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1. 发明授权

US07686588B2 Liquid chemical supply system having a plurality of pressure detectors 有权
标题翻译：具有多个压力检测器的液体化学物质供应系统
公开(公告)号：US07686588B2
公开(公告)日：2010-03-30
申请号：US11581464
申请日：2006-10-17
申请人： Katsuya Okumura , Tetsuya Toyoda , Tomohiro Ito , Akira Murakumo , Atsuyuki Sakai
发明人： Katsuya Okumura , Tetsuya Toyoda , Tomohiro Ito , Akira Murakumo , Atsuyuki Sakai
IPC分类号： F04B49/22
CPC分类号： F04B49/08
摘要： A liquid chemical supply system that performs accurate pressure feedback control and controls the discharge flow rate of liquid chemical with high precision, even when the pressure setting value of the operation pressure differs due to changes in the type of liquid chemical, includes a pump having a pump chamber and an operation chamber separated by a diaphragm comprised of a flexible membrane. The intake and discharge of liquid chemical is performed in accordance with the change in pressure inside the operation chamber. An electro-pneumatic regulator supplies operation gas pressure to the operation chamber. A plurality of pressure sensors having different pressure detection ranges is provided for detecting the operation gas pressure. A controller selectively employs any of the detection results of the plurality of sensors in accordance with the pressure setting value of the operation air that is set for each use, and performs pressure feedback control.
摘要翻译：一种液体化学品供应系统，即使当由于液体化学品的类型的变化而导致的操作压力的压力设定值不同时，也能够精确地进行精确的压力反馈控制和控制液体化学品的排出流量，包括具有泵室和由包括柔性膜的隔膜隔开的操作室。根据操作室内的压力变化进行液体化学品的进出。电动气动调节器将操作气体压力提供给操作室。提供具有不同压力检测范围的多个压力传感器用于检测操作气体压力。控制器根据为每次使用设定的操作空气的压力设定值选择性地使用多个传感器的检测结果，并进行压力反馈控制。

2. 发明申请

US20070122291A1 Liquid chemical supply system having a plurality of pressure detectors 有权
标题翻译：具有多个压力检测器的液体化学物质供应系统
公开(公告)号：US20070122291A1
公开(公告)日：2007-05-31
申请号：US11581464
申请日：2006-10-17
申请人： Katsuya Okumura , Tetsuya Toyoda , Tomohiro Ito , Akira Murakumo , Atsuyuki Sakai
发明人： Katsuya Okumura , Tetsuya Toyoda , Tomohiro Ito , Akira Murakumo , Atsuyuki Sakai
IPC分类号： F04B49/00
CPC分类号： F04B49/08
摘要： [Problem] To always perform accurate pressure feedback control, and control the discharge flow rate of liquid chemical with high precision, even in situations in which the pressure setting value of the operation pressure differs due to changes in the type of liquid chemical, etc. [Means of solution] A pump 11 has a pump chamber 13 and an operation chamber 14 separated by a diaphragm 12 comprised of a flexible membrane, and performs the intake and discharge of liquid chemical in accordance with the change in pressure inside the operation chamber 14. An electro-pneumatic regulator 32 supplies operation air to the operation chamber 14. In addition, in the present system, a plurality of pressure sensors 51, 63 having different pressure detection ranges is provided as pressure detection means for detecting the operation air pressure. A controller 40 selectively employs any of the detection results of the plurality of sensors 51, 63 in accordance with the pressure setting value of the operation air that is set for each use, and performs pressure feedback control.
摘要翻译： [问题]为了始终进行精确的压力反馈控制，并且即使在由于液体化学品的类型的变化而导致的操作压力的设定值不同的情况下也能够高精度地控制液体化学品的排出流量。 [解决方案]泵11具有由柔性膜构成的隔膜12隔开的泵室13和操作室14，并根据操作室14内的压力变化进行液体化学品的进出。。电动气动调节器32将操作空气供给到操作室14。此外，在本系统中，具有不同压力检测范围的多个压力传感器51,63被设置为用于检测操作空气压力的压力检测装置。控制器40根据为每次使用设定的操作空气的压力设定值选择性地使用多个传感器51,63的检测结果中的任一个，并进行压力反馈控制。

3. 外观设计

USD445886S1 Exhaust switching unit 失效
标题翻译：排气开关单元
公开(公告)号：USD445886S1
公开(公告)日：2001-07-31
申请号：US29117538
申请日：2000-01-24
申请人： Yoji Mori , Hiroshi Kino , Yuji Matsuoka , Akira Murakumo , Hiroshi Kagohashi
设计人： Yoji Mori , Hiroshi Kino , Yuji Matsuoka , Akira Murakumo , Hiroshi Kagohashi

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