572
    • 1994-08-23
    • Masaru FukudaEiji Fukuda
    • Masaru FukudaEiji Fukuda
    • G01R31/04H01R13/00H01R13/627H01R13/641H01R43/00H01R43/22H01H32/04H01R3/00
    • H01R43/22H01R13/6272H01R13/641
    • A connector checking apparatus includes a connector checking device having a main body operable by a lever to move toward a connector. The connector checking device also has a connector support. Detection pins are slideably disposed within the main body and are connected to checking terminals. The detection pins have a conductive contact face and detection fingers on a detection piece. Upon insertion of the detection pins into the connector, complete insertion of the terminals within the terminal receiving cavities of the connector permits contact between the conductive face and an end of the terminal C. The connector has cantilever resilient supporting pieces which include a locking projection 14a. The device can detect whether or not the connector checking device A is completely engaged with the connector.
    • 连接器检查装置包括连接器检查装置,其具有可由杠杆操作的主体朝向连接器移动。 连接器检查装置还具有连接器支撑。 检测销可滑动地设置在主体内并连接到检查端子。 检测针在检测片上具有导电接触面和检测指。 在将检测销插入连接器中之后,将端子完全插入连接器的端子容纳腔内可允许导电面与端子C的端部之间的接触。连接器具有悬臂弹性支撑件,其包括锁定突起14a 。 该装置可以检测连接器检查装置A是否完全与连接器接合。