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    • 6. 发明授权
    • Device transferring system, device transferring method, and display manufacturing method
    • 设备传输系统,设备传送方法和显示器制造方法
    • US07572649B2
    • 2009-08-11
    • US11383892
    • 2006-05-17
    • Toshiaki KanemitsuYuji NishiKatsuhiro TomodaMasato Doi
    • Toshiaki KanemitsuYuji NishiKatsuhiro TomodaMasato Doi
    • H01L21/00
    • H01L21/67092H01L21/68
    • A device transferring system includes a first substrate support portion on which to mount a first substrate, a second substrate support portion for supporting a second substrate opposed to the first substrate, a swinging unit for regulating the position of the first substrate support portion so that a device on the first substrate makes contact with the second substrate side in parallel to the second substrate, a movable stage for supporting and moving the swinging unit, a sensor unit for sensing the condition where the device on the first substrate has made contact with the second substrate side, the sensor unit being provided between the first substrate support portion and a sensor support portion formed in the swinging unit, and a measuring unit 61 for measuring the position of stop of a motion of the first substrate due to the contact of the first substrate with the second substrate, and for measuring the moving amount of the swinging unit after the approaching motion of the first substrate is stopped.
    • 装置传送系统包括:第一基板支撑部分,其上安装第一基板;第二基板支撑部分,用于支撑与第一基板相对的第二基板;摆动单元,用于调节第一基板支撑部分的位置, 第一基板上的装置与第二基板平行地与第二基板侧接触,用于支撑和移动摆动单元的可移动台,用于感测第一基板上的装置已经与第二基板接触的状态的传感器单元 传感器单元设置在第一基板支撑部分和形成在摆动单元中的传感器支撑部分之间;以及测量单元61,用于测量由于第一基板支撑部分与第一基板支撑部分的接触而导致的第一基板的运动停止位置 基板,并且用于在第一基板的接近运动之后测量摆动单元的移动量 底物停止。
    • 8. 发明申请
    • DEVICE TRANSFERRING SYSTEM, DEVICE TRANSFERRING METHOD, AND DISPLAY MANUFACTURING METHOD
    • 设备传送系统,设备传送方法和显示器制造方法
    • US20060270188A1
    • 2006-11-30
    • US11383892
    • 2006-05-17
    • Toshiaki KanemitsuYuji NishiKatsuhiro TomodaMasato Doi
    • Toshiaki KanemitsuYuji NishiKatsuhiro TomodaMasato Doi
    • H01L21/30
    • H01L21/67092H01L21/68
    • A device transferring system includes a first substrate support portion on which to mount a first substrate, a second substrate support portion for supporting a second substrate opposed to the first substrate, a swinging unit for regulating the position of the first substrate support portion so that a device on the first substrate makes contact with the second substrate side in parallel to the second substrate, a movable stage for supporting and moving the swinging unit, a sensor unit for sensing the condition where the device on the first substrate has made contact with the second substrate side, the sensor unit being provided between the first substrate support portion and a sensor support portion formed in the swinging unit, and a measuring unit 61 for measuring the position of stop of a motion of the first substrate due to the contact of the first substrate with the second substrate, and for measuring the moving amount of the swinging unit after the approaching motion of the first substrate is stopped.
    • 装置传送系统包括:第一基板支撑部分,其上安装第一基板;第二基板支撑部分,用于支撑与第一基板相对的第二基板;摆动单元,用于调节第一基板支撑部分的位置, 第一基板上的装置与第二基板平行地与第二基板侧接触,用于支撑和移动摆动单元的可移动台,用于感测第一基板上的装置已经与第二基板接触的状态的传感器单元 传感器单元设置在第一基板支撑部分和形成在摆动单元中的传感器支撑部分之间;以及测量单元61,用于测量由于第一基板支撑部分与第一基板支撑部分的接触而导致的第一基板的运动停止位置 基板,并且用于在第一基板的接近运动之后测量摆动单元的移动量 底物停止。