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    • 1. 发明授权
    • Optical method of detecting defect and apparatus used therein
    • 检测缺陷的光学方法及其中使用的装置
    • US5894345A
    • 1999-04-13
    • US859423
    • 1997-05-20
    • Kenji TakamotoKanji NishiiMasami ItoAtsushi FukuiKazumasa Takata
    • Kenji TakamotoKanji NishiiMasami ItoAtsushi FukuiKazumasa Takata
    • G01B11/30G01N21/88G01N21/89G01N21/956G01N21/00
    • G01N21/8903
    • An array light source 1 with semiconductor laser sources disposed one-dimensionally and a projective lens 2 are used to illuminate an inspected object so that light beams projected from the array light source form a dotted line on the object. A line sensor is used to receive through an objective lens 3 light emitted from an imaging area 11 away from an illuminated area 12. An image signal, fed to an image processing unit 8 through a pre-processing unit 7 producing an image from signals from the line sensor 4 and a stage 5 is processed, while the stage 5 bearing the object 6 is being gradually moved, to inspect the object 6 for crack defects 9 and 10 by detecting an optically nonhomogeneous portion of the object. The method allows a crack defect of an object, such as a ceramic substrate or a sintered metal product, to be detected fast with high accuracy.
    • 使用具有一维设置的半导体激光源的阵列光源1和投射透镜2来照射被检查物体,使得从阵列光源投射的光束在物体上形成虚线。 线传感器用于通过物镜3接收从成像区域11发出的远离照明区域12的光。图像信号,通过预处理单元7馈送到图像处理单元8,从预处理单元7产生来自 在承载物体6的台架5正在逐渐移动的同时,对线传感器4和台5进行处理,通过检测物体的光学非均匀部分来检查物体6的裂纹缺陷9和10。 该方法允许以高精度快速检测诸如陶瓷基板或烧结金属产品的物体的裂纹缺陷。
    • 3. 发明授权
    • Optical encoder with dual diffraction grating
    • 具有双衍射光栅的光学编码器
    • US5696373A
    • 1997-12-09
    • US711513
    • 1996-09-10
    • Atsushi FukuiKanji NishiiKenji TakamotoMasami Ito
    • Atsushi FukuiKanji NishiiKenji TakamotoMasami Ito
    • G01B11/00G01D5/38G02B5/18G02B27/42G03F9/00H01J3/14
    • G03F9/70G01D5/38
    • An optical encoder including a light source and a first grating plate having a first diffraction grating for diffracting a light beam emitted from the light source. The optical encoder further includes a second grating plate having a second diffraction grating including a blazed diffraction grating for further diffracting the light beam diffracted by the first diffraction grating so as to allow the light beam to be incident on the first grating plate. The optical encoder also includes a light-receiving portion for receiving the light beam reentering the first grating plate and diffracted by the first grating plate. The second diffraction grating is designed so that the greater part of the diffracted light is concentrated in diffracted light beam of a predetermined order among the light beams from the first diffraction grating, and the diffracted light beam of the predetermined order travels from the second diffraction grating in a direction which is parallel with a direction in which the light beam is incident on the second diffraction grating from the first grating plate. The light-receiving portion generates an electric signal in accordance with an amount of plus and minus mth-order diffracted light beams of the further diffracted light beam.
    • 一种光学编码器,包括光源和具有用于衍射从光源发射的光束的第一衍射光栅的第一光栅板。 光学编码器还包括具有第二衍射光栅的第二光栅板,第二衍射光栅包括闪耀的衍射光栅,用于进一步衍射由第一衍射光栅衍射的光束,以允许光束入射在第一光栅板上。 光学编码器还包括用于接收重新进入第一光栅板并被第一光栅板衍射的光束的光接收部分。 第二衍射光栅被设计成使得衍射光的大部分集中在来自第一衍射光栅的光束之间的预定次数的衍射光束中,并且预定次数的衍射光束从第二衍射光栅行进 在与第一光栅板上的光束入射到第二衍射光栅上的方向平行的方向上。 光接收部分根据进一步的衍射光束的正和负的第m级衍射光束的量产生电信号。
    • 6. 发明授权
    • Method and appratus for measuring thickness of birefringence layer
    • 测量双折射层厚度的方法和应用
    • US5734472A
    • 1998-03-31
    • US668136
    • 1996-06-21
    • Masami ItoKanji NishiiKenji TakamotoAtsushi Fukui
    • Masami ItoKanji NishiiKenji TakamotoAtsushi Fukui
    • G01B11/06G01M11/00G01N21/23G02F1/13G01N21/21
    • G01N21/23
    • A liquid crystal layer is interposed between two polarizers arranged in a parallel Nicol or crossed Nicol manner, and a phase plate is set between two polarizers so that the transmission direction of the first polarizer coincides with the optical axis. Then, a rotation angle at which optical intensity transmitted through the second polarizer has an extreme value to be determined, and the thickness of the birefringence layer is calculated according to the rotation angle of the phase plate. In a different method, a half-wave plate is used. First, the liquid crystal layer is set at a position where an optical intensity of the transmission light has an extreme value, and the half-wave plate provided between the two polarizers is set so that a transmission direction of the first polarizer coincides with the optical axis. Then, a rotation angle of the phase plate is determined at which an optical intensity of light transmitted through the second polarizer has an extreme value. Then, the thickness is calculated according to the rotation angle of the half-wave plate. Thus, the thickness is measured in a short time even for a liquid crystal that does not have a twist angle of 90.degree. or in which the rubbing direction is not known.
    • 将液晶层插入以并联尼科耳或尼科尔方式排列的两个偏振器之间,将相位板设置在两个偏振器之间,使得第一偏振器的透射方向与光轴重合。 然后,透过第二偏振片的光强度的旋转角度具有待确定的极值,并且根据相位板的旋转角度来计算双折射层的厚度。 使用不同的方法,使用半波片。 首先,将液晶层设置在透光光的光强度为极值的位置,设置在两个偏振器之间的半波片被设定为使得第一偏振器的透射方向与光 轴。 然后,确定透射通过第二偏振器的光的光强度具有极值的相位板的旋转角。 然后,根据半波片的旋转角度来计算厚度。 因此,即使对于不具有90°扭转角的液晶,或者摩擦方向不知道,也可以在短时间内测量厚度。
    • 7. 发明授权
    • Optical encoder using doubled diffraction angle based on first and
second diffraction gratings
    • 基于第一和第二衍射光栅的双重衍射角光学编码器
    • US5696374A
    • 1997-12-09
    • US711598
    • 1996-09-10
    • Atsushi FukuiKanji NishiiKenji TakamotoMasami Ito
    • Atsushi FukuiKanji NishiiKenji TakamotoMasami Ito
    • G01B11/00G01D5/38G02B5/18G02B27/42G03F9/00G01B9/02
    • G03F9/70G01D5/38
    • An optical encoder includes: a light source; a first grating plate having a first diffraction grating for diffracting a light beam emitted from the light source; a second grating plate having a second diffraction grating for further diffracting the light beam diffracted by the first diffraction grating; a reflector for reflecting the light beam from the second grating plate so as to allow the light beam to reenter the second grating plate; and a light-receiving portion for receiving the light beam reflected by the reflector and successively diffracted by the second and first grating plates, wherein a diffraction angle of plus and minus first-order diffracted light beams of the first diffraction grating is substantially equal to that of the plus and minus first-order diffracted light beams of the second diffraction grating, and the light-receiving portion generates an electric signal in accordance with the amount of the plus and minus first-order diffracted light beams of the first diffraction grating.
    • 光学编码器包括:光源; 第一光栅板,具有用于衍射从光源发射的光束的第一衍射光栅; 第二光栅板,具有用于进一步衍射由第一衍射光栅衍射的光束的第二衍射光栅; 用于反射来自第二光栅板的光束以使光束重新进入第二光栅板的反射器; 以及光接收部分,用于接收由反射器反射并被第二和第一光栅板连续衍射的光束,其中第一衍射光栅的正,负一级衍射光束的衍射角基本上等于 第二衍射光栅的正,负一级衍射光束,并且光接收部分根据第一衍射光栅的正,负一级衍射光束的量产生电信号。
    • 9. 发明授权
    • Optical encoder with dual diffraction gratings
    • 具有双衍射光栅的光学编码器
    • US5661295A
    • 1997-08-26
    • US504708
    • 1995-07-20
    • Atsushi FukuiKanji NishiiKenji TakamotoMasami Ito
    • Atsushi FukuiKanji NishiiKenji TakamotoMasami Ito
    • G01B11/00G01D5/38G02B5/18G02B27/42G03F9/00G01B9/02H01J3/12
    • G03F9/70G01D5/38
    • An optical encoder includes: a light source; a first grating plate having a first diffraction grating for diffracting a light beam emitted from the light source; a second grating plate having a second diffraction grating for further diffracting the light beam diffracted by the first diffraction grating; a reflector for reflecting the light beam from the second grating plate so as to allow the light beam to reenter the second grating plate; and a light-receiving portion for receiving the light beam reflected by the reflector and successively diffracted by the second and first grating plates, wherein a diffraction angle of plus and minus first-order diffracted light beams of the first diffraction grating is substantially equal to that of the plus and minus first-order diffracted light beams of the second diffraction grating, and the light-receiving portion generates an electric signal in accordance with the amount of the plus and minus first-order diffracted light beams of the first diffraction grating.
    • 光学编码器包括:光源; 第一光栅板,具有用于衍射从光源发射的光束的第一衍射光栅; 第二光栅板,具有用于进一步衍射由第一衍射光栅衍射的光束的第二衍射光栅; 用于反射来自第二光栅板的光束以使光束重新进入第二光栅板的反射器; 以及光接收部分,用于接收由反射器反射并被第二和第一光栅板连续衍射的光束,其中第一衍射光栅的正,负一级衍射光束的衍射角基本上等于 第二衍射光栅的正,负一级衍射光束,并且光接收部分根据第一衍射光栅的正,负一级衍射光束的量产生电信号。
    • 10. 发明授权
    • Fourier transform optical apparatus and optical information
    • 傅里叶变换光学装置和光学信息
    • US5627678A
    • 1997-05-06
    • US404900
    • 1995-03-15
    • Kanji NishiiKenji TakamotoMasami ItoAtsushi Fukui
    • Kanji NishiiKenji TakamotoMasami ItoAtsushi Fukui
    • G02B13/00G02B27/46G03H1/16
    • G02B27/46
    • A Fourier transform optical apparatus for optically Fourier transforming an input image includes a spatial light modulator for displaying an input image, a light source for irradiating the input image on the spatial light modulator, a first convex lens and a first concave lens arranged near the spatial light modulator and a second convex lens arranged at the composite focal plane of the first convex lens and first concave lens. The respective focal lengths of these three lenses are determined to satisfy conditions such that a light ray passing an intersection of the spatial light modulator and an optical axis of the Fourier transform optical apparatus becomes a light ray parallel to the optical axis after passing the second convex lens and a light ray incident to the first convex lens in parallel to the optical axis is focused at the composite focal point of the first convex lens, first concave lens and the second convex lens.
    • 用于对输入图像进行光学傅里叶变换的傅里叶变换光学装置包括用于显示输入图像的空间光调制器,用于在空间光调制器上照射输入图像的光源,布置在空间光调制器附近的第一凸透镜和第一凹透镜 光调制器和布置在第一凸透镜和第一凹透镜的复合焦平面处的第二凸透镜。 这三个透镜的各个焦距被确定为满足通过空间光调制器和傅里叶变换光学装置的光轴的交点的光线在通过第二凸起之后成为平行于光轴的光线 在第一凸透镜,第一凹透镜和第二凸透镜的复合焦点上聚焦透镜和入射到与光轴平行的第一凸透镜的光线。