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1. 发明授权

US06536735B2 Vibration isolating apparatus for table for mounting device sensitive to vibrations and method therefor 失效
公开(公告)号：US06536735B2
公开(公告)日：2003-03-25
申请号：US09971666
申请日：2001-10-09
申请人： Takahide Haga , Katsuhide Watanabe , Yoshinori Jouno
发明人： Takahide Haga , Katsuhide Watanabe , Yoshinori Jouno
IPC分类号： F16M1300
CPC分类号： G03F7/709 , F16F15/02 , G02B21/24 , G05D19/02
摘要： There are disclosed a vibration isolating apparatus and a vibration eliminating method imposed less restrictions on the positioning of components, such as active actuators, forming part of the vibration isolating apparatus. The vibration isolating apparatus can be implemented with a relatively simple controller (such as an analog circuit) and can limit the interference of control forces to a practically ignorable degree. The vibration isolating apparatus has a table for mounting thereon a device vulnerable to vibrations, a plurality of sensors 15-20 for detecting motions of the table and a plurality of active actuators 11-14 for controlling positions of the table. Processing and controlling means converts values measured by the respective sensors and control forces exerted by the respective active actuators to control and operating amounts for motions in a total of six degrees of freedom: one each for translation in the vertical direction and for rotation about the axis of the translation of the device vulnerable to vibrations, resiliently supported by the vibration isolating apparatus, or the table, and two each for translations on a horizontal plane and rotations about the axes of the translations. The conversion is performed on the assumption that the resilient supporting center matches the center of gravity, and based on the two-dimensional positional relationship between the resilient supporting center and the sensors and the active actuators.

2. 发明授权

US06515388B1 Magnetic levitation control apparatus 失效
标题翻译：磁悬浮控制装置
公开(公告)号：US06515388B1
公开(公告)日：2003-02-04
申请号：US09680954
申请日：2000-10-10
申请人： Shinichi Moriyama , Katsuhide Watanabe , Takahide Haga
发明人： Shinichi Moriyama , Katsuhide Watanabe , Takahide Haga
IPC分类号： H02K709
CPC分类号： F16C32/0448 , F16C32/0451 , H02N15/00
摘要： A magnetic levitation control apparatus comprises a pair of electromagnets for holding a levitated body having a magnetic body in the levitated state. A signal source for supplying a voltage signal of a frequency on a level such that enables the electromagnets to function as the position sensor, wherein a control voltage signal for controlling the magnetic attraction of the electromagnets is superimposed on the voltage signal. A circuit differentially supplies the voltage signal to the pair of electromagnets to form a position signal of the levitated body from an add signal of currents respectively from the electromagnets, and a circuit detects a control current of the electromagnets from a subtraction signal of currents respectively from the electromagnets. A controller generates a control voltage signal of the electromagnets from the detected position signal of the levitated body and, in addition, corrects the position signal detected from the detected control current of the electromagnets.
摘要翻译：一种磁悬浮控制装置包括一对电磁体，用于保持具有处于悬浮状态的磁体的悬浮体。一种用于提供频率电压信号的信号源，其电平使得电磁体能够用作位置传感器，其中用于控制电磁体的磁吸引力的控制电压信号叠加在电压信号上。电路差分地将电压信号提供给该对电磁体，以从电磁体分别从电流的相加信号形成悬浮体的位置信号，并且电路从电流的减法信号分别检测电磁体的控制电流电磁铁。控制器根据检测到的悬浮体的位置信号产生电磁体的控制电压信号，并且还校正从检测到的电磁体的控制电流检测的位置信号。

3. 发明授权

US06437864B1 Stage positioning device 失效
标题翻译：舞台定位装置
公开(公告)号：US06437864B1
公开(公告)日：2002-08-20
申请号：US09355034
申请日：2000-05-18
申请人： Katsuhide Watanabe , Ichiju Satoh , Takahide Haga , Yoshinori Jouno
发明人： Katsuhide Watanabe , Ichiju Satoh , Takahide Haga , Yoshinori Jouno
IPC分类号： G01B1100
CPC分类号： G03F7/70758 , G03F7/70716 , G03F7/70816 , Y10S977/839
摘要： A micro-positioning apparatus enables stable and rapid positioning of a stage on which a specimen is placed. The apparatus has a stage for placing a specimen to be radiated with a beam, actuators for levitating the stage and controlling a movement of the stage, a first position sensor for measuring a relative displacement between the stage and the actuators, a second position sensor for measuring a relative displacement between an actual radiation position of the beam on the specimen and a target radiation position, and a controller for positioning the stage so as to decrease the relative displacement detected by the second sensor.
摘要翻译：微型定位装置能够稳定且快速地定位放置试样的载物台。该装置具有用于放置用光束辐射的样本的台阶，用于悬浮台架的致动器和控制台架的运动，用于测量台架和致动器之间的相对位移的第一位置传感器，用于测量样品上的光束的实际辐射位置与目标辐射位置之间的相对位移，以及用于定位该台的控制器，以便减小由第二传感器检测到的相对位移。

4. 发明授权

US5876012A Vibration cancellation apparatus 失效
标题翻译：振动消除装置
公开(公告)号：US5876012A
公开(公告)日：1999-03-02
申请号：US880640
申请日：1997-06-23
申请人： Takahide Haga , Katsuhide Watanabe
发明人： Takahide Haga , Katsuhide Watanabe
IPC分类号： F16F15/02 , F16F15/027 , F16M1/00
CPC分类号： F16F15/02 , F16F15/0275
摘要： A compact vibration cancellation apparatus based on a combination of air springs and electromagnetic actuators with smaller power capacity enables an anti-vibration table to be maintained in a level position even when the center of gravity of the anti-vibration table moves a large distance because of a movement of objective equipment on the table. The vibration cancellation apparatus is operable for isolating floor vibration or for canceling vibration of the objective equipment on the anti-vibration table. The apparatus includes displacement sensors, acceleration sensors, a levitation position control device, a vibration canceling control device, and air spring actuators for supporting four corners of the anti-vibration table by air pressure. The air pressure in each air spring actuator is controlled in response to a change of load which corresponds to a movement of the center of gravity caused by movement of the objective equipment on the anti-vibration table.
摘要翻译：基于空气弹簧和具有较小功率容量的电磁致动器的组合的紧凑型振动消除装置使得即使当防振台的重心移动较大距离时，防振台也能保持在水平位置，因为目标设备在桌子上的移动。振动消除装置可操作用于隔离地板振动或抵消防振台上的物镜设备的振动。该装置包括位移传感器，加速度传感器，悬浮位置控制装置，振动消除控制装置和用于通过空气压力支撑防振台的四个角的空气弹簧致动器。每个空气弹簧致动器中的空气压力响应于由目标设备在防振台上的移动引起的重心运动的负载变化而被控制。

5. 发明授权

US5793598A Magnetically levitated vibration damping apparatus 失效
标题翻译：磁悬浮减振装置
公开(公告)号：US5793598A
公开(公告)日：1998-08-11
申请号：US695850
申请日：1996-08-09
申请人： Katsuhide Watanabe , Yoichi Kanemitsu , Takahide Haga , Kenichi Yano , Takayuki Mizuno , Ryuta Katamura
发明人： Katsuhide Watanabe , Yoichi Kanemitsu , Takahide Haga , Kenichi Yano , Takayuki Mizuno , Ryuta Katamura
IPC分类号： F16F15/02 , F16F15/03 , B66C13/06
CPC分类号： F16F15/02 , F16F15/03
摘要： A magnetically levitated vibration damping apparatus includes a table having a flat board of a magnetic material, an electromagnetic actuator for applying magnetic attractive forces to the flat board to levitate the table, a displacement sensor for detecting relative displacement between the flat board and the electromagnetic actuator, an acceleration sensor for detecting absolute acceleration of the table, and a control system for controlling a current supplied to the electromagnetic actuator based on signals from the displacement sensor and the acceleration sensor according to a first control rule for controlling a gap between the flat board and the electromagnetic actuator based on the signal from the acceleration sensor and a second control rule for controlling vibrations of the table based on the signal from the acceleration sensor, the second control rule including stability control of relative displacement of the table.
摘要翻译：一种磁悬浮减振装置，包括具有磁性材料的平板的工作台，用于向平板施加磁性吸引力以浮动工作台的电磁致动器，用于检测平板与电磁致动器之间的相对位移的位移传感器，用于检测工作台的绝对加速度的加速度传感器，以及用于根据用于控制平板之间的间隙的第一控制规则，根据来自位移传感器和加速度传感器的信号控制提供给电磁致动器的电流的控制系统以及基于来自加速度传感器的信号的电磁致动器和用于基于来自加速度传感器的信号控制工作台的振动的第二控制规则，第二控制规则包括对工作台的相对位移的稳定性控制。

6. 发明授权

US5765800A Vibration damping apparatus 失效
标题翻译：减震装置
公开(公告)号：US5765800A
公开(公告)日：1998-06-16
申请号：US724829
申请日：1996-10-02
申请人： Katsuhide Watanabe , Yoichi Kanemitsu , Takahide Haga , Mamoru Suzuki
发明人： Katsuhide Watanabe , Yoichi Kanemitsu , Takahide Haga , Mamoru Suzuki
IPC分类号： F16F15/023 , F16M13/00
CPC分类号： F16F15/0232
摘要： A vibration damping apparatus has a vibration-isolating table for placing an object thereon which is to be isolated from vibrations, an air spring mounted on an installation floor and supporting the vibration-isolating table for attenuating vibrations from the installation floor, an air pressure controller for controlling an air pressure of the air spring, a displacement sensor for detecting a relative displacement between the vibration-isolating table and the installation floor and supplying a signal indicative of the detected relative displacement to the air pressure controller, and a spring element acting between the vibration-isolating table and the installation floor for positioning the vibration-isolating table horizontally. An electromagnet is disposed between the vibration-isolating table and the installation floor for actively attenuating vibrations of the vibration-isolating table. The vibration damping apparatus is operated to position the vibration-isolating table horizontally by means of the spring elements, and vertically by means of the air spring.
摘要翻译：减震装置具有用于放置要与振动隔离的物体的隔振台，安装在安装地板上的空气弹簧和支撑用于衰减来自安装地板的振动的防振台，空气压力控制器用于控制所述空气弹簧的空气压力的位移传感器，用于检测所述防振台和所述安装地板之间的相对位移并将指示所述检测到的相对位移的信号提供给所述空气压力控制器的位移传感器;以及弹簧元件，隔振台和用于水平定位防振台的安装地板。电磁铁设置在防振台和安装地板之间，用于主动衰减隔振台的振动。振动阻尼装置的作用是通过弹簧元件将隔振台水平放置，并通过空气弹簧垂直地定位。

7. 发明申请

US20070122666A1 Method of operating fuel cell system and fuel cell system 审中-公开
标题翻译：运行燃料电池系统和燃料电池系统的方法
公开(公告)号：US20070122666A1
公开(公告)日：2007-05-31
申请号：US10582491
申请日：2004-12-10
申请人： Qingquan Su , Toshihiro Horie , Masaki Ando , Takahide Haga
发明人： Qingquan Su , Toshihiro Horie , Masaki Ando , Takahide Haga
IPC分类号： H01M8/06 , H01M8/04
CPC分类号： H01M8/04955 , C01B3/384 , C01B3/48 , C01B2203/0233 , C01B2203/0283 , C01B2203/044 , C01B2203/047 , C01B2203/066 , C01B2203/0811 , C01B2203/0822 , C01B2203/0827 , C01B2203/1047 , C01B2203/1058 , C01B2203/1604 , C01B2203/1619 , C01B2203/169 , C01B2203/1695 , C10K3/00 , C10K3/04 , H01M8/04022 , H01M8/04223 , H01M8/04225 , H01M8/04302 , H01M8/04373 , H01M8/04776 , H01M8/0491 , H01M8/0612 , H01M8/0618 , H01M8/0668 , Y02P20/128
摘要： To provide a fuel cell power generation system which has no assist combustion system and thus is simple in structure and a method for starting the fuel cell power generation system and controlling the operation of the fuel cell power generation system, in order to provide a fuel cell power generation system which operates stably with a high reliability. In a fuel cell power generation system having a reforming section 5 for reforming a raw material fuel m to produce reformate r; a combustion section 4 for burning the raw material fuel to heat the reforming section; carbon monoxide reduction section 6 and 7 for reducing the content of carbon monoxide in the reformate to produce carbon monoxide reduced gas g; and a fuel cell 30 which uses the carbon monoxide reduced gas as fuel gas, the raw material fuel is supplied to the combustion section to heat the reforming section to a predetermined temperature, supply of the raw material fuel to the combustion section is stopped, the raw material fuel is supplied to the reforming section to produce reformate, the reformate is introduced into the carbon monoxide reduction section to heat the carbon monoxide reduction section, and the carbon monoxide reduced gas generated in the carbon monoxide reduction section is introduced into the fuel cell to generate electric power.
摘要翻译：为了提供一种燃料电池发电系统，其不具备辅助燃烧系统，结构简单，起动燃料电池发电系统的方法和控制燃料电池发电系统的运转，为了提供燃料电池发电系统稳定运行，可靠性高。在具有重整部分5的燃料电池发电系统中，用于重整原料燃料m以产生重整油r; 用于燃烧原料燃料以加热重整部分的燃烧部分4; 一氧化碳还原段6和7用于降低重整产物中一氧化碳的含量以产生一氧化碳还原气体g; 使用一氧化碳还原气体作为燃料气体的燃料电池30，将原料燃料供给到燃烧部，将重整部加热到规定温度，停止向燃烧部供给原料燃料，将原料燃料供给到重整部分以产生重整产物，重整产物被引入一氧化碳还原部分以加热一氧化碳还原部分，一氧化碳还原部分产生的一氧化碳还原气体被引入燃料电池发电。

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