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1. 发明授权

US5385217A Vibration eliminating apparatus for elminating vibration of an installation floor 失效
标题翻译：用于安装地板振动的消除振动的装置
公开(公告)号：US5385217A
公开(公告)日：1995-01-31
申请号：US885451
申请日：1992-05-19
申请人： Katsuhide Watanabe , Yoichi Kanemitu , Yukio Ikeda
发明人： Katsuhide Watanabe , Yoichi Kanemitu , Yukio Ikeda
IPC分类号： F16F15/03 , G12B5/00 , B25H1/02
CPC分类号： F16F15/03 , G12B5/00
摘要： A vibration eliminating apparatus for eliminating vibration suspends a floor board from an installation floor. A supporting electromagnet is provided on the installation floor in order to suspend a magnetic member fixed to the floor board by a magnetic force. The magnetic member is provided with a thin magnetic pole through a non-magnetic member, and a control electromagnet having a yoke located in proximity to the thin magnetic pole is provided to control a horizontal position of the floor board. A vibration detector is provided to detect vibration of the floor board, and a vibration monitor is used to decide whether or not vibration detected by the vibration detector is within an allowable range of a machine mounted on the floor board and output an operation enable signal only when vibration is within the allowable range.
摘要翻译：用于消除振动的振动消除装置将地板从安装地板悬挂下来。支撑电磁铁设置在安装地板上，以便通过磁力悬挂固定在地板上的磁性构件。磁性构件通过非磁性构件设置有薄磁极，并且设置具有位于薄磁极附近的磁轭的控制电磁体，以控制地板的水平位置。提供振动检测器来检测地板的振动，并且使用振动监测器来确定振动检测器检测到的振动是否在安装在地板上的机器的允许范围内，并仅输出操作使能信号当振动在允许范围内时。

2. 外观设计

USD711330S1 Elastic membrane for semiconductor wafer polishing 有权
标题翻译：用于半导体晶片抛光的弹性膜
公开(公告)号：USD711330S1
公开(公告)日：2014-08-19
申请号：US29384219
申请日：2011-01-28
申请人： Makoto Fukushima , Hozumi Yasuda , Osamu Nabeya , Katsuhide Watanabe , Keisuke Namiki
设计人： Makoto Fukushima , Hozumi Yasuda , Osamu Nabeya , Katsuhide Watanabe , Keisuke Namiki

3. 发明申请

US20120058709A1 POLISHING APPARATUS AND METHOD 有权
标题翻译：抛光装置和方法
公开(公告)号：US20120058709A1
公开(公告)日：2012-03-08
申请号：US13226800
申请日：2011-09-07
申请人： Makoto FUKUSHIMA , Katsuhide Watanabe , Hozumi Yasuda , Satoru Yamaki
发明人： Makoto FUKUSHIMA , Katsuhide Watanabe , Hozumi Yasuda , Satoru Yamaki
IPC分类号： B24B49/00 , B24B41/06
CPC分类号： B24B37/005 , B24B37/015 , B24B37/10 , B24B37/30 , H01L21/67017 , H01L21/67092 , H01L21/6838
摘要： A polishing is used for polishing a substrate such as a semiconductor wafer to a flat mirror finish. The polishing apparatus includes a polishing table having a polishing surface, a substrate holding apparatus configured to hold the substrate and to press the substrate against the polishing surface, and a controller. The substrate holding apparatus includes an elastic membrane configured to form a substrate holding surface which is brought into contact with the substrate, a carrier provided above the elastic membrane, at least one pressure chamber formed between the elastic membrane and the carrier, and an infrared light detector configured to measure thermal energy from the elastic membrane. The controller calculates an estimate value of a temperature of the elastic membrane using a measured value of the infrared light detector.
摘要翻译：抛光用于将诸如半导体晶片的基板抛光到平面镜面。抛光装置包括具有抛光表面的抛光台，配置成保持基板并将基板压靠在抛光表面上的基板保持装置和控制器。基板保持装置包括：弹性膜，其构造成形成与基板接触的基板保持面，设置在弹性膜上方的载体，形成在弹性膜与载体之间的至少一个压力室，以及红外线检测器被配置为测量来自弹性膜的热能。控制器使用红外光检测器的测量值来计算弹性膜的温度的估计值。

4. 发明授权

US5720010A Control system for a linear actuator including magnetic bearings for levitating a robot arm 失效
标题翻译：用于线性致动器的控制系统，包括用于悬浮机器人臂的磁性轴承
公开(公告)号：US5720010A
公开(公告)日：1998-02-17
申请号：US699342
申请日：1996-08-19
申请人： Katsuhide Watanabe , Yoichi Kanemitsu , Shinichi Moriyama , Naoji Hiraki
发明人： Katsuhide Watanabe , Yoichi Kanemitsu , Shinichi Moriyama , Naoji Hiraki
IPC分类号： B25J13/00 , B25J9/18 , B25J18/02 , B25J19/00 , F16C32/04 , F16C39/06 , G05B19/19 , H02P25/06 , G05B15/00 , G05B19/00
CPC分类号： F16C32/0444 , G05B19/19 , F16C2300/62 , G05B2219/45083 , G05B2219/49271
摘要： A control system for controlling a linear actuator including magnetic bearings for levitating a robot arm and a pulse motor for linearly driving the arm in a non-contact manner is disclosed, which comprises a displacement detection unit including displacement sensors, first and second calculation units, moving amount detection unit and adding circuit. The displacement detection unit detects displacement values of the arm from a reference posture, the first calculation unit calculates guiding (y), levitation (z), roll (p), pitching (q), and yaw (r) control current values in response to the displacement values and provides guiding, levitation, roll, pitching, and yaw control current signals (, , , , ). The moving amount detecting circuit detects a moving amount (X.sub.0) of the arm from a reference position in response to an operation of the pulse motor, and provides a compensation current value (.DELTA.Iq") proportional to the moving amount, and the adding circuit adds the compensation current value (.DELTA.Iq") to the pitching control current signal (). The second calculation unit, in response to the guiding, levitation, roll and yaw control current signals (, , , ) and the added pitching control current signal (+.DELTA.Iq"), calculates drive current control values to compensate drive current flowing through the magnetic bearings.
摘要翻译：公开了一种用于控制线性致动器的控制系统，包括用于悬浮机器人臂的磁轴承和用于以非接触方式线性驱动臂的脉冲电机，其包括位移检测单元，其包括位移传感器，第一和第二计算单元，移动量检测单元和加法电路。位移检测单元从参考姿势检测臂的位移值，第一计算单元计算响应中的引导（y），悬浮（z），滚动（p），俯仰（q）和偏航（r）控制电流值提供位移值，并提供引导，悬挂，滚动，俯仰和偏航控制电流信号（+ Z，+ Z，+ Z，+ Z，+ Z）。移动量检测电路响应于脉冲电动机的操作从参考位置检测臂的移动量（X0），并且提供与移动量成比例的补偿电流值（DELTA Iq“），并且添加电路将补偿电流值（DELTA Iq“）添加到俯仰控制电流信号（+ Z）。第二计算单元响应于引导，悬挂，转向和偏转控制电流信号（+ Z，+ Z，+ Z，+ Z）和增加的俯仰控制电流信号（+ Z + DELTA Iq“），计算驱动电流控制值来补偿流经磁轴承的驱动电流。

5. 发明授权

US5397212A Robot with dust-free and maintenance-free actuators 失效
标题翻译：机器人具有无尘和免维护的执行器
公开(公告)号：US5397212A
公开(公告)日：1995-03-14
申请号：US19678
申请日：1993-02-19
申请人： Katsuhide Watanabe , Yoichi Kanemitsu , Hiroyuki Shinozaki , Naoji Hiraki , Shinichi Moriyama
发明人： Katsuhide Watanabe , Yoichi Kanemitsu , Hiroyuki Shinozaki , Naoji Hiraki , Shinichi Moriyama
IPC分类号： B25J9/04 , B25J9/12 , B25J18/04
CPC分类号： H01L21/67766 , B25J9/041 , B25J9/123 , B25J9/126 , F16C32/0465 , H01L21/67742
摘要： A robot with no mechanically contacting components are suitable for use in special environments such as semiconductor manufacturing processes where dust and lubrication are matters of important concern. The robot has a linear actuator composed of magnetic bearings and a linear motor for moving a robot arm linearly without mechanical contact, and a rotary actuator composed of magnetic bearings and a rotary motor for rotating a body which supports the linear actuator, around the rotary actuator without mechanical contact.
摘要翻译：没有机械接触部件的机器人适用于特殊环境，如半导体制造过程，其中灰尘和润滑是重要关注的问题。机器人具有由磁性轴承构成的线性致动器和用于在不机械接触的情况下线性地移动机器人手臂的线性电动机，以及由磁性轴承和用于使支撑线性致动器的主体旋转的旋转电动机，围绕旋转致动器无机械接触。

6. 外观设计

USD633452S1 Elastic membrane for semiconductor wafer polishing apparatus 有权
公开(公告)号：USD633452S1
公开(公告)日：2011-03-01
申请号：US29356456
申请日：2010-02-25
申请人： Keisuke Namiki , Hozumi Yasuda , Osamu Nabeya , Makoto Fukushima , Shingo Togashi , Satoru Yamaki , Katsuhide Watanabe
设计人： Keisuke Namiki , Hozumi Yasuda , Osamu Nabeya , Makoto Fukushima , Shingo Togashi , Satoru Yamaki , Katsuhide Watanabe

7. 发明授权

US06437864B1 Stage positioning device 失效
标题翻译：舞台定位装置
公开(公告)号：US06437864B1
公开(公告)日：2002-08-20
申请号：US09355034
申请日：2000-05-18
申请人： Katsuhide Watanabe , Ichiju Satoh , Takahide Haga , Yoshinori Jouno
发明人： Katsuhide Watanabe , Ichiju Satoh , Takahide Haga , Yoshinori Jouno
IPC分类号： G01B1100
CPC分类号： G03F7/70758 , G03F7/70716 , G03F7/70816 , Y10S977/839
摘要： A micro-positioning apparatus enables stable and rapid positioning of a stage on which a specimen is placed. The apparatus has a stage for placing a specimen to be radiated with a beam, actuators for levitating the stage and controlling a movement of the stage, a first position sensor for measuring a relative displacement between the stage and the actuators, a second position sensor for measuring a relative displacement between an actual radiation position of the beam on the specimen and a target radiation position, and a controller for positioning the stage so as to decrease the relative displacement detected by the second sensor.
摘要翻译：微型定位装置能够稳定且快速地定位放置试样的载物台。该装置具有用于放置用光束辐射的样本的台阶，用于悬浮台架的致动器和控制台架的运动，用于测量台架和致动器之间的相对位移的第一位置传感器，用于测量样品上的光束的实际辐射位置与目标辐射位置之间的相对位移，以及用于定位该台的控制器，以便减小由第二传感器检测到的相对位移。

8. 发明授权

US5876012A Vibration cancellation apparatus 失效
标题翻译：振动消除装置
公开(公告)号：US5876012A
公开(公告)日：1999-03-02
申请号：US880640
申请日：1997-06-23
申请人： Takahide Haga , Katsuhide Watanabe
发明人： Takahide Haga , Katsuhide Watanabe
IPC分类号： F16F15/02 , F16F15/027 , F16M1/00
CPC分类号： F16F15/02 , F16F15/0275
摘要： A compact vibration cancellation apparatus based on a combination of air springs and electromagnetic actuators with smaller power capacity enables an anti-vibration table to be maintained in a level position even when the center of gravity of the anti-vibration table moves a large distance because of a movement of objective equipment on the table. The vibration cancellation apparatus is operable for isolating floor vibration or for canceling vibration of the objective equipment on the anti-vibration table. The apparatus includes displacement sensors, acceleration sensors, a levitation position control device, a vibration canceling control device, and air spring actuators for supporting four corners of the anti-vibration table by air pressure. The air pressure in each air spring actuator is controlled in response to a change of load which corresponds to a movement of the center of gravity caused by movement of the objective equipment on the anti-vibration table.
摘要翻译：基于空气弹簧和具有较小功率容量的电磁致动器的组合的紧凑型振动消除装置使得即使当防振台的重心移动较大距离时，防振台也能保持在水平位置，因为目标设备在桌子上的移动。振动消除装置可操作用于隔离地板振动或抵消防振台上的物镜设备的振动。该装置包括位移传感器，加速度传感器，悬浮位置控制装置，振动消除控制装置和用于通过空气压力支撑防振台的四个角的空气弹簧致动器。每个空气弹簧致动器中的空气压力响应于由目标设备在防振台上的移动引起的重心运动的负载变化而被控制。

9. 发明授权

US5793598A Magnetically levitated vibration damping apparatus 失效
标题翻译：磁悬浮减振装置
公开(公告)号：US5793598A
公开(公告)日：1998-08-11
申请号：US695850
申请日：1996-08-09
申请人： Katsuhide Watanabe , Yoichi Kanemitsu , Takahide Haga , Kenichi Yano , Takayuki Mizuno , Ryuta Katamura
发明人： Katsuhide Watanabe , Yoichi Kanemitsu , Takahide Haga , Kenichi Yano , Takayuki Mizuno , Ryuta Katamura
IPC分类号： F16F15/02 , F16F15/03 , B66C13/06
CPC分类号： F16F15/02 , F16F15/03
摘要： A magnetically levitated vibration damping apparatus includes a table having a flat board of a magnetic material, an electromagnetic actuator for applying magnetic attractive forces to the flat board to levitate the table, a displacement sensor for detecting relative displacement between the flat board and the electromagnetic actuator, an acceleration sensor for detecting absolute acceleration of the table, and a control system for controlling a current supplied to the electromagnetic actuator based on signals from the displacement sensor and the acceleration sensor according to a first control rule for controlling a gap between the flat board and the electromagnetic actuator based on the signal from the acceleration sensor and a second control rule for controlling vibrations of the table based on the signal from the acceleration sensor, the second control rule including stability control of relative displacement of the table.
摘要翻译：一种磁悬浮减振装置，包括具有磁性材料的平板的工作台，用于向平板施加磁性吸引力以浮动工作台的电磁致动器，用于检测平板与电磁致动器之间的相对位移的位移传感器，用于检测工作台的绝对加速度的加速度传感器，以及用于根据用于控制平板之间的间隙的第一控制规则，根据来自位移传感器和加速度传感器的信号控制提供给电磁致动器的电流的控制系统以及基于来自加速度传感器的信号的电磁致动器和用于基于来自加速度传感器的信号控制工作台的振动的第二控制规则，第二控制规则包括对工作台的相对位移的稳定性控制。

10. 发明授权

US5765800A Vibration damping apparatus 失效
标题翻译：减震装置
公开(公告)号：US5765800A
公开(公告)日：1998-06-16
申请号：US724829
申请日：1996-10-02
申请人： Katsuhide Watanabe , Yoichi Kanemitsu , Takahide Haga , Mamoru Suzuki
发明人： Katsuhide Watanabe , Yoichi Kanemitsu , Takahide Haga , Mamoru Suzuki
IPC分类号： F16F15/023 , F16M13/00
CPC分类号： F16F15/0232
摘要： A vibration damping apparatus has a vibration-isolating table for placing an object thereon which is to be isolated from vibrations, an air spring mounted on an installation floor and supporting the vibration-isolating table for attenuating vibrations from the installation floor, an air pressure controller for controlling an air pressure of the air spring, a displacement sensor for detecting a relative displacement between the vibration-isolating table and the installation floor and supplying a signal indicative of the detected relative displacement to the air pressure controller, and a spring element acting between the vibration-isolating table and the installation floor for positioning the vibration-isolating table horizontally. An electromagnet is disposed between the vibration-isolating table and the installation floor for actively attenuating vibrations of the vibration-isolating table. The vibration damping apparatus is operated to position the vibration-isolating table horizontally by means of the spring elements, and vertically by means of the air spring.
摘要翻译：减震装置具有用于放置要与振动隔离的物体的隔振台，安装在安装地板上的空气弹簧和支撑用于衰减来自安装地板的振动的防振台，空气压力控制器用于控制所述空气弹簧的空气压力的位移传感器，用于检测所述防振台和所述安装地板之间的相对位移并将指示所述检测到的相对位移的信号提供给所述空气压力控制器的位移传感器;以及弹簧元件，隔振台和用于水平定位防振台的安装地板。电磁铁设置在防振台和安装地板之间，用于主动衰减隔振台的振动。振动阻尼装置的作用是通过弹簧元件将隔振台水平放置，并通过空气弹簧垂直地定位。

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