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    • 4. 发明授权
    • Semiconductor device and method of manufacture thereof
    • 半导体装置及其制造方法
    • US07224019B2
    • 2007-05-29
    • US11064453
    • 2005-02-24
    • Katsuhiko HiedaDaisuke Hagishima
    • Katsuhiko HiedaDaisuke Hagishima
    • H01L27/12G11C11/34
    • H01L27/115G11C16/0483H01L27/11519H01L27/11521H01L27/11524H01L29/42332H01L29/7851H01L29/7881
    • A semiconductor device comprises a semiconductor substrate, an electrically rewritable semiconductor memory cell provided on the semiconductor substrate, the memory cell comprising an island semiconductor portion provided on the surface of the semiconductor substrate or above the semiconductor substrate, a first insulating film provided on a top surface of the island semiconductor portion, a second insulating film provided on a side surface of the island semiconductor portion and being smaller in thickness than the first insulating film, and a charge storage layer provided on the side surface of the island semiconductor portion with the second insulating film interposed therebetween and on a side surface of the first insulating film, a third insulating film provided on the charge storage layer, and a control gate electrode provided on the third insulating film.
    • 半导体器件包括半导体衬底,设置在半导体衬底上的电可重写半导体存储单元,所述存储单元包括设置在半导体衬底的表面上或半导体衬底上的岛状半导体部分,设置在顶部上的第一绝缘膜 岛半导体部分的表面,设置在岛状半导体部分的侧表面上并且厚度小于第一绝缘膜的第二绝缘膜,以及设置在岛半导体部分的侧表面上的电荷存储层,第二绝缘膜具有第二绝缘膜 绝缘膜和第一绝缘膜的侧面,设置在电荷存储层上的第三绝缘膜和设置在第三绝缘膜上的控制栅电极。
    • 6. 发明授权
    • Semiconductor device and method of manufacture thereof
    • 半导体装置及其制造方法
    • US07579241B2
    • 2009-08-25
    • US11790391
    • 2007-04-25
    • Katsuhiko HiedaDaisuke Hagishima
    • Katsuhiko HiedaDaisuke Hagishima
    • H01L21/8247
    • H01L27/115G11C16/0483H01L27/11519H01L27/11521H01L27/11524H01L29/42332H01L29/7851H01L29/7881
    • A semiconductor device comprises a semiconductor substrate, an electrically rewritable semiconductor memory cell provided on the semiconductor substrate, the memory cell comprising an island semiconductor portion provided on the surface of the semiconductor substrate or above the semiconductor substrate, a first insulating film provided on a top surface of the island semiconductor portion, a second insulating film provided on a side surface of the island semiconductor portion and being smaller in thickness than the first insulating film, and a charge storage layer provided on the side surface of the island semiconductor portion with the second insulating film interposed therebetween and on a side surface of the first insulating film, a third insulating film provided on the charge storage layer, and a control gate electrode provided on the third insulating film.
    • 半导体器件包括半导体衬底,设置在半导体衬底上的电可重写半导体存储单元,所述存储单元包括设置在半导体衬底的表面上或半导体衬底上的岛半导体部分,设置在顶部的第一绝缘膜 岛半导体部分的表面,设置在岛状半导体部分的侧表面上并且厚度小于第一绝缘膜的第二绝缘膜,以及设置在岛半导体部分的侧表面上的电荷存储层,第二绝缘膜具有第二绝缘膜 绝缘膜和第一绝缘膜的侧面,设置在电荷存储层上的第三绝缘膜和设置在第三绝缘膜上的控制栅电极。
    • 9. 发明授权
    • Nonvolatile programmable logic switch
    • 非易失性可编程逻辑开关
    • US08525251B2
    • 2013-09-03
    • US13221292
    • 2011-08-30
    • Daisuke HagishimaAtsuhiro KinoshitaKazuya MatsuzawaKazutaka IkegamiYoshifumi Nishi
    • Daisuke HagishimaAtsuhiro KinoshitaKazuya MatsuzawaKazutaka IkegamiYoshifumi Nishi
    • H01L29/792
    • H01L29/7881G11C16/0408H01L27/1052H01L27/11521H01L27/11526H01L27/11546H01L27/11807H01L29/66825
    • A nonvolatile programmable logic switch according to an embodiment includes: a memory cell transistor including: a first source region and a first drain region of a second conductivity type formed at a distance from each other in a first semiconductor region of a first conductivity type; a first insulating film, a charge storage film, a second insulating film, and a control gate stacked in this order and formed on the first semiconductor region between the first source region and the first drain region; a pass transistor including: a second source region and a second drain region of a second conductivity type formed at a distance from each other in a second semiconductor region of the first conductivity type; a third insulating film, a gate electrode stacked in this order and formed on the second semiconductor region between the second source region and the second drain region, the gate electrode being electrically connected to the first drain region; and an electrode for applying a substrate bias to the first and second semiconductor regions.
    • 根据实施例的非易失性可编程逻辑开关包括:存储单元晶体管,包括:在第一导电类型的第一半导体区域中彼此间隔开形成的第二导电类型的第一源极区域和第一漏极区域; 第一绝缘膜,电荷存储膜,第二绝缘膜和控制栅极,并且形成在第一源极区域和第一漏极区域之间的第一半导体区域上; 传输晶体管,包括:在第一导电类型的第二半导体区域中彼此成一定距离地形成的第二导电类型的第二源极区域和第二漏极区域; 第三绝缘膜,栅极电极,并且形成在第二源极区域和第二漏极区域之间的第二半导体区域上,栅极电连接到第一漏极区域; 以及用于将衬底偏压施加到第一和第二半导体区域的电极。